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At a glance

Master of Science
none | aptitude test neccessary
4 semesters
October 1
Bachelor's degree in a similar field

Application with German certificates

Application with foreign certificates


The master program Micro- and Nanotechnologies is designed non-consecutive. It is operated as a cooperation by the Department of Electrical Engineering and Information Technology, the Department of Mechanical Engineering and the Department of Mathematics and Natural Sciences. Students can acquire a Master’s degree in Micro- and Nanotechnologies. The program is based on courses both in fundamental and engineering sciences and aims to deepens skills and competencies acquired from undergraduate studies or practical work experience in the field of micro- and nanotechnologies. The program is directed to students with a bachelor degree or to those who want to change over from a diploma program (needs to be individually checked) from the following courses: Electrical Engineering and Information Technology, Electronics, Mechanical Engineering, Mechatronics, Technical Physics or Materials Sciences and Engineering. All Bachelor's programs must have a high proportion of electrical engineering/electronics, semiconductor technology and solid-state physics.

For a self-assessment of the performance level we offer a test with this link.

The program is directed to bachelor graduates who have equally technical and scientific interest and who want to step up to the plate to deepen their understanding, the production and the instrumental mastery of micro structural elements, microsystems and various nano-objects in research, as well as to bring micro- and nanostructures and functional nanosystems to an industrial application.

The development of materials, structural elements and systems with key components with dimensions under about 0.1 μm has created a significant need for experts that can work at the interface between well-controlled lithographic microtechnology and molecular techniques.

The aim is to enable students within the concentration to advance future developments on micro- and nanotechnologies as well as nanotechnical systems.

Teaching language is English!

Content of Study

Obligatory Courses (e.g. Electronics Technology, Semiconductor devices, Materials of Micro- and Nanotechnologies, Nanodiagnostics, Nanotechnology, Micro Technologies, Laboratory for Materials & Micro/Nanofabrication)

30 %

Advanced Courses (Optional Courses) (e.g. MEMS, Micro and nano sensor technology, 3D material analysis, Functional materials, Thin films and surfaces)

28 %

Introduction to Project work, Soft skills

8 %

Project with seminar

8 %

Technical elective subjects (Choice of technical subject(s) from the master curricula)

4 %

Master thesis

25 %
Detaillierte Modulübersicht: Curriculum of the Master Program Micro- and Nanotechnologies (Module list)

Fields of work

  • Microelectronics
  • Microsystems Technology and Nanotechnology
  • Sensor Technology
  • Measurement Technology
  • Industrial Electronics
  • Power Engineering
  • Information Electronics
  • Medical Technology

Jonas is studying Micro- and Nanotechnologies at the TU Ilmenau

Through Ilmenau with Janine and Marcel

Janine and Marcel take you on an exciting tour of the campus of the Ilmenau University of Technology and through Ilmenau itself. They describe how they live and study in Ilmenau, give numerous leisure tips and insights into the place of study of the Ilmenau University of Technology and take you to hidden places in the city.

(This video was created as part of a campaign by Campus Thüringen, the official portal for choosing a course of study in Thuringia. For more insights into Thuringia's study locations, click here. © Pixelpakete GbR)


Student advisory service

Study organisation

Cornelia Scheibe

+49 3677 69-2610