Generation of a static torque in the range of 1 mNm to 1 Nm according to the Jokey-weight principle. - In: Messunsicherheit - Prüfprozesse 2019, (2019), S. 111-120
Neues Konzept für eine fünfachsige Nanomessmaschine. - In: Messunsicherheit - Prüfprozesse 2019, (2019), S. 131-138
Kraftgesteuerte Messzelle für Dilatometeranwendungen. - Ilmenau : Universitätsverlag Ilmenau, 2019. - 1 Online-Ressource (XVI, 168 Seiten). - (Berichte aus dem Institut für Maschinen- und Gerätekonstruktion (IMGK) ; Band 32)
Technische Universität Ilmenau, Dissertation 2018
Werkstoffinnovation ist eine wesentliche treibende Kraft des 21. Jahrhunderts. Die Forschung und Weiterentwicklung von innovativen Materialien vergrößert stets deren Anwendungsbereich und den ressourceneffizienten Einsatz in technischen Gebilden. Dieser allgemeine Trend der Weiterentwicklung von Materialien führt zu höheren Anforderungen an Messgeräte, welche die zugehörigen Materialkenngrößen ermitteln. Im Bereich der Dilatometrie wird die Längenänderung von thermisch beeinflussten Materialien analysiert. Zukünftige und zum Teil bereits aktuelle messtechnische Anforderungen von z. B. weichen Materialien können mit bestehenden Möglichkeiten der technischen Realisierung nicht mehr sicher erfüllt werden. Hieraus leitet sich ein Handlungsbedarf hinsichtlich technischer und konstruktiver Weiterentwicklung ab. Ziel dieser Arbeit ist es, den aktuellen Entwicklungsstand zur messtechnischen Erfassung von thermisch induzierten Längenänderungen darzustellen und Möglichkeiten für dessen Weiterentwicklung zu erarbeiten. Hierzu wird das Arbeitsfeld begrifflich und inhaltlich abgegrenzt. Mithilfe einer Betrachtung des Standes der Technik werden Anforderungen für die Weiterentwicklung abgeleitet. Im Rahmen der konstruktiven Entwicklung spielt hierbei die Reduzierung wesentlicher Störeinflüsse auf die Längenänderung der Probe eine entscheidende Rolle. Ein besonderes Ziel besteht darin, den Krafteinfluss während der Längenmessung stark zu verringern sowie den Einfluss durch manuelle Bedienung zu eliminieren. In der vorliegenden Arbeit werden für die Entwicklung und Realisierung einer kraftgesteuerten Messzelle systematisch Lösungsräume erarbeitet sowie anschließend schrittweise hinsichtlich der Erfüllung der gegebenen Anforderungen untersucht und bewertet. Aus methodischer Sicht stellt diese Arbeit eine Vorgehensweise zur zielgerichteten Entwicklung einer kraftgesteuerten Messzelle dar. Die Funktionsfähigkeit des erarbeiteten Konstruktionsentwurfs wird durch experimentelle Ergebnisse im Rahmen des messtechnischen Nachweises bestätigt. Den Abschluss dieser Arbeit bilden sowohl eine Einflussgrößenanalyse als auch eine Zusammenfassung ermittelter charakteristischer Eigenschaften der Messzelle gefolgt von einem Ausblick zur Weiterentwicklung.
https://nbn-resolving.org/urn:nbn:de:gbv:ilm1-2018000443
Applications of a fiber coupled chromatic confocal sensor in nanopositioning and nanomeasuring machines :
Anwendungen eines fasergekoppelten chromatisch konfokalen Sensors in Nanopositionier- und Nanomessmaschinen. - In: Technisches Messen, ISSN 2196-7113, Bd. 86 (2019), S. S17-S21
https://doi.org/10.1515/teme-2019-0041
In situ error measurement of serial rotational devices for the application in nano coordinate measuring machines :
In-situ-Messung von Bewegungsabweichungen serieller Rotationsachsen zur Anwendung in Nanomessmaschinen. - In: Technisches Messen, ISSN 2196-7113, Bd. 86 (2019), S. S77-S81
https://doi.org/10.1515/teme-2019-0040
Synthesis method for compliant mechanisms of high-precision and large-stroke by use of individually shaped power function flexure hinges. - In: Advances in mechanism and machine science, (2019), S. 1569-1578
Optimization-based approach to the embodiment design of compliant mechanisms with different flexure hinges. - In: Advances in mechanism and machine science, (2019), S. 1579-1588
On the development and qualification of multiaxial designs of nanofabrication machines with ultra precision tool rotations. - In: Proceedings of the 19th International Conference of the European Society for Precision Engineering and Nanotechnology, (2019), insges. 2 S.
The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system with a repeatability in the nanometer range. This in combination with the specific nature of sensors and tools limits the addressable part geometries. This article contributes to the enhancement of multiaxial machine structures by the implementation of rotational movements while keeping the precision untouched. A parameter based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify general solution concepts and adequate substructures. It further on contains data based on comprehensive design catalogues, uncertainty calculations and CAD-model based footprint analysis for specific setups. First evaluations show high potential for sample scanning mode variants considering linear movements of the object in combination with angular movements of the tool, considering a goniometer setup in specific. Based on this, positioning systems for the tool rotation of a NPMM were selected and the positioning properties of different arrangements were determined in test series using autocollimators. General properties of the influence of the arrangement were derived. The arrangement of the substructures which fulfils the previous given requirements is integrated into the NPMM and investigated for long-term stability using a retroreflector as a tool and various laser interferometers. The influence of the additional positioning systems on the existing structure of NPMMs are investigated and solutions for the optimization of the overall system with regard to reproducibility and long-term stability are developed. For this purpose, comprehensive FEA simulations are carried out and structural adjustments are derived via topology optimizations. After all, the knowledge gained is formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.
Measuring setup for the investigation of the reproducibility of tool changing interfaces for high-precision devices. - In: Proceedings of the 19th International Conference of the European Society for Precision Engineering and Nanotechnology, (2019), S. 172-173
High-precision devices such as the nanopositioning and nanomeasuring machines developed at Technische Universität Ilmenau are capable of measuring structures with nanometre precision. The machines are prepared for the use of different measuring tools, whereby the tool change has to be done manually. The reproducibility of the tool change is not sufficient to continue measuring without elaborate calibration. The extension of the machine capabilities for use in nanofabrication requires an automatic, highly reproducible tool change. A reproducibility of the changing interface of 30 nm is targeted. State of the art interfaces have a reproducibility which is one order of magnitude lower. To be able to measure the reproducibility in five DOF, an appropriate measuring method and setup are required. The required properties such as the measurement uncertainties are determined on the basis of these requirements. Measuring methods are compared, evaluated and selected systematically. The design of the measuring setup focuses particularly on minimizing disturbing temperature influences for the identification of function-determining influences of kinematic couplings. A vector-based uncertainty analysis is carried out to validate the setup.
Investigations of different compliant manipulator concepts for a high-precise rotational motion. - In: Proceedings of the 19th International Conference of the European Society for Precision Engineering and Nanotechnology, (2019), S. 64-67
Due to their advantages over conventional mechanisms, compliant mechanisms with notch flexure hinges are state of the art in precision engineering and micro systems technology. These compliant mechanisms are often used in positioning and adjustment applications with up to six degrees of freedom. In addition to the translational motions, as they are mainly required in linear tables and planar stages, also rotational motions are needed. For the realization of a high-precise rotation by compliant manipulators certain concepts with different complexity are existing. One approach is the use of flexure hinges with different geometrical parameters and notch shapes, which can be purposefully optimised depending on the requirements of the specific application. Another approach is the use of compliant mechanisms, in which the instantaneous centre of rotation represents the axis of rotation of the guided link either according to the remote centre of compliance concept or within the mechanism design space itself. In addition, a novel concept using a specific configuration of a four-bar mechanism, in which two adjacent links are of an equal length is presented in this contribution. The different approaches are compared by means of kinematic investigations and FEM-based simulations and the potential regarding a high-precise rotation with path deviations in the low micrometre range is shown.