Konferenzbeiträge

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Hofmann, Meike; Gharbi Ghebjagh, Shima; Feng, Yuchao; Fan, Chao; Lemke, Karen; Sinzinger, Stefan
Linearly modulated multi-focal diffractive lens for multi-sheet excitation of flow driven samples in a light-sheet fluorescence microscope. - In: Journal of the European Optical Society, ISSN 1990-2573, Bd. 19 (2023), 1, 26, S. 1-8

Light sheet fluorescence microscope with single light sheet illumination enables rapid 3D imaging of living cells. In this paper we show the design, fabrication and characterization of a diffractive optical element producing several light sheets along a 45˚ inclined tube. The element, which is based on a multi-focal diffractive lens and a linear grating, generates five thin light sheets with equal intensities when combined with a refractive cylindrical lens. The generated uniform light sheets can be applied for the scanning of samples in tubes enabling flow-driven 3-dimensional imaging.



https://doi.org/10.1051/jeos/2023022
Gharbi Ghebjagh, Shima; Handte, Thomas; Sinzinger, Stefan
Micro-diffractive optical element arrays for beam shaping. - In: EOS Annual Meeting (EOSAM 2022), Bd. 266 (2022), 13013, S. 1-2

We describe the design of Fourier type array generators and beam shapers as periodic configurations of refractive-diffractive optical elements in microscale to provide specific beam shaping and imaging functionaliies. We investigate how the addition of micro-nanostructures to regular microstructure arrays enables new degrees of freedom for the design of micro-optical systems, in combination with adapted fabrication techniques yields a better optical performance and leads to enhancement of the array concept, uniformity and efficiency.



https://doi.org/10.1051/epjconf/202226613013
Wüster, Julian; Reetz, Andreas; Schmidt-Grund, Rüdiger; Knauer, Andrea; Sinzinger, Stefan
Approaches for the RCWA-based non-destructive characterization of subwavelength-structured gratings. - In: EOS Annual Meeting (EOSAM 2022), (2022), 05012, S. 1-2

Nano-structuring enables us to add additional degrees of freedom to the design of optical elements. Especially the possibility of controlling the polarization is of great interest in the field of nano-structured optics. For being able to exploit the whole range of form-birefringent phase shifts, the aspect ratios of the resulting element are typically much higher than the aspect ratios of conventional diffractive optical elements (DOEs), which does not only pose a challenge on fabrication but also on characterization. We evaluate several well-established approaches for the nondestructive characterization, including Müller-Matrix-Ellipsometry, measurement of the diffraction efficiencies, scattering measurements and calibration with rigorous coupled-wave modelling. The goal is to understand the challenges with all these techniques and combine them to a reliable method for structural reconnaisance of high aspect ratio nanostructures.



https://doi.org/10.1051/epjconf/202226605012
Weigel, Christoph; Sinzinger, Stefan; Hoffmann, Martin; Strehle, Steffen
Mikrostrukturierte Spezialgläser für mikromechanische und mikrooptische Anwendungen. - In: Mikrosystemtechnik, (2022), S. 35-38

Behrens, Arne; Sinzinger, Stefan
2.5D etching of silicon dioxide for optical and photonic structures. - In: 2022 IEEE Photonics Conference (IPC), (2022), insges. 2 S.

We investigated the ability to control the sidewall-angle for the etching of SiO2 by tuning process parameters. We found a strong correlation between sidewall-angle and temperature, enabling control of the sidewall-angle from 60˚-90˚, and found a curved etch profile which was named quasi-isotropic.



https://doi.org/10.1109/IPC53466.2022.9975695
Handte, Thomas; Hofmann, Martin; Behrens, Arne; Sinzinger, Stefan
Manufacturing of nanostructures in silicon carbide using UV-nanoimprint lithography in combination with fluorine-based plasma etching. - In: 2022 IEEE Photonics Conference (IPC), (2022), insges. 2 S.

The combination of a multi-layer resist system for soft UV-NIL with a fluorine-based plasma etching is investigated to elaborate homogeneously distributed nanosized features in silicon carbide. Initial studies substantiate that this approach can be a timesaving and cost-effective alternative to generate nanostructures in SiC.



https://doi.org/10.1109/IPC53466.2022.9975596
Gharbi Ghebjagh, Shima; Behrens, Arne; Feßer, Patrick; Sinzinger, Stefan
Tunable multi-focal diffractive lens. - [Washington, DC, USA] : Optica Publishing Group. - 1 Online-Ressource (Paper 3Th2D.2)

A specific combination of diffractive optical elements can form a tunable multi-focal diffractive lens generating an array of adjustable coaxial focal spots with uniform intensity distribution. The mutual rotation of the two cascaded diffractive grids provides a continuous adjustment of the optical power based on the Alvarez-Lohmann approach and a dynamic tuning of the foci distances.



https://doi.org/10.1364/3D.2021.3Th2D.2
Handte, Thomas; Bohm, Sebastian; Goj, Boris; Dittrich, Lars; Mollenhauer, Olaf; Sinzinger, Stefan; Runge, Erich
Simulation model and dimensioning of a photoacoustic sensor for the detection of radiation-induced pressure surges. - In: MikroSystemTechnik, (2021), S. 523-526

Behrens, Arne; Feßer, Patrick; Bosch, Martí; Hentschel, Martina; Sinzinger, Stefan
Whispering Gallery Resonators with diffractive coupling elements. - In: MikroSystemTechnik, (2021), S. 230-233

Weigel, Christoph; Phi, Hai Binh; Hoffmann, Martin; Sinzinger, Stefan; Strehle, Steffen
Vergleich zur Plasmastrukturierbarkeit von Materialien mit sehr geringer thermischer Ausdehnung. - In: MikroSystemTechnik, (2021), S. 51-54

Handte, Thomas; Scheller, Nicolas; Dittrich, Lars; Thesen, Manuel W.; Messerschmidt, Martin; Sinzinger, Stefan
Efficient and cost-effective manufacturing of nanostructures with high aspect ratios using Soft UV-Nanoimprint Lithography with bi- and trilayer resist systems. - In: MikroSystemTechnik, (2021), S. 35-38

Ortlepp, Ingo; Fern, Florian; Schienbein, Ralf; Supreeti, Shraddha; Füßl, Roland; Theska, René; Sinzinger, Stefan; Manske, Eberhard
Traceable 5D-nanofabrication with nano positioning and nano measuring machines. - In: Proceedings of the 21st International Conference of the European Society for Precision Engineering and Nanotechnology, (2021), S. 333-336

Today, besides the ongoing progress in the reduction of feature sizes, the measuring and fabrication of freeform surfaces with nanometre uncertainty, e.g. for aspheric lenses or structures with high aspect ratios, are a challenging task. Usually, dealing with such objects is limited by the local tilt angle between the object surface and the tool axis. There are different approaches to perform such measurements. In this paper, an extension of the Nano Measuring Machine NMM-1 with two rotational axes is described. With the proposed setup, it is possible to orientate the tool-axis perpendicular to the sample in every position, allowing larger angles to be measured / structured and minimising the uncertainty of the process e.g. due to the tilt dependency of the tool. Various machine designs are investigated and finally a solution with one rotary and one goniometer stage is integrated, preserving the existing machine infrastructure and allowing the addressability of a full hemisphere without limiting the measuring volume. As the tool centre point maintains its position during tool rotation, the Abbe principle is still fulfilled in every angular orientation. Emphasis was put on the metrological traceability of the whole system, including linear and rotary axes as well the tool itself. This was achieved by using a reference hemisphere, compensating the trajectory errors of the rotational axes. For the developed arrangement, the measurement uncertainty was investigated and several strategies for an in-situ-calibration of the additional axes are described. Finally, nanofabrication on large slopes is demonstrated.



Wüster, Julian; Bourgin, Yannick; Feßer, Patrick; Behrens, Arne; Sinzinger, Stefan
Nano-imprinted subwavelength gratings as polarizing beamsplitters. - In: Journal of the European Optical Society, ISSN 1990-2573, Bd. 17 (2021), 1, 4, S. 1-13

Polarizing beamsplitters have numerous applications in optical systems, such as systems for freeform surface metrology. They are classically manufactured from birefringent materials or with stacks of dielectric coatings. We present a binary subwavelength-structured form-birefringent diffraction grating, which acts as a polarizing beamsplitter for a wide range of incidence angles -30˚…+30˚. We refine the general design method for such hybrid gratings. We furthermore demonstrate the manufacturing steps with Soft-UV-Nanoimprint-Lithography, as well as the experimental verification, that the structure reliably acts as a polarizing beamsplitter. The experimental results show a contrast in efficiency for TE- and TM-polarization of up to 1:18 in the first order, and 34:1 in the zeroth order. The grating potentially enables us to realize integrated compact optical measurement systems, such as common-path interferometers.



https://doi.org/10.1186/s41476-021-00149-8
Behrens, Arne; Bosch, Martí; Hentschel, Martina; Sinzinger, Stefan
Deformed microcavities with very high Q-factors and directional farfield emission. - In: EOS Annual Meeting (EOSAM 2020), (2020), 01006, S. 1-2

We report the design and optimized fabrication of deformed whispering gallery mode resonators in silica with solely ICP-RIE. This allows us to control the morphology of the resonators more freely and results in low surface roughness. The light was coupled into the resonator using a state of the art tapered fiber approach and we determined the Q-factor in the range of 10^5



https://doi.org/10.1051/epjconf/202023801006
Bosch, Martí; Behrens, Arne; Sinzinger, Stefan; Hentschel, Martina
Optische Systeme im Phasenraumbild. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 121 (2020), B29, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2020-B029-0
Hübner, Matthias; Lenk, Leonhard; Markweg, Eric; Sinzinger, Stefan
Compressive sensing hyperspectral imaging with optimized diffractive optical elements. - In: Photonic Instrumentation Engineering VII, (2020), insges. 1 S.

Hyperspectral image acquisition is challenging due to its three-dimensional dataset consisting of two spatial and one spectral dimensions. Available spectral imagers are either based on spatial or spectral scanning or they sacrifice spatial and spectral resolution for snapshot imaging. Compressive Sensing techniques have already been applied to spectral imaging to enhance the image acquisition, but they still rely on multiple consecutive measurements. We utilize several diffraction orders of a novel diffractive optical element whose diffraction efficiency has been optimized for a broad wavelength range. Based on this diffractive optical element we design and compare novel compressive snapshot spectral imaging systems and present experimental results.



https://doi.org/10.1117/12.2548037
Kreismann, Jakob; Kim, Jaewon; Bosch, Martí; Hein, Matthias; Sinzinger, Stefan; Hentschel, Martina
Super-directional light emission and emission reversal from micro cavity arrays. - In: DPG-Frühjahrstagung (DPG Spring Meeting) of the Condensed Matter Section (SKM) together with the DPG Division Environmental Physics and the Working Groups Accelerator Physics; Equal Opportunities; Energy; Industry and Business; Physics, Modern IT and Artificial Intelligence, Young DPG, (2020), KFM 7.1

Wüster, Julian; Feßer, Patrick; Behrens, Arne; Sinzinger, Stefan
Resonant diffraction gratings with polarization-dependent efficiencies. - In: EOS Annual Meeting (EOSAM 2020), (2020), 05002, S. 1-2

Subwavelength-structures with different fill factors in the lateral dimensions result in unique phase shifts for the different polarization states of transmitted light.By using this additional degree of freedom for diffractive optical elements, we yield additional functionalities for compact optical systems with DOEs. As a fully operable example we present a binary subwavelength-grating which acts as a polarizing beamsplitter for TE- and TM-polarization over a wide range of incidence angles. We show our design approach, the manufacturing process with Soft-UV-Nanoimprint-Technology, as well as experimental results. We will also lay out possibilities for the design and application of multilevel polarization-functionalized gratings.



https://doi.org/10.1051/epjconf/202023805002
Thronicke, Nicole; Möller, Christian; Mitrenga, Dennis; Karolewski, Dominik; Klein, Thomas; Neckermann, Kristin; Ortlepp, Hans-Georg; Grewe, Adrian; Sinzinger, Stefan; Ortlepp, Thomas
Spectrally tunable microsensor for gas analysis. - In: Smart Systems Integration - 13th International Conference and Exhibition on Integration Issues of Miniaturized Systems, (2019), S. 340-343

https://ieeexplore.ieee.org/document/8727823
Gharbi Ghebjagh, Shima; Sinzinger, Stefan
Multifocal complex-value phase zone plate for 3D focusing. - In: EOS Topical Meeting on Diffractive Optics 2019, (2019), S. 84-85

Fischer, David; Sinzinger, Stefan
Computer generated holography for lithography on curved surfaces. - In: EOS Topical Meeting on Diffractive Optics 2019, (2019), S. 80-81

Wüster, Julian; Bourgin, Yannick; Feßer, Patrick; Sinzinger, Stefan
Nano-structured diffraction gratings as polarizing beam splitters under vertical incidence. - In: EOS Topical Meeting on Diffractive Optics 2019, (2019), S. 20-21

Polarizing beam splitters have numerous applications in optical systems, e.g. for the measurement of freeform surfaces. We present a design and manufacturing process for a nanostructured diffraction grating with optimized diffraction efficiencies for TE- and TM-polarization, which acts as a beam splitter over a long range of incidence angles. First measurements confirm a strong difference in diffraction efficiencies.



Wüster, Julian; Bourgin, Yannick; Feßer, Patrick; Si, Shuhao; Sinzinger, Stefan
Nanostrukturierte Beugungsgitter als angepasste integrierbare Polarisationsstrahlteiler. - In: MikroSystemTechnik Kongress 2019, (2019), S. 468-471

Thronicke, Nicole; Mitrenga, Dennis; Karolewski, Dominik; Winzer, Andreas T.; Klein, Thomas; Neckermann, KristinBVerfasserIn; Ortlepp, Hans-Georg; Grewe, Adrian; Sinzinger, Stefan; Ortlepp, Thomas
Spektral durchstimmbarer Mikrosensor für die Gasanalyse. - In: MikroSystemTechnik Kongress 2019, (2019), S. 460-463

Behrens, Arne; Feßer, Patrick; Kreismann, Jakob; Hentschel, Martina; Sinzinger, Stefan
Mesoskopische Flüstergaleriemodenresonatoren im sichtbaren Spektrum auf Basis von Silizium Mikrostrukturierung. - In: MikroSystemTechnik Kongress 2019, (2019), S. 178-181

Weigel, Christoph; Sinzinger, Stefan; Strehle, Steffen; Hoffmann, Martin
Trockenchemisches Freistellen von Mikrostrukturen in der Glaskeramik Zerodur. - In: MikroSystemTechnik Kongress 2019, (2019), S. 154-157

Kirchner, Johannes; Mastylo, Rostyslav; Gerhardt, Uwe; Sasiuk, Taras; Mohr-Weidenfeller, Laura; Hofmann, Martin; Kühnel, Michael; Sinzinger, Stefan; Manske, Eberhard
Fasergekoppelter konfokaler Sensor zur exakten Abstandsregelung für maskenlose Lithografieanwendungen. - In: 20. GMA/ITG-Fachtagung Sensoren und Messsysteme 2019, (2019), S. 610-616

Maskenlose Fotolithografie findet auch abseits der Halbleitertechnik hohe und immer weiterwachsende Bedeutsamkeit [1, 2]. Als dauerhaftes und wesentliches Entwicklungsziel hat sich die Vergrößerung der Packungsdichte der Mikro- bzw. Nanostrukturen herausgestellt. Dazu ist es nötig die angewendeten Lithografieprozesse zu optimieren und die Strukturen mit sehr hoher Präzision und einer sehr guten Reproduzierbarkeit zu fertigen. Eine Form der maskenlosen Lithografie wird durch Direct-Laser-Writing (DLW) beschrieben [3]. Bei diesem Prozess ist die Strukturbreite von der Fokussierbarkeit und der axialen Ausrichtung des verwendeten Fabrikationslasers abhängig. Um die Präzision dieser Lithografieanwendung und der zu entwickelnden Strukturgeometrie zu erhöhen, wird eine Nanopositionier- und Nanomessmaschine (NPMM) zur relativen Ausrichtung der beschichteten Probe zum Laserstrahl verwendet [4]. Ein neuentwickelter chromatisch-konfokaler Sensor scannt dafür die Topographie der Probenoberfläche und regelt den Maschinenhub so nach, dass der Polymerisationsprozess stets in der Brennebene des Fabrikationslasers stattfindet.



https://doi.org/10.5162/sensoren2019/P1.14
Schädel, Martin; Baldauf, Julia; Thronicke, Nicole; Mitrenga, Dennis; Karolewski, Dominik; Ortlepp, Hans-Georg; Grewe, Adrian; Sinzinger, Stefan; Ortlepp, Thomas
Aktorisches Miniaturspektrometer für die Gassensorik. - In: 20. GMA/ITG-Fachtagung Sensoren und Messsysteme 2019, (2019), S. 125-129

https://doi.org/10.5162/sensoren2019/2.1.3
Koch, Felix; Burkhardt, Matthias; Schnabel, Mike; Glaser, Tilman; Sinzinger, Stefan
Methoden zur Charakterisierung optischer Gitter über einen großen Ortsfrequenzbereich. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 120 (2019), A36, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2019-A036-4
Behrens, Arne; Hentschel, Martina; Sinzinger, Stefan
Untersuchung deformierter optischer Mikrokavitäten anhand des abgestrahlten Fernfelds. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 120 (2019), B17, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2019-B017-3
Lenk, Leonhard; Grewe, Adrian; Sinzinger, Stefan
Mehrlagige diffraktive Alvarez-Lohmann Linsen für polychromatische Anwendungen :
Multi-layer diffractive Alvarez-Lohmann lenses for polychromatic applications. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 120 (2019), A21, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2019-A021-7
Hofmann, Meike; Römer, Robert; Lemke, Karen; Sinzinger, Stefan
Optimierung der Abbildungseigenschaften eines Lichtschichtmikroskops durch die Beleuchtung mit einem Talbotteppich :
Optimization of the imaging properties of a light sheet fluorescence microscope (LSFM) by illumination with Talbot carpets. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 120 (2019), A6, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2019-A006-1
Kirchner, Johannes; Mastylo, Rostyslav; Gerhardt, Uwe; Fern, Florian; Schienbein, Ralf; Mohr-Weidenfeller, Laura; Hofmann, Martin; Sasiuk, Taras; Sinzinger, Stefan; Manske, Eberhard
Applications of a fiber coupled chromatic confocal sensor in nanopositioning and nanomeasuring machines :
Anwendungen eines fasergekoppelten chromatisch konfokalen Sensors in Nanopositionier- und Nanomessmaschinen. - In: Technisches Messen, ISSN 2196-7113, Bd. 86 (2019), S. S17-S21

https://doi.org/10.1515/teme-2019-0041
Weigel, Christoph; Sinzinger, Stefan; Hoffmann, Martin
Comparision of deep etched borosilicate glasses in a fluorine based plasma. - In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (Transducers & Eurosensors XXXIII), (2019), S. 1678-1681

https://doi.org/10.1109/TRANSDUCERS.2019.8808269
Dittrich, Paul-Gerald; Bichra, Mohamed; Stiehler, Daniel; Pfützenreuter, Christian; Radtke, Lisa; Rosenberger, Maik; Notni, Gunther
Extended characterization of multispectral resolving filter-on-chip snapshot-mosaic CMOS cameras. - In: Algorithms, Technologies, and Applications for Multispectral and Hyperspectral Imagery XXV, (2019), S. 109860I-1-109860I-11

https://doi.org/10.1117/12.2518842
Mohr-Weidenfeller, Laura; Hofmann, Martin; Kirchner, Johannes; Supreeti, Shraddha; Rangelow, Ivo W.; Sinzinger, Stefan; Manske, Eberhard
Micro- and nanofabrication technologies using the nanopositioning and nanomeasuring machines. - In: Optical Measurement Systems for Industrial Inspection XI, (2019), S. 1105637-1-1105637-13

To keep up with Moore's law in future, the critical dimensions of device features must further decrease in size. Thus, the nano-electronics and nano-optics manufacturing is based on the ongoing development of the lithography and encompasses also some unconventional methods. In this context, we use the Nanopositioning and Nanomeasuring Machine (NPMM) to generate features in resist layers by means of Direct Laser Writing (DLW),1 Field Emission Scanning Probe Lithography (FE-SPL)2 and Soft UV-Nanoimprint Lithography (Soft UV-NIL)3 with highest accuracy. The NPMM was collaboratively developed by TU Ilmenau and SIOS Meßtechnik GmbH.4 The tool provides a large positioning volume of 25 mm × 25 mm × 5 mm with a positioning resolution of 0.1 nm and a repeatability of less than 0.3 nm over the full range. Previously a single electron transistor (SET) working at room temperature generated by FE-SPL has been demonstrated.5 However, the throughput is limited because of the serial writing scheme making Tennant's law (At R5 ) valid.6 Here, At is the areal throughput and R the lithographic resolution. Thus, patterning of the whole NPMM positioning area by FE-SPL is very time consuming. In order to address this problem, different strategies and/or combinations are conceivable. In this work a so-called Mix-and-Match lithography is conducted. A fast generation of structures in the sub-micron range is possible by means of DLW. By this, features such as electrical wires, contact patches for bonding or labels are generated in resist. Subsequently, we use FE-SPL in order to define the actual nano-scaled features for quantum or single electron devices. In combination, DLW and FE-SPL are maskless lithography strategies, hence, offering completely novel opportunities for rapid nanoscale prototyping of largescale resist patterns. An explanation of this technique is given in a previous publication.7 Furthermore, after reactive ion etching, the sample can be used as template for Soft UV-NIL, thus resulting in a high-throughput process chain for future quantum and/or single electron devices.



https://doi.org/10.1117/12.2528136
Pant, Kamal K.; Burada, Dali R.; Mishra, Vinod; Pant, L.M.; Ghosh, Amitava; Khan, Gufran Sayeed; Sinzinger, Stefan; Shakher, Chandra
Intrinsic surface feature based subaperture stitching of freeform wavefront. - In: Modeling Aspects in Optical Metrology VII, (2019), S. 1105708-1-1105708-10

The subaperture stitching technique requires the registration of freeform subapertures into global coordinate frame before stitching in order to compute entire freeform wavefront. A scanning Shack-Hartman Sensor (SHS) utilizes translation stages to scan the freeform surface in XY plane and measure the slope data of various subapertures. The measured slope data is then integrated using weighted cubic spline (WCSLI) based integration method to compute the phase data. The positioning error during scanning causes misalignments between the measured subapertures and their nominal values. The least square based subaperture stitching methods are not capable to minimize lateral misalignment errors of freeform subapertures and therefore degrade the performance of subaperture stitching process. In this work, we have utilized fiducial added planes for correction of angular and rotation misalignments of an extended cubic phase plate. An intrinsic surface feature (ISF) based registration method is used for lateral misalignment corrections. Gaussian curvature is used as an intrinsic pattern which can be defined as one of the fundamental second order geometric properties of a surface. Any shift in the peaks of the Gaussian curvature of reference and measured subaperture corresponds to lateral misalignments in X and Y directions and need to be minimized before registration of subaperture into global frame of reference. After precise registrations, all the subapertures are stitched with consistent overlapping area by using least square fitting method. A numerical validation of the proposed scheme is carried out which demonstrates the effectiveness of the proposed method to improve the subaperture stitching accuracy.



https://doi.org/10.1117/12.2526037
Kreismann, Jakob; Hentschel, Martina; Behrens, Arne; Sinzinger, Stefan
Super-directional light emission from arrays of deformed microcavities. - In: DPG-Frühjahrstagung 2019 (DPG Spring Meeting 2019) of the Condensed Matter Section (SKM) together with the Division Radiation and Medical Physics and the Working Groups Equal Opportunities, Industry and Business, Young DPG; Symposia, exhibition of scientific instruments and literature, (2019), KFM 4.10

Fischer, David; Sinzinger, Stefan
Control of projection uniformity and fidelity in spatial light modulator-based holography. - In: Proceedings, 2019 IEEE International Conference on Mechatronics (ICM), (2019), S. 129-134

This work describes the steps necessary for a holographic pattern projection of high quality with a phase-only Liquid crystal on silicon spatial light modulator (LCoS-SLM). The aim is high-throughput optical lithography on nonplanar surfaces. Aspects of diffractive optical element calculation as well as aspects of aberration compensation are needed to increase the uniformity and fidelity of intricate patterns.



https://doi.org/10.1109/ICMECH.2019.8722858
Cao, Xinrui; Sinzinger, Stefan
Opto-mechatronic system for control and characterization of the coherence properties of light sources. - In: Proceedings, 2019 IEEE International Conference on Mechatronics (ICM), (2019), S. 141-145

Two opto-mechatronic systems for optical measurements are proposed and realized. The first experimental setup is applied for determining the temporal coherence of light sources. The other opto-mechatronic system is used to study the Lau effect with a partially coherent light source, which is unconventional in Lau's experiment.



https://doi.org/10.1109/ICMECH.2019.8722891
Lenk, Leonhard; Mitschunas, Beate; Sinzinger, Stefan
Zoom systems with tunable lenses and linear lens movements. - In: Journal of the European Optical Society, ISSN 1990-2573, Bd. 15 (2019), 1, 9, S. 1-10

Background: Classical zoom lenses are based on movements of sub-modules along the optical axis. Generally, a constant image plane position requires at least one nonlinear sub-module movement. This nonlinearity poses a challenge for the mechanical implementation. Tuneable lenses can change their focal length without moving along the optical axis. This offers the possibility of small system lengths. Since the focal range of tuneable lenses with significant aperture diameters is still limited, the use of tuneable optics in zoom lenses is usually restricted to miniaturized applications. Methods: To solve the challenge of the nonlinear movement in classical zoom lenses and the limitations of tuneable lenses for macroscopic applications we propose a combination of both concepts. The resulting 'Hybrid Zoom Lens' involves linear movements of sub modules as well as changing the focal length of a tuneable lens. The movements of the sub-modules and the focal length tuning of the lens are already determined by the collinear layout of the zoom lens. Therefore, we focus on collinear considerations and develop a method that allows a targeted choice of specific collinear layouts for our 'Hybrid zoom lenses'. Results: Based on examples and an experimental setup we demonstrate the feasibility of our approach. We apply the proposed method to examples of classical zoom lenses and zoom lenses based exclusively on tuneable lenses. Thereby we are able to show possible advantages of our 'Hybrid zoom lenses' over these widespread system types. Conclusions: We demonstrate important collinear considerations for the integration of tuneable lenses into a zoom lens. We show that the combination of classical zoom lens concepts with tuneable lenses offers the possibility to reach smaller system lengths for macroscopic zoom lenses while requiring only a small focal tuning range of the tuneable lens.



https://doi.org/10.1186/s41476-019-0106-3
Kirchner, Johannes; Mohr-Weidenfeller, Laura; Gerhardt, Uwe; Mastylo, Rostyslav; Kühnel, Michael; Sinzinger, Stefan; Manske, Eberhard
A combined laser scanning and DLW tool for measuring and fabrication tasks with NPMM. - In: Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, (2019), S. 1093017-1-1093017-6

In view of the increasing demands on precision optics, microelectronics and precision mechanics nanoscale structuring processes are of great interest. It is becoming more and more important to apply a large number of structures that are as small as possible to ever larger areas with high reliability and to increase the number of structures per area element (packing density). The straightness and uniformity of these structures, as well as the positioning accuracy during the fabrication of such narrow lines and points are at the center of the increase of the packing density. A further decisive role is played by the development of suitable sensors and tools for the production and measurement of these structures. The development and the combination of a new laser based probe for the measurement and a direct laser writing (DLW) tool for the creation of sub-micro structures forms the core of this topic. The new sensor is based on a confocal measuring principle. A fiber coupling is used to avoid thermal influences. At the same time, the fiber end itself serves as a confocal pinhole. For the process tool, comprehensive investigations of laser and resist parameters are necessary. The first results are shown. These two parts are investigated separately and combined at the end of the work. In order to achieve the necessary positioning accuracy, the tool is integrated into the Nanopositioning and Measurement Machine (NPMM).



https://doi.org/10.1117/12.2508263
Supreeti, Shraddha; Kirchner, Johannes; Hofmann, Martin; Mastylo, Rostyslav; Rangelow, Ivo W.; Manske, Eberhard; Hoffmann, Martin; Sinzinger, Stefan
Integrated soft UV-nanoimprint lithography in a nanopositioning and nanomeasuring machine for accurate positioning of stamp to substrate. - In: Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019, (2019), S. 1095819-1-1095819-7

https://doi.org/10.1117/12.2514832
Bichra, Mohamed; Meinecke, Thomas; Sinzinger, Stefan
In-Line Verfahren zur Charakterisierung von Freiform Oberflächen :
In-line setup for the characterization of optical freeform surfaces. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 119 (2018), P45, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2018-P045-0
Koch, Felix; Schönbrodt, Oliver; Burkhardt, Matthias; Lehr, Dennis; Glaser, Tilman; Sinzinger, Stefan
Optimization and manufacturing of gold gratings for pulse compression. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 119 (2018), A27, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2018-A027-3
Speck, Henri; Cao, Xinrui; Meinecke, Thomas; Sinzinger, Stefan
Phase-Retrieval mit Hilfe verstimmbarer Optiken für die Fourier-Ptychographie. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 119 (2018), A26, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2018-A026-8
Lenk, Leonhard; Mitschunas, Beate; Sinzinger, Stefan
Zoomoptiken mit verstimmbarer Optik und linearer Verschiebung der Einzelmodule. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 119 (2018), B17, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2018-B017-3
Fischer, David; Sinzinger, Stefan
Maskenlose Lithographie für die dreidimensionale Mikrostrukturierung. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 119 (2018), B12, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2018-B012-1
Kreismann, Jakob; Behrens, Arne; Weigel, Christoph; Sinzinger, Stefan; Hentschel, Martina; Yang, Lan
Mesoscopic optics. - In: Mikro-Nano-Integration, (2018), S. 55-57

Bourgin, Yannick; Nagel, Falk; Feßer, Patrick; Bergmann, Jean Pierre; Sinzinger, Stefan
High power laser beam shaping for welding applications by means of diffractive elements. - In: Laser Beam Shaping XVIII, (2018), 107440X, insges. 7 S.

Laser welding by means of multi-kilowatt solid state lasers can be considerably improved if the focused welding spot is embedded in a pre-heating spot generated e.g. by an additional laser. To improve the compactness of the optical system, the same functionality can be effectively achieved by means of diffractive diffusers. Because such a diffractive optical solution may suffer from the presence of speckles, a comprehensive characterization of the laser source is performed. The paper includes the design, the compensation of the difference in the intensity levels, the fabrication and the optical performances of the fabricated DOEs. We furthermore present the functionality of the DOEs in the welding process.



https://doi.org/10.1117/12.2320579
Kühnel, Michael; Fröhlich, Thomas; Füßl, Roland; Hoffmann, Martin; Manske, Eberhard; Rangelow, Ivo W.; Reger, Johann; Schäffel, Christoph; Sinzinger, Stefan; Zöllner, Jens-Peter
Towards alternative 3D nanofabrication in macroscopic working volumes. - In: Measurement science and technology, ISSN 1361-6501, Bd. 29 (2018), 11, S. 114002, insges. 19 S.

https://doi.org/10.1088/1361-6501/aadb57
Fischer, Robert; Bichra, Mohamed; Straube, Anja; Stubenrauch, Mike; Sinzinger, Stefan; Witte, Hartmut
Adaptable, automated platform for miniaturized cell cultivation experiments including Fourier-optical analytics. - In: Basic & clinical pharmacology & toxicology, ISSN 1742-7843, Bd. 122 (2018), Supplement S1, ICBB17-13, Seite 6-7

https://doi.org/10.1111/bcpt.12952
Bourgin, Yannick; Kleindienst, Roman; Nagel, Falk; Bergmann, Jean Pierre; Sinzinger, Stefan
Generation of optimized intensity profile by diffractive elements for high power laser welding applications. - In: EOS Topical Meeting on Diffractive Optics 2017, (2017), S. 43-44

Burada, Dali R.; Pant, Kamal K.; Mishra, Vinod; Bichra, Mohamed; Khan, Gufran S.; Sinzinger, Stefan; Shakher, Chandra
Development of metrology for freeform optics in reflection mode. - In: Optical Measurement Systems for Industrial Inspection X, (2017), Seite 103291K-1-103291K-8

https://doi.org/10.1117/12.2270284
Karthaus, Daniela; Sandfuchs, Oliver; Sinzinger, Stefan
Transmission holograms for white light illumination. - In: Proceedings of the 12th International Symposium on Automotive Lighting, (2017), S. 53-62

Bichra, Mohamed; Müller, Lutz; Feßer, Patrick; Hoffmann, Martin; Sinzinger, Stefan
Nanostrukturierte Beugungsgitter für integrierte Metrologie. - In: MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", (2017), S. 548-551

Fischer, Robert; Stubenrauch, Mike; Straube, Anja; Wedrich, Karin; Goj, Boris; Bartsch, Heike; Bichra, Mohamed; Rothe, Holger; Witte, Hartmut
System for automated cell cultivation and analysis. - In: Engineering for a changing world, (2017), insges. 2 S.

http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2017iwk-109:7
Karthaus, Daniela; Sandfuchs, Oliver; Sinzinger, Stefan
Transmission volume holograms for LED illumination. - In: Engineering for a changing world, (2017), insges. 9 S.

http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2017iwk-070:0
Cao, Xinrui; Sinzinger, Stefan
Removal of optical aberrations caused by illumination system in Fourier ptychography. - In: Engineering for a changing world, (2017), insges. 6 S.

http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2017iwk-078:2
Bichra, Mohamed; Meinecke, Thomas; Müller, Lutz; Feßer, Patrick; Hoffmann, Martin; Sinzinger, Stefan
Innovative freeform measurement method using two dimensional binary diffractive grating based on nanostructured silicon. - In: Engineering for a changing world, (2017), insges. 7 S.

http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2017iwk-088:9
Meinecke, Thomas; Pätz, Daniel; Sinzinger, Stefan
Phase-retrieval Algorithmen zur Wellenfrontanalyse :
Phase retrieval algorithms for wavefront analysis. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 118 (2017), P6, insges. 2 S.

http://nbn-resolving.de/urn:nbn:de:0287-2017-P006-4
Bichra, Mohamed; Meinecke, Thomas; Sinzinger, Stefan
Innovative Verfahren zur Metrologie von Freiform Oberflächen. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 118 (2017), A24, insges. 2 S.

http://nbn-resolving.de/urn:nbn:de:0287-2017-A024-6
Kampmann, Ronald; Asadollahbaik, Asa; Badilita, Vlad; Sinzinger, Stefan; Korvink, Jan G.
Optical tweezers for trapping in a complex microfluidic environment. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 118 (2017), A13, insges. 2 S.

http://nbn-resolving.de/urn:nbn:de:0287-2017-A013-8
Karthaus, Daniela; Giehl, Markus; Sandfuchs, Oliver; Sinzinger, Stefan
Optimization of computer-generated transmission holograms using different LED wavefront approximations. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 118 (2017), A8, insges. 2 S.

http://nbn-resolving.de/urn:nbn:de:0287-2017-A008-5
Grewe, Adrian; Sinzinger, Stefan
Quantized tuneable helix phase plates - design and experiment. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 118 (2017), A3, insges. 2 S.

http://nbn-resolving.de/urn:nbn:de:0287-2017-A003-3
Stubenrauch, Mike; Fischer, Robert; Hoffmann, Martin; Müller, Jens; Sinzinger, Stefan; Liefeith, Klaus; Witte, Hartmut
System for automated cell cultivation and analysis. - In: Biomedical engineering, ISSN 1862-278X, Bd. 62 (2017), S1, Seite S8
Enthalten in: Session 2: Cells, materials and biochemistry I

https://doi.org/10.1515/bmt-2017-5001
Bichra, Mohamed; Meinecke, Thomas; Sinzinger, Stefan
Wavefront sensing by numerical evaluation of diffracted wavefields. - In: AMA conferences 2017, ISBN 978-3-9816876-4-4, (2017), S. 290-293

Burkhardt, Matthias; Fechner, Renate; Frost, Frank; Mitzschke, Martin; Sinzinger, Stefan
Ion beam etching process simulation for the pattern transfer of photoresist diffraction gratings generated by holography. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 117 (2016), P60, insges. 1 S.

https://www.db-thueringen.de/receive/dbt_mods_00032512
Meinecke, Thomas; Kelly, Damien Peter; Sinzinger, Stefan
Aliasing-free speckle propagation: critical sampling rules. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 117 (2016), C32, insges. 2 S.

https://www.db-thueringen.de/receive/dbt_mods_00032511
Bichra, Mohamed; Sabitov, Nail; Pant, Kamal; Ramu, D.; Khan, Gufran Sayeed; Sinzinger, Stefan
Subaperture wavefront measurement using Talbot interferometry. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 117 (2016), B22, insges. 2 S.

https://www.db-thueringen.de/receive/dbt_mods_00032504
Karthaus, Daniela; Sandfuchs, Oliver; Sinzinger, Stefan
Design and simulation of computer-generated volume holograms for automotive headlamps. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 117 (2016), C9, insges. 2 S.

https://www.db-thueringen.de/receive/dbt_mods_00032510
Kampmann, Ronald; Sinzinger, Stefan
Optical tweezers affected by monochromatic aberrations. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 117 (2016), C6, insges. 2 S.

https://www.db-thueringen.de/receive/dbt_mods_00032507
Kalthoff, Oliver; Kampmann, Ronald; Streicher, Simon; Sinzinger, Stefan
A fast and scalable algorithm for the Monte Carlo simulation of elastic scattering in perturbed media. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 117 (2016), C2, insges. 2 S.

https://www.db-thueringen.de/receive/dbt_mods_00032506
Vogt, Christian; Sinzinger, Stefan; Rohrbacher, Martin; Rascher, Rolf
Prediction of grinding tool wear and lifetime by using a test bench. - In: Third European Seminar on Precision Optics Manufacturing, (2016), 100090Z

Kleindienst, Roman; Sinzinger, Stefan
Integrated microsystems for optical sensing and imaging applications. - In: Smart Photonic and Optoelectronic Integrated Circuits XVIII, (2016), 975110, insges. 16 S.

Leopold, Steffen; Pätz, Daniel; Sinzinger, Stefan; Hoffmann, Martin
The engineered eye - three-dimensional scanning of the object-space. - In: MME 2015, (2015), S. 22

Karthaus, Daniela; Koren, N.; Sandfuchs, Oliver; Sinzinger, Stefan
Holograms in automotive headlamps with LED illumination. - In: Proceedings of the 11th International Symposium on Automotive Lighting, (2015), S. 521-530

Karthaus, Daniela; Sandfuchs, Oliver; Sinzinger, Stefan
Holograms in automotive headlamps - chances and challenges. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 116.2015, P36, insges. 2 S.

Holograms provide the possibility to modulate incident light waves in an almost arbitrary way. This leads to the idea to use holograms as supplementing or replacing element in the optical system of automotive headlamps. In this paper one important aspect, the efficiency of a volume hologram, is discussed regarding conditions of automotive headlamps.



http://nbn-resolving.de/urn:nbn:de:0287-2015-P036-0
Meinecke, Thomas; Kelly, Damien Peter; Sinzinger, Stefan
Numerical models for speckle fields. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 116.2015, B6, insges. 2 S.

Speckles appear as noisy steady light patterns caused by random phase disturbance of coherently propagating light. Their suppression and use in optical metrology make its simulation and evaluation necessary. This contribution addresses the issue of numerical propagation of speckle distributions.



http://nbn-resolving.de/urn:nbn:de:0287-2015-B006-3
Schuppich, Juliane; Kampmann, Ronald; Sinzinger, Stefan; Mastylo, Rostyslav; Manske, Eberhard
High precision optical step detection. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 116 (2015), A3, insges. 2 S.

Due to the ongoing miniaturization of electronic, mechanic and optics components the precise position determination of surface profiles within optical measurement processes becomes more important. The investigation of diffraction pattern arise from the interaction of electromagnetic radiation with edges or rather steps with a height smaller than the incident wavelength is the focus of this work. By use of a supercontinuum laser source we study the diffraction signal of a step especially in the transition region where the step height becomes smaller than the wavelength. Furthermore, the effect of the surface material as well as the polarization state and direction of the incoming laser beam are subjects of the current work. The goal of this project is to become a detailed idea of the diffraction signal depending on the ratio of incoming wavelength to step height and to derive trends according to the aspect ratio and manufacturing related deviations of the steps shape. The results will serve as a basis for the development of an edge and step detection system within a nano-positioning-and-nano-measuring-machine (NPMM).



https://nbn-resolving.org/urn:nbn:de:0287-2015-A003-6
Weigel, A.; Grewe, Adrian; Hoffmann, Martin
Design und Fertigung eines optofluidischen Messsystems zur kapnometrischen Überwachung. - In: MEMS, Mikroelemente, Systeme, (2015), S. 218-221

Leopold, Steffen; Pätz, Daniel; Sinzinger, Stefan; Hoffmann, Martin
Das Technische Auge - dreidimensionale Abtastung des Objektraums. - In: MEMS, Mikroelemente, Systeme, (2015), S. 73-76

The photoluminescence intensity of group III nitrides, nanowires, and heterostructures (NWHs) strongly depends on the environmental H2 and O2 concentration. We used this opto-chemical transducer principle for the realization of a gas detector. To make this technology prospectively available to commercial gas-monitoring applications, a large-scale laboratory setup was miniaturized. To this end the gas-sensitive NWHs were integrated with electro-optical components for optical addressing and read out within a com-pact and robust sensor system. This paper covers the entire realization process of the device from its conceptual draft and optical design to its fabrication and assembly. The applied approaches are verified with intermediate results of profilometric characterizations and optical performance measurements of subsystems. Finally the gas-sensing capabilities of the integrated detector are experimentally proven and optimized.



Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin
2D stepping microdrive for hyperspectral imaging. - In: Smart sensors, actuators, and MEMS VII; and cyber physical systems, 2015, 95170K, insges. 10 S.

Bichra, Mohamed; Chandra, Schakher; Khan, Gufran Sayeed; Burada, Daliramu; Sinzinger, Stefan; Pant, Kamal
Investigations on sub-aperture stitching approach for testing freeform optics. - In: Optica, 2015, paper JT5A.12

http://dx.doi.org/10.1364/AOMS.2015.JT5A.12
Sinzinger, Stefan;
Freeform and array elements for tunable optics applications. - In: Freeform optics, ISBN 978-1-943580-00-2, (2015), insges. 1 S.

http://dx.doi.org/10.1364/FREEFORM.2015.FW4B.2
Zürbig, Verena; Pätz, Daniel; Fries, J.; Bichra, Mohamed; Pletschen, Wolfgang; Holc, Katarzyna; Reusch, M.; Nebel, Christoph E.; Sinzinger, Stefan; Ambacher, Oliver; Lebedev, Vadim
Tunable multisegment Si x N y /AlN piezo lenses for wavefront correction. - In: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), ISBN 978-1-4799-8956-0, (2015), S. 2045-2048

A combined layer structure of aluminium nitride (AIN) and silicon niride (SiN) enables the facrication of multisegment piezo-actuated micro lenses with a percise control of the lens surface. It is demonstrated that these micro lenses offer free asheric deformation of the lens surface and can operate at high repetition rates along with reproducible and precise tunability. The AIN / SiN micro lenses are highly advantageous to be used as wave front filter or for fast focus correction.



http://dx.doi.org/10.1109/TRANSDUCERS.2015.7181358
Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin
Two-dimensional stepping drive for hyperspectral systems. - In: MME 2014 - Istanbul, (2014), insges. 4 S.

Schurig, Florian; Bichra, Mohamed; Bichra, Mohamed *1981-*; Sinzinger, Stefan;
Method and apparatus for detecting the surface shape of reflective freeform optics. - In: Frontiers in optics, 2014, FW5A.3

http://dx.doi.org/10.1364/FIO.2014.FW5A.3
Kampmann, Ronald; Sinzinger, Stefan
Analysis of the influence of manufacturing and alignment related errors on an optical tweezer system. - In: International Optical Design Conference 2014, 2014, 92930D, insges. 8. S.

In this work we present the design process as well as experimental results of an optical system for trapping particles in air. For positioning applications of micro-sized objects onto a glass wafer we developed a highly efficient optical tweezer. The focus of this paper is the iterative design process where we combine classical optics design software with a ray optics based force simulation tool. Thus we can find the best compromise which matches the optical systems restrictions with stable trapping conditions. Furthermore we analyze the influence of manufacturing related tolerances and errors in the alignment process of the optical elements on the optical forces. We present the design procedure for the necessary optical elements as well as experimental results for the aligned system.



Cu-Nguyen, Phuong-Ha; Grewe, Adrian; Sinzinger, Stefan; Zappe, Hans; Seifert, Andreas
Imprinted DOE on varifocal membrane lens. - In: 2014 International Conference on Optical MEMS and Nanophotonics (OMN), ISBN 978-1-4799-3737-0, (2014), S. 21-22

We present a highly compact, fully integrated tunable lens for confocal hyperspectral imaging with imprinted diffractive structures on a polydimethylsiloxane (PDMS) membrane. The PDMS membrane was patterned by replication technique with a diffractive optical element (DOE) on quartz glass as master mold. The smallest feature size is 0.8 [my]m the membrane thickness is 100 my]m. The liquid-filled lens is hydraulically driven by integrated magnetic actuation and serves as a tunable filter in the spectral range of 450-900 nm with a linewidth less than 18 nm over the entire tuning range.



http://dx.doi.org/10.1109/OMN.2014.6924519
Hillenbrand, Matthias; Mitschunas, Beate; Hoffmann, Daniela; Grewe, Adrian; Hinz, Susanne; Feßer, Patrick; Sinzinger, Stefan
Miniaturized AMD vision aids: principles and realization. - In: Shaping the future by engineering, (2014), insges. 8 S.

http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2014iwk-165:0
Rosenberger, Maik; Correns, Martin; Fütterer, Richard; Linß, Gerhard; Manske, Eberhard; Fröhlich, Thomas; Grewe, Adrian; Hillenbrand, Matthias; Sinzinger, Stefan
Hyper- and multispectral imaging systems - a survey of different approaches at the Ilmenau University of Technology. - In: Shaping the future by engineering, (2014), insges. 11 S.

http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2014iwk-087:3
Grewe, Adrian; Sinzinger, Stefan
Imaging systems with Alvarez-Lohmann lenses. - In: Shaping the future by engineering, (2014), insges. 11 S.

http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2014iwk-167:5
Leopold, Steffen; Pätz, Daniel; Sinzinger, Stefan; Müller, Jens; Hoffmann, Martin
Hybride Integration von Silicium- und LTCC-Technologie zur Herstellung verstimmbarer Zylinderlinsen. - In: Mikro-Nano-Integration, (2014), S. 112-117

Kleindienst, Roman; Krüger, Mathias; Grewe, Adrian; Sinzinger, Stefan; Holc, Katarzyna; Schätzle, J.; Steffen, A.; Cimalla, Volker; Schwarz, Ulrich T.; Becker, Pascal
Integrated opto-chemical sensor system based on group III-nitride nanowires. - In: Mikro-Nano-Integration, (2014), S. 81-86

Weiß, Robert; Hillenbrand, Matthias; Grewe, Adrian; Sinzinger, Stefan
Parallelisierte chromatisch-konfokale Mikroskopie mit einem Mehrkanalspektrometer. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 115.2014, A35, insges. 2 S.

Das chromatisch konfokale Prinzip findet zunehmend Verwendung in optischen Abstandssensoren und Profilometern. Durch die Kombination eines konfokalen Aufbaus mit einer Optik mit großem Farblängsfehler kann ein großer axialer Messbereich gleichzeitig aufgenommen werden. In ihrer Grundausführung als Punktsensoren verfügen chromatisch konfokale Systeme über je eine Beleuchtungs- und Detektionslochblende in Kombination mit einem Spektrometer. In diesem Beitrag wird ein System zur parallelisierten chromatisch-konfokalen Mehrpunktmessung vorgestellt. Hierfür werden Lochblendenarrays anstelle der Einzellochblenden verwendet. Die parallele Auswertung der Messsignale erfolgt mittels eines Mehrkanalspektrometers. Die konfokale Signaldiskriminierung erfordert einen lateralen Abstand von ca. drei bis 10 Lochblendendurchmessern zwischen den einzelnen Öffnungen des Lochblendenarrays. Zur Erfassung der Zwischenpunkte und somit zur Steigerung der lateralen Auflösung werden die Lochblendenarrays zusätzlich in lateraler Richtung gescannt. Das Sensorlayout und die Kalibrierung des Messsystems werden diskutiert und anhand experimenteller Ergebnisse verifiziert.



http://www.db-thueringen.de/servlets/DocumentServlet?id=25327
Brill, Florian; Hillenbrand, Matthias; Grewe, Adrian; Mitschunas, Beate; Sinzinger, Stefan
Vergleich von Signalerzeugungsmodellen für chromatisch-konfokale Sensoren. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 115.2014, B34, insges. 2 S.

Chromatisch-konfokale Systeme haben sich als robuste Abstandssensoren etabliert. Eine Optik mit großem Farblängsfehler bildet die einzelnen Wellenlängen einer polychromatischen Quasi-Punktlichtquelle in unterschiedlichen axialen Abständen zum Sensor ab. Das vom Messobjekt gestreute oder reflektierte Licht wird nach Durchlaufen des Systems und einer Detektionslochblende mit einem Spektrometer ausgewertet. Da auf dem Messobjekt defokussierte Wellenlängen durch die Detektionslochblende stark gedämpft werden, entsteht ein spektraler Peak, der die Abstandsinformation zum Messobjekt enthält. Die Form dieses spektralen Peaks dient als wichtiges Kriterium für die Abbildungsqualität und die axiale Auflösung des Sensors. In diesem Beitrag stellen wir analytische und numerische Modelle zur Beschreibung des Abbildungsverhaltens vor. Wir diskutieren sowohl paraxiale als auch geometrisch-optische und wellenoptische Modelle. Diese basieren auf der Betrachtung der wellenlängenabhängigen Defokus-Punktbildfunktion und berücksichtigen z.T. Abbildungsfehler und Beugungseffekte. Unser Beitrag umfasst einen Vergleich und die Verifikation der Modelle anhand experimenteller Referenzmessungen.



http://www.db-thueringen.de/servlets/DocumentServlet?id=25342
Meinecke, Thomas; Kelly, Damien Peter; Kelly, Damien Peter *1977-*; Sinzinger, Stefan;
Iterative phase retrieval: a numerical investigation. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 115.2014, P32, insges. 2 S.

Estimating the complex amplitude of a coherent monochromatic electromagnetic field is important in many imaging and speckle metrology applications. Both standard phase shifting interferometry technique as well as iterative phase retrieval algorithms are used to recover an estimate of the phase distribution. Errors in the estimated phase distribution arise from (i) systematic errors (noise, vibrations, etc.) and (ii) numerical artifacts introduced by the discrete nature of numerical Fresnel propagation. Here, we examine how to minimize each of these noise sources. A brief conclusion is presented.



http://www.db-thueringen.de/servlets/DocumentServlet?id=25359
Streicher, Simon; Kampmann, Ronald; Sinzinger, Stefan; Kalthoff, Oliver
Hocheffiziente Simulation von Mehrfachstreuprozessen auf Basis der Mie-Theorie für die optische Sensorik. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 115.2014, A37, insges. 2 S.

Die theoretische Beschreibung der Lichtausbreitung durch streuende Medien ist für zahlreiche Anwendungsgebiete von der Medizintechnik bis zur Beleuchtungstechnik von großem Interesse. Ein idealer Ausgangspunkt hierfür ist die Mie-Theorie, die die Wechselwirkung elektromagnetischer Wellen mit sphärischen Streuzentren beschreibt. Der Durchmesser der Streuzentren ist bei unseren Betrachtungen vergleichbar mit der Wellenlänge des eingestrahlten Lichts. Es existieren verschiedene Algorithmen, mit denen die Streuparameter und Streufunktionen berechnet werden können. Wir präsentieren eine Lösung, die mit einstellbarer Winkelabtastung (0.0001˚ - 1˚) sowie einer beliebigen Eingangsfeldverteilung (Lasermoden, Messdaten, etc.) die Ausgangsverteilung eines frei definierbaren Streukörpers berechnen kann. Eine rein CPU basierte Lösung ist selbst bei Multithreading Programmierung sehr zeitaufwändig. Aus diesem Grund setzen wir programmierbare Grafikprozessoren ein. Hierbei kann die Rechenzeit bei exakter Rechnung gegenüber einer CPU signifikant verkürzt werden. Die Ergebnisse der Simulation werden mit Resultaten geeigneter Streulichtexperimente verschiedenster Proben validiert.



http://www.db-thueringen.de/servlets/DocumentServlet?id=25328
Krüger, Mathias; Kampmann, Ronald; Kleindienst, Roman; Sinzinger, Stefan
Kombinierter Müller-Jones-Formalismus zur umfassenden Optimierung spatialer Flüssigkristall-Lichtmodulatoren. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 115.2014, B32, insges. 2 S.

Das Anwendungsgebiet spatialer Flüssigkristall-Lichtmodulatoren (LC-SLM) reicht von der Verwendung als Flachbildschirm bis hin zum Einsatz als aktiv steuerbares Element zur Strahlformung oder -teilung. Insbesondere beim Einsatz als Kompensationselement zur Vermessung und Korrektur von Wellenfronten ist eine detaillierte Charakterisierung und Optimierung der Eigenschaften des verwendeten LC-SLM erforderlich. In diesem Beitrag werden Methoden vorgestellt, mit denen technologisch bedingte Störeffekte (Phasen-Amplituden-Kopplung, Flicker-Effekt, Pixelcrosstalk, Reaktionszeit, Temperaturverhalten) konventioneller Twisted-Nematic (TN) Lichtmodulatoren charakterisiert und kompensiert werden können. Über einen kombinierten Müller-Jones-Formalismus und unter Einbeziehung der zeitlichen Flicker-Charakteristik ist es bspw. möglich, trotz der TN-Anordnung der Flüssigkristalle eine minimale Phasen-Amplituden-Kopplung (Intensitätsmod. < 3% bei 2,3 π Phasenhub für WL = 532 nm) zu erreichen. Die Leistungsfähigkeit der Optimierung wird am Beispiel einer Kompensation von Wellenfrontstörungen bzw. der Charakterisierung von Oberflächenprofilen experimentell nachgewiesen.



http://www.db-thueringen.de/servlets/DocumentServlet?id=25341
Kampmann, Ronald; Kleindienst, Roman; Chall, Annemiek; Sinzinger, Stefan
Optische Manipulation sphärischer Partikel in Luft. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 115.2014, A4, insges. 2 S.

Seit der ersten erfolgreichen experimentellen Umsetzung, hat sich die optische Pinzette als Werkzeug in einem breiten Anwendungsspektrum etabliert und wird für den Einsatz in immer allgemeineren Aufgabenbereichen weiter entwickelt und optimiert. Einer der größten Vorteile besteht in dem kontaktlosen Halten und Manipulieren mikroskopischer Objekte ohne die Existenz von Adhäsions- und Oberflächenkräften. Dadurch wird das gezielte Loslassen zuvor gefangener mikroskopischer Objekte ermöglicht. Für die Positionierung additiver Marker auf einem Glaswafer wurde auf Basis strahlenoptischer Kraftsimulationen ein optisches System entwickelt. Dieses kombiniert eine strahlformende sowie eine fokussierende Funktion bei einer Gesamtgröße vergleichbar mit einem Mikroskopobjektiv. Mit dem System wird nachweislich das berührungslose optische Fangen sowie das stabile und effiziente optische Halten von 10 m durchmessenden SiO2-Partikeln bei einer Laserleistung von 50 mW realisiert. Für die Beobachtung gefangener Partikel in axialer Richtung wurde zusätzlich eine Spiegeloptik in das optische System integriert.



http://www.db-thueringen.de/servlets/DocumentServlet?id=25329
Grewe, Adrian; Endrödy, Csaba; Hillenbrand, Matthias; Cu-Nguyen, Phuong-Ha; Seifert, Andreas; Hoffmann, Martin; Sinzinger, Stefan
Compact hyperchromatic imaging systems based on tunable optical microsystems. - In: 2014 International Conference on Optical MEMS and Nanophotonics (OMN), ISBN 978-1-4799-3737-0, (2014), S. 129-130

We present hyperspectral imaging (HSI) systems based on a hyperchromatic confocal approach. Spatial filters are used to separate the spectral components of the light. The necessary multiplexing in time is realized by tuneable optics. In addition, we propose tunable systems with diffractive Alvarez-Lohmann lenses as well as fluidic micro lenses and present a demonstrator using Alvarez-Lohmann lenses. Micromechanical stepper actuators with large movement range are used to enhance the spatial resolution of those systems.



http://dx.doi.org/10.1109/OMN.2014.6924554
Pätz, Daniel; Leopold, Steffen; Hoffmann, Martin; Sinzinger, Stefan
Tunable anamorphotic imaging system based on fluidic cylindrical lenses. - In: 2014 International Conference on Optical MEMS and Nanophotonics (OMN), ISBN 978-1-4799-3737-0, (2014), S. 25-26

We present an anamorphotic imaging system with a separately tunable magnification in horizontal and vertical direction in order to change the aspect ratio of the image. The design is based on cylindrical membrane lenses made of aluminum nitride with tunable focal power to realize a vario system without moving elements. We demonstrate the design concept of cylindrical lenses with a very compact geometry, the optical system as well as experimental results.



http://dx.doi.org/10.1109/OMN.2014.6924521
Wu, Yang; Kelly, Damien P.; Stern, Adrian; Sinzinger, Stefan
Fluctuations in the intensity read out of CCD/CMOS arrays in digital holographic setups: an experimental investigation. - In: Three-dimensional imaging, visualization, and display 2014, ISBN 978-1-62841-054-9, (2014), S. 911708, insges. 11 S.

Vogt, Christian; Sinzinger, Stefan; Rascher, Rolf
A study on elastic grinding tools. - In: Optical fabrication and testing, ISBN 978-1-55752-747-9, 2014, OTu3B.3

http://dx.doi.org/10.1364/OFT.2014.OTu3B.3
Grewe, Adrian; Hillenbrand, Matthias; Hoffmann, Daniela; Mitschunas, Beate; Sinzinger, Stefan
Fabrication and replication of telescope arrays for vision aids. - In: Optical fabrication and testing, ISBN 978-1-55752-747-9, 2014, OTu3B.4, insges. 3 S.

We present vision aids for age related macular degeneration based on magnifying telescope arrays. The fabrication of master elements via ultra-precision micro-milling and their replication in thin films are discussed.



http://dx.doi.org/10.1364/OFT.2014.OTu3B.4
Kampmann, Ronald; Chall, Annemiek K.; Kleindienst, Roman M.; Sinzinger, Stefan
Iterative design process for highly efficient optical trapping systems. - In: International Optical Design Conference, ISBN 978-1-55752-747-9, 2014, IM2B.1, insges. 2 S.

The development of an optical system for trapping particles in air is presented. Based on optics design as well as optical force simulations an efficient optical system is designed, manufactured and characterized.



http://dx.doi.org/10.1364/IODC.2014.IM2B.1
Cu-Nguyen, Phuong-Ha; Grewe, Adrian; Endrödy, Csaba; Sinzinger, Stefan; Zappe, Hans; Seifert, Andreas
Compact tunable hyperspectral imaging system. - In: IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), 2014, ISBN 978-1-4799-3510-9, (2014), S. 1167-1170

http://dx.doi.org/10.1109/MEMSYS.2014.6765854
Leopold, Steffen; Geiling, Thomas; Fliegner, Caroline; Pätz, Daniel; Sinzinger, Stefan; Müller, Jens; Hoffmann, Martin
Multifunctional LTCC substrates for thermal actuation of tunable micro-lenses made of aluminum nitride membranes. - In: 9th IMAPS/AcerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2013), ISBN 978-1-62993-718-2, (2014), S. 124-130

Kelly, Damien Peter; Megel, Lysann; Meinecke, Thomas; Sinzinger, Stefan
Axial decorrelation of paraxial wavefields: theory and experiment. - In: Fringe 2013, (2014), S. 213-216

Megel, Lysann; Kelly, Damien Peter; Meinecke, Thomas; Sinzinger, Stefan
Iterative phase retrieval and the important role played by initial conditions. - In: Fringe 2013, (2014), S. 123-128

Kleindienst, Roman; Kampmann, Ronald; Stoebenau, Sebastian; Sinzinger, Stefan
Three-dimensional laser ablation for functionalization of non-planar optical surfaces. - In: Journal of laser applications, ISSN 1938-1387, (2013), 1, S. 919-925
Paper #N503

Efficient laser beam shaping is one of the keys to achieve maximum process performance and to exploit new application fields for lasers. However, with increasingly more complex beam shaping tasks typically the challenges related to system size, weight and reliability scale up as more and more conventional optical components like spherical lenses, gratings, prisms etc. are involved. To overcome this traditional tradeoff several optical functions can be integrated in a single hybrid [1] [2] (reflective/diffractive, refractive/ diffractive [3]) optical freeform component enabling miniaturized [4] and robust beam shaping solutions. For the fabrication of these complex optical surfaces we use integrated fabrication techniques (section 2), which combine micromachining of continuous reflective freeform surfaces [5] and precise laser ablation of high frequency diffractive structures efficiently [6]. In this article we focus on the generation of high quality diffractive structures in copper using 3-dimensional picosecond laser ablation within a five-axis ultraprecision micromachining center (section 3).



https://doi.org/10.2351/1.5062990
Hillenbrand, Matthias; Grewe, Adrian; Bichra, Mohamed; Kleindienst, Roman; Lorenz, Lucia; Kirner, Raoul; Weiß, Robert; Sinzinger, Stefan
Parallelized chromatic confocal sensor systems. - In: Optical measurement systems for industrial inspection VIII, 2013, S. 87880V, insges. 10 S.

Sinzinger, Stefan; Hillenbrand, Matthias; Abd-El Maksoud, Rania H.
Freeform surfaces in optical microsystems: from parabasal theory to applications. - In: Freeform optics, ISBN 978-1-55752-986-2, (2013), insges. 3 S.

http://dx.doi.org/10.1364/FREEFORM.2013.FM2B.4
Vogt, Christian; Rohrbacher, M.; Sinzinger, Stefan
Dressing and selfsharpening of conventional tools. - In: Proceedings of the 13th International Conference of the European Society for Precision Engineering and Nanotechnology, (2013), S. 289-293

Kelly, Damien Peter; Megel, Lysann; Meinecke, Thomas; Sinzinger, Stefan
A theoretical comparison of Fresnel based digital holography and phase retrieval from the transport of intensity equation. - In: Tribute to H. John Caulfield, ISBN 978-0-8194-9683-6, 2013, 88330G, insges. 10 S.

Kleindienst, Roman;
Laser beam shaping - from source to application. - In: Congress proceedings, ISBN 978-0-912035-98-7, 2013, Short course 3, insges. 1 S.

Control over the spatial distribution of a wavefield, i.e. beam shaping, is increasingly important in a large variety of laser based applications ranging from illumination to material processing. After introducing the fundamentals of beam shaping, in this short course we discuss the specific benefits and drawbacks of the different beam shaping techniques with respect to the input beam parameters, the desired output field and the application. Besides standard solutions modifications of these approaches mainly aiming at spatial or temporal averaging for homogenization purposes are presented. All theoretical considerations are supported by practical examples and experimental results. In an overview typical technologies for realizing beam shaping components are summarized.



Steffanson, Marek; Gorovoy, Konstantin; Holz, Mathias; Ivanov, Tzvetan; Kampmann, Ronald; Kleindienst, Roman; Sinzinger, Stefan; Rangelow, Ivo W.
Low-cost uncooled infrared detector using thermo-mechanical micro-mirror array with optical readout. - In: AMA conferences 2013 proceedings, ISBN 978-3-9813484-3-9, (2013), S. 85-88

Hofmann, Meike; Müller, Ralf; Grewe, Adrian; Brodersen, Olaf; Sinzinger, Stefan
Planar integrated opto-fluidic microsystems in PMMA for particle analysis :
Planar-integrierte opto-fluidische Mikrosysteme aus PMMA für die Partikelanalyse. - In: Von Bauelementen zu Systemen, (2013), S. 149-152

We demonstrate an integrated optofluidic system for monitoring the particle mass concentration and the Sauter mean diamter of polydisperse floating suspensions of water and standardized test dust. For optimum integration, a planar emitter-receiver unit is developed and fabricated in silicon technology. A VCSEL at 850 nm serves as light source, and monolithically integrated segmented photodiodes detect both the attenuation of the primary light beam and the scattered light. The optical system is integrated into a planar transparent polymethyl-methacrylate substrate by micromilling of an optical freeform surface and electron beam evaporation of reflective layers following the concept of planar integrated free-space optical systems. We are able to detect 1 mg per liter of the standards ISO 12103-A3, -A3 and -A4 that contain particles with diameters from 0.5 to 150 [my]m and to determine the Sauter mean diameter of the particle size distribution.



Kleindienst, Roman; Cimalla, Volker; Eickhoff, Martin; Grewe, Adrian; Holc, Katarzyna; Schätzle, J.; Schörmann, Jörg; Schwarz, Ulrich; Teubert, Jörg; Sinzinger, Stefan
Miniaturized optical integration platform for III-N based opto-chemical detectors :
Miniaturisierte optische Integrationsplattform für III-N-basierte opto-chemische Detektoren. - In: Von Bauelementen zu Systemen, (2013), S. 464-467

In this contribution we present the micro-nano-integration of an opto-chemical sensor based on III-N nanowire hetero-strucures for the detection of oxidizing and reducing gases. We discribe the optical design approach for efficiently shaping the excitation radiation as well as the precise fabrication of the miniaturized integration platform. After investigating the optical performance of the microsystem the electro-optical components and the nanowire heterostructures are integrated to evaluate the gas detection properties of the sensor system.



Grewe, Adrian; Endrödy, Csaba; Fütterer, Richard; Cu-Nguyen, Phuong-Ha; Steiner, S.; Hillenbrand, Matthias; Correns, Martin; Hoffmann, Martin; Linß, Gerhard; Zappe, Hans P.; Seifert, Andreas; Kley, E. B.; Sinzinger, Stefan
Opto-mechanical microsystems for hyperspectral imaging :
Opto-mechanische Mikrosysteme zur hyperspektralen Bildgebung. - In: Von Bauelementen zu Systemen, (2013), S. 139-142

We present approaches and systems for hyperspectral imaging devices. The first approach is based on resonant waveguide gratings. Another two systems employ a hyperchromatic confocal approach for the spectral separation of light. The necessary multiplexing in time is realized by tuneable optics. Here we use fluidic micro lenses as well as diffractive Alvarez-Lohmann Lenses. To increase the resolution of such systems micromechanical stepper actuators with large travel range are designed.



Leopold, Steffen; Pätz, Daniel; Sinzinger, Stefan; Hoffmann, Martin
Tunable micro-lenses based on aluminium nitride membranes :
Adaptive Mikrolinsen basierend auf Aluminiumnitrid Membranen. - In: Von Bauelementen zu Systemen, (2013), S. 173-176

Tunable micro-lenses based on deformable membranes consist of a liquid, whose surface is defined by a pressure chamber and a membrane. If a pressure is applied, the membrane deflects spherically. Thus the liquid within the pressure chamber, which is covered with the membrane, forms a plano-convex lens. Within this contribution aluminium nitride membranes for tunable lenses are investigated. They benefit from long-term-stability and a nearly ideal spherical deformation. For the mechanical and optical characterization we use 500 nm thick membranes with a diameter of 3 mm. For an applied pressure of 20 kPa, we observed membrane delections of up to 64 [my]m and refractive powers between 0 and 25 dpt.



Meinecke, Thomas; Kelly, Damien Peter; Kelly, Damien Peter *1977-*; Sinzinger, Stefan;
Characterization of photoresist using speckle fields - a theoretical investigation. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 114.2013, P57, insges. 2 S.

Gray scale lithography consists of numerous sophisticated favrication steps making it necessary to characterize the process of substrate structuring. We expose the photoresist with random intensity, i.e. speckle fields instead of conventional specific test patterns and observe their behavior in Fourier plane caused by coherent illumination of this processed substrate.



http://www.db-thueringen.de/servlets/DocumentServlet?id=23325
Werner, Jürgen; Hillenbrand, Matthias; Zhao, Mingcheng; Sinzinger, Stefan
An optimization method for radial NURBS surfaces. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 114.2013, P54, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=23557
Ma, Xuan; Grewe, Adrian; Hillenbrand, Matthias; Sinzinger, Stefan; Schädel, Martin; Görlandt, Stefan; Bača, Martin; Schober, Andreas
Entwicklung eines integrierten multifunktionalen Fluoreszenzdetektors. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 114.2013, P47, insges. 2 S.

Fluoreszenzdetektion hat eine große Bedeutung in biologischen und medizinischen Anwendungen für die Analyse verschiedener Farbstoffe und Zellkulturen. Durch Kombination von Fluidik, Optik und Elektronik ist die Realisierung eines kompakten und hochempfindlichen Messsystems möglich, welches vorteilhaft bei der Messung von Proben mit kleinen Volumina ist.



http://www.db-thueringen.de/servlets/DocumentServlet?id=23544
Burkhardt, Matthias; Steiner, R.; Gatto, A.; Sinzinger, Stefan
Interferenzlithografie mit gesteuerter Belichtungsverteilung. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 114.2013, P43, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=23545
Streicher, Simon; Kampmann, Ronald; Sinzinger, Stefan; Kalthoff, Oliver
3D Mie-Streuung in Simulation und Streulichtexperiment. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 114.2013, P15, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=23555
Kampmann, Ronald; Kleindienst, Roman; Chall, Annemiek; Sinzinger, Stefan
Optisches System für die Manipulation mikroskopischer Objekte in gasförmiger Umgebung. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 114.2013, B29, insges. 2 S.

Optische Pinzetten sind seit ihrer Entdeckung zu einem nützlichen Werkzeug für die Analyse und das Manipulieren von mikroskopischen Objekten in einem breitgefächerten Anwendungsbereich geworden. Für die Manipulation von Objekten im Mikrometerbereich wurde ein optisches System entwickelt. Dieses wird in einer Nanopositionier- und Nanomessmaschine als Werkzeug zum Einsatz kommen. Aus den Umgebungsbedingungen und Anforderungen wurden verschiedene Konzepte für die optische Pinzette erarbeitet und hinsichtlich ihrer Eignung analysiert. Das System bestehend aus einem Doppelaxicon und einem parabolischen Ringspiegel wurde in einem iterativen Designprozess optimiert. Die Integration einer strahlenoptischen Kraftberechnung in den Designprozess ermöglichte die Optimierung des Systems hinsichtlich seiner Fangeffizienz. Die Komponenten des optischen Systems wurden mit einem Ultrapräzisionsdiamantdrehprozess hergestellt. Dieses System wurde innerhalb eines on-axis Laboraufbaus hinsichtlich seiner optischen Funktionalität charakterisiert sowie bezüglich seiner Eignung für das dreidimensionale Manipulieren von mikroskopischen Partikeln untersucht.



http://nbn-resolving.de/urn:nbn:de:0287-2013-B029-7
Englert, Marion; Kluge, Michael; Menke, Yvonne; Letz, Martin; Auchter-Krummel, Petra; Brinkmann, Matthias; Rädlein, Edda; Sinzinger, Stefan
Optische in-situ Prozesskontrolle bei der Herstellung von anorganischen Materialien. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 114.2013, B13, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=23326
Streicher, Simon; Kampmann, Ronald; Sinzinger, Stefan; Kalthoff, Oliver
Efficient and precise simulation of multiple Mie scattering events using GPGPUs. - In: Physics and simulation of optoelectronic devices XXI, ISBN 978-0-8194-9388-0, 2013, 86190K, insges. 6 S.

Mie theory describes the scattering of electromagnetic waves on spheroidal particles whose diamter is comparable to the wavelength of the incident radiation. We have implemented a parallel algorithm using graphics adapters to calculate perpendicular and parallel polarized scattered waves, from which other scattering parameters can be derived. This facilitates parallel propagation of monochromatic electromagnetic waves in scattering media. We have shown that a parallelization can reduce computation time rigorously.



Cu-Nguyen, Phuong-Ha; Grewe, Adrian; Sinzinger, Stefan; Zappe, Hans; Seifert, Andreas
Tunable confocal hyperspectral imaging system. - In: 2013 International Conference on Optical MEMS and Nanophotonics (OMN), ISBN 978-1-4799-1155-4, (2013), S. 9-10

A tunable hyperchromatic system for confocal imaging is presented. The system, consisting of a magnetically-actuated, hydraulically-tunable concave membrane lens in combination with a positive diffractive lens, functions as a tunable filter in the 450 - 900nm spectral range. A spectral width of 15nm is demonstrated over the entire spectral range.



http://dx.doi.org/10.1109/OMN.2013.6659033
Zürbig, Verena; Pätz, Daniel; Pletschen, Wilfried; Hees, Jakob; Sah, Ram Ekwal; Kirste, Lutz; Heidrich, Nicola; Cimalla, Volker; Nebel, Christoph; Ambacher, Oliver
Piezo-actuated tunable diamond/AlN micro lenses. - In: Transducers & Eurosensors XXVII, ISBN 978-1-4673-5982-5, (2013), S. 2317-2320

Tunable micro lenses based on boron-doped nanocrystalline diamond and aluminium nitride (AIN) thin films are investigated. It is demonstrated that such a material combination is advantageous for the fabrication of highly transparent, mechanically stable optical components capable to operate at high actuation frequencies. In addition, it is shown that radially segmented AIN piezo-actuators allow for free aspheric deformation of the lens surface. It enables the use of such tunable lenses either in wave front filters or for correction of aberrations induced in complex optical systems.



http://dx.doi.org/10.1109/Transducers.2013.6627269
Pätz, Daniel; Sinzinger, Stefan; Leopold, Steffen; Hoffmann, Martin
Imaging systems with aspherically tunable micro-optical elements. - In: Imaging systems and applications, ISBN 978-1-55752-975-6, (2013), insges. 3 S.

We present a micro-optical imaging system with active scanning function to expand the field of view of a single lens. We demonstrate design concepts for focusing and scanning elements, fabrication fundamentals as well as experimental results with multiple individually tunable lenses.



http://dx.doi.org/10.1364/ISA.2013.ITu1E.4
Grewe, Adrian; Hillenbrand, Matthias; Endrödy, Csaba; Hoffmann, Martin; Sinzinger, Stefan
Advanced phase plates for confocal hyperspectral imaging systems. - In: Applied industrial optics, ISBN 978-1-55752-975-6, (2013), insges. 3 S.

We present innovative confocal hyperspectral imaging systems. The focal length of the systems can be adjusted to change the filtered wavelength band. The active focus variation is achieved by hyperchromatic Alvarez-Lohmann-phase plates.



http://dx.doi.org/10.1364/AIO.2013.AW1B.2
Kleindienst, Roman; Cimalla, Volker; Eickhoff, Martin; Grewe, Adrian; Holc, Katarzyna; Schätzle, J.; Schwarz, Ulrich; Teubert, Jörg; Sinzinger, Stefan
Micro-optical system as integration platform for III-N nanowire based opto-chemical detectors. - In: Advanced fabrication technologies for micro/nano optics and photonics VI, ISBN 978-0-8194-9382-8, 2013, 861315, insges. 9 S.

Leopold, Steffen; Pätz, Daniel; Knöbber, Fabian; Ambacher, Oliver; Sinzinger, Stefan; Hoffmann, Martin
Tunable cylindrical microlenses based on aluminum nitride membranes. - In: MOEMS and miniaturized systems XII, ISBN 978-0-8194-9385-9, 2013, 861611, insges. 9 S.

Bača, Martin; Schober, Andreas; Ma, Xuan; Grewe, Adrian; Schädel, Martin; Brodersen, Olaf; Will, Matthias
The integrated micro optical sensor for photometry and fluorescence applications. - In: Smartsystems integration, ISBN 978-3-8007-3490-0, (2013), insges. 8 S.

Kampmann, Ronald; Kleindienst, Roman; Grewe, Adrian; Bürger, Elisabeth; Oeder, Andreas; Sinzinger, Stefan
Optimized systems for energy efficient optical tweezing. - In: Complex light and optical forces VII, ISBN 978-0-8194-9406-1, 2013, 863714, insges. 9 S.

Compared to concentional optics like singlet lenses or even microscope objectives advanced optical designs help to develop properties specifically useful for efficient optical tweezers. We present an optical setup providing a customized intensity distribution optimized with respect to large trapping forces. The optical design concept combines a refractive double axicon with a reflective parabolic focusing mirror. The axicon arrangement creates an annular field distribution and thus clears spache for additional integrated observation optics in the center of the system. Finally the beam is focused to the desired intensity distribution by a parabolic ring mirror. The compact realization of the system potentially opens new fields of applications for optical tweezers such as in production industries and micro-nano assembly.



Kelm, Andreas; Börret, Rainer; Sinzinger, Stefan
Differentiation of influences In deterministic polishing. - In: 2nd EOS Conference on Manufacturing of Optical Components 2011, ISBN 978-1-61839-607-5, (2012), S. 105-106

Vogt, Christian; Adelsberger, Hannes; Maurer, Roland; Schneider, Florian; Koller, T.; Draxinger, S.; Sinzinger, Stefan; Rascher, Rolf; Sperber, Peter
Dwell time assisted grinding. - In: 2nd EOS Conference on Manufacturing of Optical Components 2011, ISBN 978-1-61839-607-5, (2012), S. 49-50

Sinzinger, Stefan;
Optical freeform surfaces in integrated optical microsystems. - In: Imaging systems and applications, (2012), insges. 3 S.

Freeform surface provide degrees of freedom which are essential specifically for the optimization and integration of optical microsystems. We discuss design, optimization as well as fabrication concepts and applications of (micro-)systems involving such non-conventional surfaces.



http://dx.doi.org/10.1364/ISA.2012.IM3C.3
Hillenbrand, Matthias; Grewe, Adrian; Bichra, Mohamed; Mitschunas, Beate; Kirner, Raoul; Weiß, Robert; Sinzinger, Stefan
Chromatic information coding in optical systems for hyperspectral imaging and chromatic confocal sensing. - In: Optical systems design 2012, 2012, 85500D, insges. 10 S.

Markweg, Eric; Hillenbrand, Matthias; Sinzinger, Stefan; Hoffmann, Martin
Planar plano-convex microlens in silica using ICP-CVD and DRIE. - In: Optical systems design 2012, 2012, 85500T, insges. 7 S.

A microlens suitable for integration with photonic elements on the same substrate is presented. It is fabricated utilizing planar standard technologies such as UV lithography, ICO-CVD and Deep Reactive Ion Etching. For reaching an optical 3D functionality with 2D structuring methods a variation of the refractive index during the layer desposition process in the vertical direction is used. For the horizontal direction, parallel to the substrate, the shape of etched side walls determines the focus. This procedure allows the independent control of light propagation in two perpendicular directions with planar technologies. To demonstrate the potential of the technology, optical elements for the collimation of fiber-beased light sources are presented.



Sabitov, Nail; Grewe, Adrian; Sinzinger, Stefan;
Simultaneous trapping and observation optics for micro-opto-fluidic systems. - In: EOS annual meeting 2012 (EOSAM 2012), ISBN 978-3-9815022-4-4, (2012), insges. 2 S.

The two step phase-shifting interferometry is a challenging technique for many on-axis holographic applications. The significant advantage is the high dynamic and lateral resolution. Practically it is possible to reconstruct the initial complex wave signal with the resolution of the matrix detector (pixel wise). In this contribution we assume an analytical generalization of the two-step-phase-shifting algorithm. The suggested method is similar to the solution of Meng et al. (Opt. Lett. 31(10), 1414-1416, (2006)) but operates with two reference waves arbitrary in phase and amplitude. Because of the complexity of the analytical expressions a graphical method for solving the duality problem is proposed. The simulation of the reconstruction process shows the reliability of the method.



Grewe, Adrian; Hillenbrand, Matthias; Hillenbrand, Matthias *1983-*; Sinzinger, Stefan;
Adaptive confocal approach to hyperspectral imaging. - In: EOS annual meeting 2012 (EOSAM 2012), ISBN 978-3-9815022-4-4, (2012), insges. 2 S.

We discuss new concepts for hyperspectral imaging based on adaptive chromatic confocal sensors. Design, fabrication and characterization of a sensor system utilizing diffractive and/or refractive Alvarez phase plates are presented.



Kleindienst, Roman; Cimalla, Volker; Eickhoff, Martin; Grewe, Adrian; Schwarz, Ulrich T.; Teubert, Jörg; Sinzinger, Stefan
Micro-nano integration of a III-N nanowire based opto-chemical detector. - In: EOS annual meeting 2012 (EOSAM 2012), ISBN 978-3-9815022-4-4, (2012), insges. 2 S.

Due to the highly sensitive photoluminescence (PL) response to hydrogen (H2) and oxygen (O2), III-N nanowire heterostructures (NWHs) can be applied as opto-chemical transducers [1]. In our contribution we describe the optical design and the fabrication of a robust and compact micro optical system realizing the integration of electro-optical components and NWHs. The potential of our approach is evaluated by profilometric characterizations and an investigation of the optical performance. Furthermore, we discuss the application as highly sensitive sensor system with fully integrated all optical readout for H2- or O2-concentrations in the ppm regime.



Burkhardt, Matthias; Fechner, Renate; Erdmann, Lars; Frost, Frank; Steiner, Reinhard; Sandfuchs, Oliver; Schindler, Axel; Gatto, Alexandre; Sinzinger, Stefan
Imaging gratings with modulated blaze - realized by a combination of holography and reactive ion beam etching. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 113.2012, A3, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=21435
Kampmann, Ronald; Kleindienst, Roman; Rose, Franziska; Hartung, Nicole; Naglatzki, Markus; Sinzinger, Stefan
Laser power stabilization for improved ablation depth uniformity . - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 113.2012, B22, insges. 2 S.

Due to low heat deposition into the surrounding material, ps-lasers are well suited for a precise ablation of micro structures. However, to obtain constant removal rates the laser parameters as well as the environmental conditions need to be kept stable. For our investigations we used a frequency tripled ps-laser operating at 355 nm. Without any additional power stabilization system, long term micro structuring processes of OFE-copper typically resulted in depth variations of about +/- 10 % which are strongly correlated with detected laser power fluctuations. The developed system for laser power stabilization takes advantage of the linear polarized radiation of our laser source. With a fast photoelectric detector the power fluctuations are measured. A specifically designed feedback control system turns a half wave plate mounted in a piezo driven rotation stage to decouple fluctuating power fractions via a polarizing beam splitter. We demonstrate a nearly constant laser power at the work piece. Substantially improved ablation depth uniformity is verified by a profilometric analysis of directly ablated diffractive structures.



http://www.db-thueringen.de/servlets/DocumentServlet?id=21324
Hillenbrand, Matthias; Mitschunas, Beate; Homberg, Sarah; Sinzinger, Stefan
Novel vision aids for people suffering from Age-Related Macular Degeneration. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 113.2012, B28, insges. 2 S.

In Germany alone, about 4.5 million people suffer from Age-Related Macular Degeneration (AMD), a disease that causes progressive damage to the central part of the retina. People suffering from AMD usually experience growing dark or blurred spots in the center of their vision which render them unable to read texts, to drive cars, or to recognise faces. Current vision aids for AMD patients are mainly based on the magnification and/or the redirection of the full field of view which will inevitably result in a loss of information at the outer parts of the field of view. In contrast, we present different optical principles for the redirection of the central part of the field while the loss of information at the boarders is kept to a minimum. Our focus is on highly integrated, nonelectric, spectacle-like systems. Possible principles include the field dependent displacement and magnification/reduction of the object information as well as a deliberately induced distortion. Our contribution includes the mathematical and optical modelling of the imaging setup, numerical simulations as well as the presentation of first experimental results.



http://www.db-thueringen.de/servlets/DocumentServlet?id=21325
Megel, Lysann; Meinecke, Thomas; Kelly, Damien Peter; Sinzinger, Stefan
Lateral speckle size in Phase Retrieval systems. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 113.2012, A34, insges. 2 S.

Phase Retrieval (PR) techniques provide a complimentary approach to Digital Holography (DH) for estimating the complex amplitude of a wavefield. If one uses a Gerchberg-Saxon type iterative approach, generally two intensity distributions at different optical planes are captured. Fast Fourier Transform (FFT) based algorithms are then employed to iteratively recover the phase information. Once we have estimated the complex amplitude of the wavefield we can use numerical propagation algorithms to calculate the distribution at any optical plane. We expect however that the finite size of the camera aperture and the sampling effect introduced by the camera pixels will act to reduce the performance of the optical system. In this manuscript we attempt to examine these performance limiting factors in more detail using a special field as the input into our system; namely a speckle field. This particular type of field contains high spatial frequencies which in turn are related to the lateral speckle size. A series of PR experiments at different capture planes are conducted and we report on how the system performance is effected.



http://www.db-thueringen.de/servlets/DocumentServlet?id=21323
Werner, Jürgen; Zhao, Mingcheng; Hillenbrand, Matthias; Sinzinger, Stefan
RBF-based optical surfaces. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 113.2012, P39, insges. 2 S.

Freeform optical surfaces offer additional degrees of freedom for designing imaging systems without rotational symmetry. This allows for a reduction in the number of optical elements, leading to more compact and lightweight systems, while at the same time improving the image quality. This also enables new areas of application. Commonly used representations for freeform surfaces are x-y-polynomials, Zernike polynomials and NURBS. Radial basis functions (RBF) have been used for many years e.g. in artificial neural networks and functional approximation and can also be used to describe optical surfaces. In this contribution we investigate properties specific to RBF-based optical surfaces and compare the performance of RBF-based surfaces to other representations in selected optical imaging systems. Interesting aspects include the dependency on the number of RBF that are summed to form the surface, the locality structure and its effects on optimization.



http://www.db-thueringen.de/servlets/DocumentServlet?id=21333
Abd El-Maksoud, Rania; Hillenbrand, Matthias; Sinzinger, Stefan
Ghost images for optical systems with tilted object plane. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 113.2012, P38, insges. 2 S.

Ghost images are formed by light that is partially reflected by optical surfaces. Ghost images may cause contrast reduction and may veil parts of the nominal image. Performing ghost image analysis during the design stage is important to ensure the success of the system. In a previous paper (Applied Optics, Vol. 50, Issue 15, pp. 2305-2315 (2011), modeling ghost images was performed using a sequential ray tracing technique. Synthesizing ray paths into ghost and nominal paths and performing sequential ray tracing provides a powerful tool for describing ghost image formation in optical systems. We address the applicability of Scheimpflug principle for ghost image formation and we present a new criterion to identify problematic ghost images in the paraxial approximation. Numerical examples are considered and discussed.



http://www.db-thueringen.de/servlets/DocumentServlet?id=21332
Abd El-Maksoud, Rania; Hillenbrand, Matthias; Sinzinger, Stefan; Omar, Mona F.
Measuring the refractive index of double-clad fibers using an interferometric technique. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 113.2012, P32, insges. 2 S.

Multiple-beam Fizeau interferometry is an accurate, simple, and nondestructive technique in the field of fiber research. Inserting the fiber into the liquid silvered wedge causes the fringes to shift across the fiber region with respect to the fringes at the liquid region. Fringe shift is a function in the geometry of the different regions of the fiber and the refractive index profile of the fiber. In a previous paper (Applied Optics, Vol. 50, No. 31, (2011)) the theory for the interference pattern formation was developed. In this contribution, we extend the theory to include graded index double-clad fibers. In addition, we discuss the experimental aspects of the measuring system.



http://www.db-thueringen.de/servlets/DocumentServlet?id=21331
Grewe, Adrian; Hillenbrand, Matthias; Sinzinger, Stefan
Optimized Alvarez phase plates for hyperspectral imaging. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 113.2012, B35, insges. 2 S.

In the late 1960s Alvarez and Lohmann independently suggested cubic phase plates as varifocal elements. A variety of different theoretical as well as experimental approaches have been discussed since. Today compact tunable optics is of specific interest e.g. in miniaturized optical systems. Recently developed fabrication technologies like diamond turning or milling nowadays enable the fabrication of higher order freeform surface profiles as implementation of efficient phase plates for an optimization of the imaging properties. We present a non-paraxial analysis of the imaging behavior of diffractive, refractive and hybrid Alvarez-Lohmann lenses with increased numerical aperture. Our analysis includes the influence of lateral focus shifts as well as monochromatic and polychromatic aberrations over the tuning range. Experimental results with phase plates fabricated by diamond milling and lithographic techniques will be presented.



http://www.db-thueringen.de/servlets/DocumentServlet?id=21327
Ma, Xuan; Grewe, Adrian; Hillenbrand, Matthias; Sinzinger, Stefan
Design and integration of a multi-channel fluorescence detector. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 113.2012, P1, insges. 2 S.

In combination with fluidic systems, fluorescence detectors have a large variety of applications e.g. in biomedicine for ph-sensoring or the characterization of chemical reaction processes. Highly integrated and miniaturized optofluidic microsystems enable the handling of very small sample volumes in so-called segmented flow systems, which is beneficial for the practical application. A single-channel fluorescence sensor using planar integrated free space optical systems has been developed in the past. In order to increase the measuring flexibility and accuracy the extension to a multi-wavelength and multi-channel sensor system based on this concept is currently investigated. We present the concept, optical design and fabrication strategy of a highly integrated free space optical fluorescence detector for the application in a segmented-flow environment. The performance of the system is characterized and the application as a biochemical analysis system is discussed.



http://www.db-thueringen.de/servlets/DocumentServlet?id=21328
Brinkmann, Matthias; Englert, Marion; Hagemann, Malte; Sinzinger, Stefan
Realistic ray-tracing of surface and volume diffusers. - In: Proceedings, ISBN 9783941417847, (2012), S. 55-70

Steffanson, Marek; Gorovoy, Konstantin; Kampmann, Ronald; Kleindienst, Roman; Sinzinger, Stefan; Rangelow, Ivo W.
Low-cost uncooled infrared detector using microcantilever arrays with optical readout. - In: 23rd Micromechanics and Microsystems Europe Workshop, (2012), insges. 4 S.

We report on characterization of an uncooled infrared (IR) detector set-up which serves as a low-cost IR camera technology platform. The imaging detector consists of a passive microsensor and a simple optical readout. IR radiation is detected by a microcantilever focal plane array (FPA) which working principle is described. The cantilever serves as a thermo-mechanical transducer, converting photon energy in a reservible mechanical deflection on the micro.level. The mechanical deflection is captured by a visual imager (CCD / CMOS) which is part of the simple optical readout and converted into changes of gray scale intensity. Finally, we present first results of real-time thermographic imagery taken by the uncooled IR detector.



Hillenbrand, Matthias; Wenzel, Christian; Ma, Xuan; Feßer, Patrick; Sinzinger, Stefan
Hyperchromatic confocal sensor systems. - In: 8th EOS Topical Meeting on Diffractive Optics, (2012), insges. 2 S.

Oeder, Andreas; Stoebenau, Sebastian; Sinzinger, Stefan
Free-form optical trapping systems. - In: Optical trapping applications, ISBN 978-1-55752-909-1, (2011), insges. 1 S.

We report a breakthrough in designing and fabricating free-form trapping systems which opens up a new class of systems for optical micromanipulation. We show 3D-trapping with a specialized optics (WD=650 [my]m), which is made of a single piece of PMMA.



http://dx.doi.org/10.1364/OTA.2011.OTTuC2p
Hofmann, Meike; Sinzinger, Stefan
Talbot interferometry for the determination of size and concentration of large particles. - In: Frontiers in optics, ISBN 978-1-55752-917-6, (2011), insges. 2 S.

Talbot interferometry is suggested for measuring scatting particles. We show experimentally as well as analytically how the formation of Talboat carpets is affected by particles and discuss the effects of particle size and location.



http://dx.doi.org/10.1364/FIO.2011.FWS8
Meinecke, Thomas; Kelly, Damien Peter; Sabitov, Nail; Sinzinger, Stefan
Numerical propagation algorithms and phase retrieval techniques. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 112.2011, P55, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=21322
Burkhardt, Matthias; Sandfuchs, Oliver; Steiner, Reinhard; Gatto, Alexandre; Sinzinger, Stefan
Möglichkeiten und Grenzen der interferenzlithografischen Herstellung modulierter Blazegitter. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 112.2011, P47, insges. 3 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=21321
Englert, Marion; Juschtschenko, Willi; Hagemann, Malte; Brinkmann, Matthias; Sinzinger, Stefan
Analysis and optimization of volume diffusors. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 112.2011, B26, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=21312
Hillenbrand, Matthias; Mitschunas, Beate; Werner, Jürgen; Sinzinger, Stefan; Abd El-Maksoud, R. H.
Optische Systeme ohne Rotationssymmetrie: Bestimmung von Bildlage und Bildorientierung. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 112.2011, B12, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=21311
Vogt, Christian; Sinzinger, Stefan; Adelsberger, Hannes; Maurer, Roland; Schneider, Florian; Mandler, Roland; Kuepper, Lutz; Rascher, Rolf; Sperber, Peter
An experimental study on a flexible grinding tool. - In: Advances in abrasive technology XIV, (2011), S. 91-96

This paper reports on results of experiments on BK7 glass materials with novel tool for fine grinding of faces for optical purposes. The ball-shaped tool was compromises of a plastic wheel, several elastic layers and a polyurethane compound with diamond abrasives, which was developed and provided by OptoTech. Removal test runs led to samples with very amooth surfaces without sub surface damages. The tool's elastic properties enable well time assisted grinding.



Kleindienst, Roman; Kampmann, Ronald; Stoebenau, Sebastian; Sinzinger, Stefan
Synthetic design and integrated fabrication of multifunctional hybrid beam shapers. - In: Laser beam shaping XII, ISBN 978-081-948-740-7, 2011, 8130OE, insges. 11 S.

Stoebenau, Sebastian; Kleindienst, Roman; Hofmann, Meike; Sinzinger, Stefan
Computer-aided manufacturing for freeform optical elements by ultraprecision micromilling. - In: Optical manufacturing and testing IX, ISBN 978-0-8194-8736-0, 2011, 812614, insges. 12 S.

Kelly, Damien Peter; Sabitov, Nail; Meinecke, Thomas; Sinzinger, Stefan
Some considerations when numerically calculating diffraction patterns. - In: Digital holography and three-dimensional imaging, ISBN 978-1-55752-912-1, (2011), insges. 3 S.

Numerical calculation of diffraction integrals remains a challenge in modern optics, with applications in digital holography, phase retrieval techniques and wave-front sensing. Two different numerical techniques are compared and the associated sampling rules derived.



http://dx.doi.org/10.1364/DH.2011.DTuC5
Polster, Tobias; Hoffmann, Martin; Mehner, Hannes; Oeder, Andreas; Sinzinger, Stefan
Optisch gepulste Mikroplasmaquelle für die Integration von Nanotomographie in eine Nanomessmaschine. - In: Proceedings, (2011), S. 697-700

Grewe, Adrian; Sinzinger, Stefan; Stoebenau, Sebastian; Amberg, Martin
Realisierung eines integrierten mikrooptischen Fluoreszenzdetektors. - In: Proceedings, (2011), S. 402-405

In der Bio-Analytik gewinnen optische Analyseverfahren immer mehr an Bedeutung. Ihr größter Vorteil beruht in der noninvasiven Untersuchung sensibler biologischer Proben. Die Etablierung mikrofluidischer Systeme zur Probenerzeugung und Untersuchung, stellt auch die optischen Analysesysteme vor die Herausforderung der Miniaturisierung und Integration. In diesem Beitrag wird das Design, die Fertigung und die Charakterisierung eines miniaturisierten Systems zur Fluoreszenzmessung vorgestellt, dessen zentraler Bestandteil eine durch Ultrapräzisonsfräsen gefertigte integrierte Optik ist.



Sabitov, Nail; Kelly, Damien Peter; Meinecke, Thomas; Sinzinger, Stefan
Talbot images formed with an arbitrary incidence wave. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 148

Stoebenau, Sebastian; Sinzinger, Stefan
Ultrapräzisionsgefräste optische Bauelemente - Analyse und Optimierung der Leistungsfähigkeit. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 134

Oeder, Andreas; Sinzinger, Stefan
Systemintegration optischer Pinzetten. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 104

Pätz, Daniel; Leopold, Steffen; Sinzinger, Stefan; Hoffmann, M.; Knöbber, Fabian; Ambacher, Oliver
Scannende Compound-Kamera zur hochauflösenden 3D-Objektabtastung. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 102

Ma, Xuan; Krüger, Mathias; Uske, Steffen; Sinzinger, Stefan
Mikrostrukturierung senkrechter Kanalwände mittels Talbot-Effekt. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 102

Gruber, Matthias; Winkelmann, H.; Bohling, Michael; Knuppertz, H.; Kleindienst, Roman; Kampmann, Ronald
Herstellung eines optischen Sensorkopfes zur Gasanalyse mittels spanender, ablativer und planarer Fertigungsverfahren. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 100

Grewe, Adrian; Sinzinger, Stefan; Stoebenau, Sebastian; Amberg, Martin
Integriertes optisches Mikrosystem zur Fluoreszenzdetektion in bio-chemischen Analysatoren. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 98

Baitinger, Henner; Manske, Eberhard; Mastylo, Rostyslav; Vorbringer-Doroshovets, Nataliya; Sinzinger, Stefan; Jäger, Gerd; Bischoff, Jörg
Verbesserung der Kantenfindung mit einem Fokussensor durch Simulationen auf der Grundlage rigoroser Beugungstheorie. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 90

Kleindienst, Roman; Stoebenau, Sebastian; Kampmann, Ronald; Sinzinger, Stefan
Hybride freiformoptische Komponenten - Realisierung komplexer Strahlformungen mittels integrierter Fertigungsverfahren. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 80

Vogler, U.; Bich, A.; Völkel, R.; Hornung, M.; Zoberbier, R.; Sinzinger, Stefan
Optimierung des Beleuchtungssystem eines Mask Aligners (MO Exposure Optics). - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 60

Hofmann, Meike; Kampmann, Ronald; Sinzinger, Stefan
Mikrosystem zur Partikelkonzentrationsmessung auf Basis der Talbotinterferometrie. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 20

Sinzinger, Stefan; Mitschunas, Beate; Weber, Ralf
55 Jahre Optik in Ilmenau - von der analytischen Bildfehlertheorie zu optischen Mikrosystemen. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 8

Stoebenau, Sebastian; Kleindienst, Roman; Kampmann, Ronald; Sinzinger, Stefan
Enhanced optical functionalities by integrated ultraprecision machining techniques. - In: Proceedings of the 11th International conference of the European Society for Precision Engineering and Nanotechnology, (2011), S. 148-151

Hoffmann, Martin; Kremin, Christoph; Stubenrauch, Mike; Fröber, Ulrike; Polster, Tobias; Fischer, Michael; Bartsch de Torres, Heike; Müller, Jens; Sinzinger, Stefan; Witte, Hartmut
Integration von nanostrukturierten Materialien in mikrofluidische Systeme: Perspektiven und Herausforderungen. - In: Programm, ISBN 978-3-00-034073-4, (2011), S. 25-26

Leopold, Steffen; Pätz, Daniel; Knöbber, Fabian; Polster, Tobias; Ambacher, Oliver; Sinzinger, Stefan; Hoffmann, Martin
Tunable refractive beam steering using aluminum nitride thermal actuators. - In: MEMS adaptive optics V, ISBN 978-0-8194-8468-0, 2011, 79310B, insges. 7 S.

Knöbber, Fabian; Bludau, Oliver; Röhlig, Claus-Christian; Sah, Ram Ekwal; Williams, O. A.; Kirste, Lutz; Leopold, Steffen; Pätz, Daniel; Cimalla, Volker; Ambacher, Oliver; Lebedev, Vadim
Dynamic characterization of thin aluminum nitride microstructures. - In: Physica status solidi, ISSN 1610-1642, Bd. 8 (2011), 2, S. 479-481

https://doi.org/10.1002/pssc.201000512
Hillenbrand, Matthias; Zhao, Mingcheng; Mitschunas, Beate; Sinzinger, Stefan
Untersuchungen zur Genauigkeit NURBS-basierter optischer Freiformflächen. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 111.2010, P36, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=18627
Satzer, Britta; Mitschunas, Beate; Stoebenau, Sebastian; Sinzinger, Stefan
Design und Demonstrationsaufbau eines optischen Systems mit Freiformfläche. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 111.2010, P35, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=18626
Sabitov, Nail; Meinecke, Thomas; Sinzinger, Stefan;
Bestimmung der Genauigkeit beim holographischen Messverfahren in Mikrofluidsystemen. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 111.2010, P13, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=18625
Meinecke, Thomas; Sabitov, Nail; Sinzinger, Stefan;
Composite holograms in digital holographic microscopy. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 111.2010, A35, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=18622
Ma, Xuan; Sinzinger, Stefan
Mikrostrukturierung auf nicht ebenen Glasoberflächen mittels Interferenzlithographie. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 111.2010, P1, insges. 2 S.

http://www.db-thueringen.de/servlets/DocumentServlet?id=18624
Knöbber, Fabian; Bludau, Oliver; Williams, O. A.; Sah, Ram Ekwal; Kirste, Lutz; Baeumler, Martina; Leopold, Steffen; Pätz, Daniel; Nebel, Christoph E.; Ambacher, Oliver; Cimalla, Volker; Lebedev, Vadim
Diamond/AlN thin films for optical applications. - In: AIP conference proceedings, ISSN 1551-7616, Bd. 1292 (2010), S. 205-208

http://dx.doi.org/10.1063/1.3518298
Leopold, Steffen; Polster, Tobias; Geiling, Thomas; Pätz, Daniel; Knöbber, Fabian; Albrecht, Arne; Ambacher, Oliver; Sinzinger, Stefan; Hoffmann, Martin
Structuring techniques of aluminiuim nitride masks for deep reactive ion etching (drie) of silicon. - In: Abstracts, ISBN 978-90-816737-1-6, (2010), S. 76-79

http://eprints.eemcs.utwente.nl/19346/
Oeder, Andreas; Bauer, Carl; Stoebenau, Sebastian; Sinzinger, Stefan
Optimierte Strahlformungs- und Fokussieroptik zur optischen Mikromanipulation. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 111.2010, A37, insges. 2 S.

Optische Pinzetten werden oft mit konventionellen Mikroskopobjektiven mit hoher numerischer Apertur aufgebaut. Diese sind meist auf die gängige Deckglasdicke von 170 [my]m angepasst und dadurch für die Mikromanipulation auf diesen Arbeitsabstand beschränkt. Dies stellt ein erhebliches Problem für die Manipulation z.B. in Fluidikkanälen dar, die aus Gründen der mechanischen Stabilität zumeist mit Wandstärken hergestellt werden, die 0,5 mm oder mehr betragen. Um in diesen Kanalsystemen dennoch mit optischen Pinzetten arbeiten zu können, kann mit relativ aufwändigen Counterpropagating Pinzetten oder mit integrierten Faserpinzetten gearbeitet werden. Ziel unserer Arbeiten ist der Entwurf und die Demonstration einer optimierten Spezialoptik für diese Anwendung. Unterstützt durch numerische Simulation der optischen Kraftwirkung in elektromagnetischen Feldern wir ein optimiertes Design für optische Pinzetten abgeleitet. Daran anschließend wird ein integriertes monolithisches und Fokussierungsobjektiv entworfen. Die Herstellung des Systems erfolgt durch mechanische Ultrapräzisionsbearbeitung der optischen Flächen. Erste Ergebnisse und eine Charakterisierung des Konzepts werden vorgestellt.



http://www.db-thueringen.de/servlets/DocumentServlet?id=18623
Oeder, Andreas; Bauer, Carl; Stoebenau, Sebastian; Sinzinger, Stefan
Lens design for optimized trapping optics. - In: EOS annual meeting 2010, (EOSAM 2010), ISBN 978-3-00-030509-2, (2010), insges. 2 S.

We present the design and fabrication of an optimized integrated system for optical tweezing. The powerful simulation algorithms of conventional lens design software are used to provide data for a simulation tool for the optical forces thus allowing the optimization of the system. We present examples of compact trapping modules.



Amberg, Martin; Stoebenau, Sebastian; Sinzinger, Stefan
Optofluidic microsystems fabricated by ultraprecision micromachining. - In: EOS annual meeting 2010, (EOSAM 2010), ISBN 978-3-00-030509-2, (2010), insges. 2 S.

Kleindienst, Roman; Kampmann, Ronald; Stoebenau, Sebastian; Sinzinger, Stefan
Reflective hybrid optical components - functionalization of nonplanar optical surfaces using direct ps-laser ablation. - In: EOS annual meeting 2010, (EOSAM 2010), ISBN 978-3-00-030509-2, (2010), insges. 2 S.

Hybrid diffractive/reflective or diffractive/refractive components provide additional potential for the integration of complex optical functionality. We present an integrated approach for the manufacturing of hybrid optical components. To this end ps-laser ablation is combined with ultraprecision micromachining of freeform optical surfaces.



Hofmann, Meike; Ma, Xuan; Schneider, Jan; Sinzinger, Stefan
Highly integrated optical microsystem for particle concentration measurement. - In: Micro-optics 2010, ISBN 978-0-8194-8189-4, 2010, 77160T, insges. 12 S.

Amberg, Martin; Stoebenau, Sebastian; Sinzinger, Stefan
Integrated freespace optical fluorescence detector for micro fluidic applications. - In: Micro-optics 2010, ISBN 978-0-8194-8189-4, 2010, 7716OS, insges. 7 S.

Pätz, Daniel; Leopold, Steffen; Knöbber, Fabian; Sinzinger, Stefan; Hoffmann, Martin; Ambacher, Oliver
Tunable compound eye cameras. - In: Micro-optics 2010, ISBN 978-0-8194-8189-4, 2010, 77160K, insges. 7 S.

Stoebenau, Sebastian; Amberg, Martin; Sinzinger, Stefan
Micromilling for the fabrication of complex optical microsystems. - In: Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, (2010), S. 412-415

The design of a complex system for fluorescence analysis is presented where in the optical and mechanical components and surface structures are monolithically integrated in a transparent substrate.



Gross, Herbert; Hofmann, Marko; Jedamzik, Ralf; Hartmann, P.; Sinzinger, Stefan
Measurement and simulation of striae in optical glass. - In: Optical measurement systems for industrial inspection VI, 2009, 73891C, insges. 9 S.

Stoebenau, Sebastian; Sinzinger, Stefan
Ultraprecision machining techniques for the fabrication of freeform surfaces in highly integrated optical microsystems. - In: Optical manufacturing and testing VIII, ISBN 978-0-8194-7716-3, 2009, 742608, insges. 7 S.

Kelm, Andreas; Hänle, Manuel; Boerret, Rainer; Sinzinger, Stefan
Simulation and analysis of the polishing process for aspheres. - In: Optical manufacturing and testing VIII, ISBN 978-0-8194-7716-3, 2009, 74260F, insges. 5 S.

Stoebenau, Sebastian; Kleindienst, Roman; Sinzinger, Stefan
Ultraprecision micromilling for the fabrication of monolithically integrated refractive microoptical systems. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 110.2009, P71, insges. 2 S.

Different classes of optical elements combined in a monolithically integrated microoptical system are fabricated using micromilling. On the resulting surfaces the average roughness height was found to be Ra < 40 nm with an overall shape accuracy < 1.6 æm (based on the determination of the radii of curvature).



http://www.db-thueringen.de/servlets/DocumentServlet?id=14650
Meinecke, Thomas; Sabitov, Nail; Sinzinger, Stefan;
Particle detection in microfluidic systems. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 110.2009, P57, insges. 2 S.

In a microfluidic channel colloidal polystyrene spheres are manipulated by an optical tweezer. This contribution gives a short view over the 3D observation of moving and non-moving particles using a simple in-line hologram setup.



http://www.db-thueringen.de/servlets/DocumentServlet?id=14649
Kelm, Andreas; Boerret, Rainer; Sinzinger, Stefan
Analysis of polishing errors from subaperture tools. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 110.2009, P47, insges. 2 S.

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Hänle, Manuel; Kelm, Andreas; Knopf, Marcel; Boerret, Rainer; Sinzinger, Stefan
Optical performance of heated laser mirrors for high power lasers. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 110.2009, P36, insges. 2 S.

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Pätz, Daniel; Stoebenau, Sebastian; Sinzinger, Stefan
Wave-front coding for increased depth of field of optical systems. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 110.2009, C31, insges. 2 S.

Wave-front Coding is used for increasing the depth of field of optical systems. We demonstrate the functionality by using a cubic phase plate. We present design considerations, the fabrication process of the refractive phase plate as well as experimental results with a specific focus on fabrication errors.



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Amberg, Martin; Grewe, Adrian; Cao, Jialan; Köhler, Michael; Sinzinger, Stefan
Planar integrated free-space optical fluorescence detector for micro fluidic applications. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 110.2009, C25, insges. 2 S.

Based on the planar integrated free space optical systems approach the design and manufacturing results of a fluorescence detector are presented. The system is fabricated by micro milling on a KUGLER microgantry® 5x milling machine. The fluorescence detector is designed for the integration into the segmented flow environment for pH-sensing in fluid segments.



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Burkhardt, Matthias; Dobschal, Hans-Juergen; Sinzinger, Stefan; Brunner, Robert
Imaging gratings for multiorder microspectrometers realized by interference lithography using supplementary holograms. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 110.2009, B31, insges. 2 S.

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Sabitov, Nail; Meinecke, Thomas; Sinzinger, Stefan;
Optimized image reconstruction in digital holography. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 110.2009, B30, insges. 2 S.

We present the results of our research in digital in-line holography and discuss some challenges of the numerical reconstruction. We address the theoretical basics and describe an innovative reconstruction algorithm. Finally, we present some ideas for improving the reconstruction quality and propose a method for the estimation of global particle distribution.



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Kleindienst, Roman; Stoebenau, Sebastian; Sinzinger, Stefan; Moeller, Lothar
Highly efficient beam shaping optics for compact THz imager. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 110.2009, A14, insges. 2 S.

We describe an efficient and compact THz illumination system and its fabrication technologies. The illumination system is part of a THz imager that can be used for detecting concealed weapons.



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Oeder, Andreas; Bauer, Carl; Sinzinger, Stefan
Simulation and optimization of the trapping efficiency in optical tweezers. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 110.2009, A6, insges. 2 S.

The system integration of optical tweezer setups introduces restrictions in terms of laser power and available space or demands extended working distances and trapping under special conditions. We present a simulation tool and design considerations for integrated optical micromanipulation.



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Kremin, Christoph; Oeder, Andreas; Schumacher, Jens T.; Grodrian, Andreas; Metze, Josef; Sinzinger, Stefan; Hoffmann, Martin
Integrierter mikrofluidischer Chip aus SU-8 zur elektrischen und optischen Manipulation biologischer Proben. - In: Technische Systeme für die Lebenswissenschaften, (2008), S. 209-213

Sinzinger, Stefan; Amberg, Martin; Oeder, Andreas; Hein, D.; Kremin, Christoph; Hoffmann, Martin; Metze, Josef; Grodrian, Andreas
Integrated micro-opto-fluidic systems for optical manipulation of cell cultures. - In: Optical micromanipulation by nonlinear nanophotonics, (2008), S. 33-34

Kelm, Andreas; Boerret, Rainer; Sinzinger, Stefan
Modeling of the polishing process for aspheric optics. - In: Optical fabrication, testing, and metrology III, ISBN 978-0-8194-7332-5, 2008, 71020H, insges. 6 S.

In the manufacturing process of aspheric glass lenses, the polishing step plays a key role with respect to the final quality of the lens as well as to the manufacturing costs. Due to the changing radius of curvature sub aperture tools are used for polishing aspherical lens elements. Even with small tools the changing radius has a significant influence to the wear function [1] [2]. This paper describes a method to calculate the removal based only on the surface shape and the material parameters of the tool. The described method can be used for any kind of surface, e.g. for freeform shapes.



Pätz, Daniel; Stoebenau, Sebastian; Sinzinger, Stefan
"Computational Imaging" zur Optimierung optischer Abbildungssysteme. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 109.2008, B1, insges. 2 S.

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Oeder, Andreas; Amberg, Martin; Kremin, Christoph; Grodrian, Andreas; Hoffmann, Martin; Metze, Josef; Sinzinger, Stefan
Optische Manipulation von Mikropartikeln in mikro-opto-fluidischen Systemen. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 109.2008, B27, insges. 2 S.

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Stoebenau, Sebastian; Amberg, Martin; Sinzinger, Stefan
Ultrapräzisionsgefertigte Freiformflächen für Anwendungen in planar integrierten optischen Systemen. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 109.2008, B25, insges. 2 S.

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Manske, Eberhard; Baitinger, Henner; Mastylo, Rostyslav; Doroshovets, Nataliya; Sinzinger, Stefan; Jäger, Gerd
Investigations for the improvement of optical edge detection with a laser focus probe. - In: Portrait - Faculty of Mechanical Engineering, (2008), insges. 4 S.
Publ. entstand im Rahmen der Veranst.: ICPM 2008

Stoebenau, Sebastian; Amberg, Martin; Sinzinger, Stefan
Ultraprecision micromilling of freeform optical elements for planar microoptical systems integration. - In: Micro-optics 2008, ISBN 978-0-8194-7190-1, 2008, 699207, insges. 6 S.

Sinzinger, Stefan; Amberg, Martin; Oeder, Andreas
Integrated micro-opto-fluidic systems for optical manipulation of cell cultures. - In: 4. Workshop "Chemische und biologische Mikrolabortechnik", (2008), insges. 2 S.

Sinzinger, Stefan; Amberg, Martin; Oeder, Andreas; Hein, D.
Integrated micro-opto-fluidic systems for optical manipulation of cell cultures. - In: Frontiers in optics, (2007), insges. 1 S.

https://doi.org/10.1364/FIO.2007.FWH4
Wippermann, Frank C.; Dannberg, Peter; Bräuer, Andreas; Sinzinger, Stefan
Improved homogenization of fly's eye condenser setups under coherent illumination using chirped microlens arrays. - In: MOEMS and miniaturized systems VI, ISBN 978-0-8194-6579-5, 2007, 64660R, insges. 9 S.

Wippermann, Frank C.; Zeitner, Uwe-D.; Dannberg, Peter; Bräuer, Andreas; Sinzinger, Stefan
Fly's eye condenser based on chirped microlens arrays. - In: Laser beam shaping VIII, 2007, 666309, insges. 10 S.

Oeder, Andreas; Amberg, Martin; Hands, Phil J. W.; Love, Gordon D.; Sinzinger, Stefan
Adaptive planar integrierte Freiraum-optische Systeme. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 108.2007, B20, insges. 2 S.

Planar integrierte Freiraum-optische Systeme sind für eine Vielzahl an Anwendungen sehr gut geeignet. Dazu gehören die optische Verbindungstechik und Sicherheitsanwendungen. Durch die Integration adaptiver Flüssigkristallelemente (LC-Elemente) können wir hier zum ersten Mal dynamische Funktionen in solchen mikrooptischen Systemen demonstrieren.



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Hagemann, Malte; Brinkmann, Matthias; Bonrad, Klaus; Voges, Frank; Ruths, Torsten; Bluhm, Maik; Michaelis, Dirk; Wächter, Christoph; Kudaev, Sergey; Sinzinger, Stefan
QLEDs for automotive lighting. - In: Proceedings of the 7th International Symposium on Automotive Lighting, (2007), S. 550-557

Hoffmann, Meike; Stoebenau, Sebastian; Teschke, Marcel; Sinzinger, Stefan
Holographic lithography for continuous-relief diffractive optical elements. - In: Information technology and electrical engineering - devices and systems, materials and technologies for the future, (2006), insges. 9 S.

Diffractive optical elements (DOE) offer new design flexibility for classical optics as well as for integrated microoptical systems. As the efficiency of those elements increases with the number of phase levels, the fabrication of elements with multiple phase levels or continuous profiles is necessary. The fabrication of multilevel diffractive structures requires multi-mask processing with several exposure-development-etching steps. In this case significant effort is necessary to align the masks accurately. - Alternatively grey-scale illumination can be applied for the fabrication of continuous phase profile elements. This is for example possible in holographic lithography through interferometric illumination. In this maskless approach the superposition of at least two coherent wavefronts (object and reference) leads to an intensity pattern which is used for the illumination of a photoresist layer. Thus the continuous phase profiles can be fabricated with a single exposure. - For this technique two main challenges have to be solved, i.e. the generation of arbitrary illumination patterns and their transfer into physical profiles. In holographic lithography the illumination pattern depends on the object wavefront which for arbitrary distributions can be generated e.g. by computer generated holograms (CGH). After illumination of the photoresist with such a grey-scale intensity pattern the resist processing has to be controlled precisely to generate analog profiles. The response of the resist to exposure depends on a variety of parameters such as the exposure wavelength, energy regime and the resist processing (temperature range, prebake, development conditions etc.). For applications in holographic lithography a linear response is desired. - We present the methods necessary for analyzing a resist-developer system with respect to its suitability for continuous-relief structures. Based on our results concerning the resist SX AR-P 3500/6, Allresist GmbH&hardcy; we show the fabrication of first components like sinusoidal phase gratings and Fresnel zone lenses.



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Sinzinger, Stefan; Amberg, Martin; Hofmann, Meike; Kreis, Olga; Mitschunas, Beate; Stoebenau, Sebastian; Teschke, Marcel
Holographic lithography for the fabrication of complex diffractive elements. - In: Proceedings of the ICO Topical Meeting on Optoinformatics/Information Photonics '2006, (2006), S. 53

Amberg, Martin; Oeder, Andreas; Hands, Phil J. W.; Love, Gordon; Sinzinger, Stefan
Tuneable planar integrated optical systems. - In: Frontiers in optics 2006, (2006), insges. 1 S.

Sinzinger, Stefan; Amberg, Martin; Baitinger, Henner; Eriksson, Emma; Enger, Jonas; Goksör, Matthias; Hanstorp, Dag
Integrated micro-optics for microfluidic systems. - In: Technische Systeme für Biotechnologie und Umwelt, (2006), S. 105-111

Wippermann, Frank C.; Radtke, Daniela; Zeitner, U.; Duparré, J. W.; Tünnermann, Andreas; Amberg, Martin; Sinzinger, Stefan; Reinhardt, C.; Ovsianikov, A.; Chichkov, B. N.
Fabrication technologies for chirped refractive microlens arrays. - In: Current developments in lens design and optical engineering VII, 2006, S. 62880O, insges. 10 S.

Sinzinger, Stefan;
Planar optics for the integration of microsystems with optical and fluidic functionality. - In: Abstracts, (2006), insges. 1 S.

Amberg, Martin; Sinzinger, Stefan
Efficient coupling mechanisms for planar integrated free space optical systems. - In: Maschinenbau von Makro bis Nano, 2005, [02.P.06], insges. 2 S.

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Richter, Wolfgang;
Zur Analyse und Dimensionierung perspektivischer Abbildungen. - In: Maschinenbau von Makro bis Nano, 2005, [02.P.02], insges. 8 S.
Parallel als CD-ROM-Ausg. erschienen

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Sinzinger, Stefan; Hendorfler, G.; Durilion, G.; Müller, T.
Planar integration of microoptical systems and its application to spectral imaging. - In: Hyperspectral data for new vision applications, (2005), S. 35-38

Amberg, Martin; Eriksson, Emma; Enger, Jonas; Goksör, Matthias; Hanstorp, Dag; Sinzinger, Stefan
Integrated micro-optics for microfluidic systems. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 106.2005, P33, insges. 2 S.

Within the field of biomedicine and life science microfluidic systems gain importance for a variety of applications. For testing the reaction of cells and bacteria to different chemicals it is possible to use optical tweezers for moving them between different reservoirs. However, when leaving the cells untrapped in the reservoirs they often adhere to the channel bottom and cannot be removed without damage. Keeping the objects in the trap for the whole experiment would be very time consuming. As an approach for making these experiments more efficient integrated microoptical elements can be used for generating a specific light distribution e.g. a set of focal points in the reservoirs. Within these foci the particles will be kept away from the walls of the reservoirs so that they can be removed easily. We present the concept, systems design as well as first experiments to evaluate the potential of this approach.



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Amberg, Martin; Mitschunas, Beate; Pätz, Daniel; Sinzinger, Stefan
Design considerations for integrated microoptical systems combining refractive and diffractive optical components. - In: Optical design and engineering II, 2005, S. 59622B, insges. 7 S.

Planar integrated microoptical systems have been demonstrated for a variety of applications such as optical interconnects, sensing and security applications. Diffractive optical elements provide the necessary design freedom to optimize the optical performance of such systems along the folded optical axis. For enhanced optical efficiency it is necessary to combine diffractive and refractive elements within such systems. Hereby the refractive components provide most of the optical power while the diffractive elements are used as correction elements for optimized system performance. The integration of refractive components has significant consequences on the geometry of planar integrated optical systems as well as on the optical systems design. Based on this approach we present various designs for efficient planar-optical (phase-contrast) imaging systems. We compare various possibilities for the simulation of diffractive and holographic optical components and their integration in the design of planar microoptical systems. To this end we apply commercial design software (e.g. Zemax, ASAP) as well as self programmed tools.



Amberg, Martin; Sinzinger, Stefan
Effizienter Koppelmechanismus für planar integrierte freiraumoptische Systeme. - In: Tagungsband, (2005), S. 89-95

Sinzinger, Stefan;
Mikrooptik zur Optimierung und Integration optischer Systeme. - In: Lux junior 2003, (2003), insges. 1 S.

Hehl, Karl; Hertzsch, Albrecht; Kröger, Knut; Truckenbrodt, Horst
Topography measurements of engineering surfaces with optical scatterometry. - In: Proceedings, (2002), S. 79-84

Richter, Wolfgang;
Formelsatz für die kollineare Abbildung in Pupillenkoordinaten. - In: 47. Internationales Wissenschaftliches Kolloquium, (2002), insges. 9 S.

Sinzinger, Stefan;
Microoptics for the optimisation and integration of optical systems. - In: Maschinenbau und Nanotechnik - Hochtechnologien des 21. Jahrhunderts, (2002), S. 393-394

Jahn, Rainer; Truckenbrodt, Horst
Methoden zur Schätzung fraktaler Parameter der Mikrogeometrie von Oberflächen. - In: 44. Internationales Wissenschaftliches Kolloquium, (1999), insges. 6 S.

Pichlmaier, Stephan; Hehl, Karl; Truckenbrodt, Horst
3D-Modellierung der Beugung und Streuung an technischen Oberflächen. - In: 44. Internationales Wissenschaftliches Kolloquium, (1999), insges. 6 S.

Hertzsch, Albrecht; Hammer, Ralf
Das streulichtoptische Defektmodell zur Bestimmung der Mikrotopografie von mechanisch bearbeiteten Halbleiter-Oberflächen. - In: 44. Internationales Wissenschaftliches Kolloquium, (1999), insges. 6 S.

Baumgart, Jörg; Truckenbrodt, Horst
Light scattering measurements on automotive surfaces. - In: 44. Internationales Wissenschaftliches Kolloquium, (1999), insges. 7 S.

Richter, Wolfgang; Mitschunas, Beate; Jahn, Rainer
Alternative Beschreibung der kollinearen Abbildung : ein methodischer Beitrag zur Dimensionierung optischer Abbildungen. - In: [Vortragsreihen, (1999), S. 153-158

Jakobs, Stefan; Duparré, Angela; Truckenbrodt, Horst
AFM and light scattering measurements of optical thin films for applications in the UV spectral region. - In: International journal of machine tools & manufacture, Bd. 38 (1998), 5/6, S. 733-739

Combination of atomic force microscopy and scattering measurements allows controlling the microstructure of substrates and optical thin films in the nanometer scale and of surface homogeneity over large areas. Results are presented of measurements on superpolished and conventionally polished substrates as well as on thin film fluoride coatings, demonstrating the capabilities of these measurement techniques.



https://doi.org/10.1016/S0890-6955(97)00125-9
Bischoff, Jörg; Truckenbrodt, Horst
New optical method for the measurement of sub-quarter-micron patterns in microtechnology. - In: Proceedings, (1998), S. 209-214

Bischoff, Jörg; Hehl, Karl
Single feature metrology by means of light scatter analysis. - In: Metrology, inspection, and process control for microlithography XI, (1997), S. 574-585

Bischoff, Jörg; Truckenbrodt, Horst; Bauer, Joachim
Diffraction analysis based characterization of very fine gratings. - In: Micro-optical technologies for measurement, sensors, and microsystems II and optical fiber sensor technologies and applications, (1997), S. 212-222

Baumgart, Jörg; Truckenbrodt, Horst
Determination of the stochastic parameters of machined surfaces by scattered light. - In: Progress in precision engineering and nanotechnology, (1997), S. 199-201

Richter, Wolfgang;
Geometrische Optik und das Verhlten lichttechnischer Größen. - In: Tagungsberichte, (1997), S. 43-50

Baumgart, Jörg; Bischoff, Jörg; Truckenbrodt, Horst
Untersuchung von Mikrostrukturen und Riefentexturen mit Streulicht. - In: Kongreßband, (1996), S. 179-184

Bischoff, Jörg; Baumgart, Jörg W.; Truckenbrodt, Horst; Bauer, Joachim J.
Photoresist metrology based on light scattering. - In: Metrology, inspection, and process control for microlithography X, (1996), S. 678-689

Bischoff, Jörg; Baumgart, Jörg W.; Bauer, Joachim J.; Truckenbrodt, Horst
Light scattering based micrometrology. - In: Specification, production, and testing of optical components and systems, (1996), S. 251-262

Richter, Wolfgang; Jahn, Rainer
Geometrisch-optische Theorie zur Messung von Körpern im Durchlicht. - In: Vortragsreihen, (1996), S. 556-561

Truckenbrodt, Horst; Baumgart, Jörg; Bischoff, Jörg
Die Prüfung der Mikrotopografie von determinierten und stochastischen Oberflächen mit Streulicht. - In: Vortragsreihen, (1996), S. 543-549

Gerlach, Torsten; Enke, Daniel; Frank, Thomas; Hutschenreuther, Lutz; Schacht, Hans-Joachim; Schüler, Ralf
Mikromechanische selbstregelnde Kopplung von Monomode-Lichtwellenleitern. - In: Vortragsreihen, (1996), S. 133-138

Bischoff, Jörg; Baumgart, Jörg; Truckenbrodt, Horst
Streulichtverfahren in der Mikromeßtechnik. - In: 1. Ilmenauer Symposium Mikrosystemtechnik, 16./17. November 1995, (1995), S. 73-79

Hertzsch, Albrecht; Hammer, Ralf; Truckenbrodt, Horst
Streulichtuntersuchungen zur kristallographischen Orientierungsbestimmung mechanisch bearbeiteter Galiumarsenidoberflächen. - In: Vortragsreihen, (1995), S. 778-783

Bischoff, Jörg; Baumgart, Jörg; Mitschunas, Beate; Truckenbrodt, Horst
Light scattering based micrometrology. - In: Vortragsreihen, (1995), S. 772-777

Rothe, Hendrik; Truckenbrodt, Horst
High precision laser triangulation by speckle decorrelation. - In: Laser in der Technik, (1994), S. 223-226

Mitschunas, Beate; Richter, Wolfgang;
Rechnerunterstützte Modellierung der kollinearen Abbildung. - In: Tendenzen in der Entwicklung, Konstruktion und Anwendung der Feinwerktechnik und Mikrotechnik, (1993), S. 411-415

Bischoff, Jörg; Glaubitz, Ulrich; Haase, Norbert
New method of topography simulation in photolithography. - In: Optical/laser microlithography V, (1992), S. 423-434

Mitschunas, Beate;
PARAX - Programm zur paraxialen Dimensionierung, Manipulation und Analyse rotationssymmetrischer optischer Systeme. - In: Projekte "Neue Bundesländer", 1992, S. 159-160a, insges. 3 S.
Richtiger Name des Verf.: Thomas Hahnemann

Jahn, Rainer; Schuster, Norbert
Algorithmus zur Berechnung der PST-Funktion. - In: Internationales wissenschaftliches Kolloquium / Technische Hochschule Ilmenau, ISSN 0374-3365, Bd. 34 (1989), 3, S. 207-210

Schuster, Norbert;
Strahldurchrechnung durch glatte Sonderflächen. - In: Internationales wissenschaftliches Kolloquium / Technische Hochschule Ilmenau, ISSN 0374-3365, Bd. 31 (1986), 3, S. 219-222

Richter, Wolfgang;
Synthese und Vergleich von Pyrometeroptik für ß'=-1. - In: Internationales wissenschaftliches Kolloquium / Technische Hochschule Ilmenau, ISSN 0374-3365, Bd. 31 (1986), 3, S. 207-210

Glaubitz, Ulrich;
Optische Systeme mit Hologrammspiegeln. - In: Vorträge der 15. Frühjahrsschule Optik, (1983), S. 171-172

Glaubitz, Ulrich;
Bildfehlertheorie 3. Ordnung zur Synthese optischer Systeme mit Hologrammlinsen. - In: Vorträge der 14. Frühjahrsschule Optik, (1982), S. 125-126

Haferkorn, Heinz;
Forderungen an die Kennzahlen optischer Gläser aus der Synthese optischer Systeme. - In: Vorträge der 13. Frühjahrsschule Optik, (1981), S. 6-9

Marinow, Nikolay;
Objektive Prüfung von Mikroobjektiven. - In: Internationales wissenschaftliches Kolloquium / Technische Hochschule Ilmenau, ISSN 0374-3365, Bd. 25 (1980), 5, S. 45-48

Richter, Wolfgang; Tautz, Volker
Zur Theorie der Optimierung optischer Systeme mit Berücksichtigung von Toleranzen. - In: Vortragssammelband der 3. Fachtagung Rechnergestützte Optimierung, [Karl-Marx-Stadt, 18. bis 20.5.1977], (1977), S. 77-81

Reschke, Elke;
Optische Abbildung mit Gaußschen Bündeln. - In: Internationales wissenschaftliches Kolloquium / Technische Hochschule Ilmenau, ISSN 0374-3365, Bd. 22 (1977), 5, S. 159-162

Richter, Wolfgang;
Zur analytischen Bewertung optischer Systeme. - In: Internationales wissenschaftliches Kolloquium / Technische Hochschule Ilmenau, ISSN 0374-3365, Bd. 19 (1974), 4, S. 85-90

Haferkorn, Heinz;
Zur Klassifikation optischer Systeme. - In: Internationales wissenschaftliches Kolloquium / Technische Hochschule Ilmenau, ISSN 0374-3365, Bd. 19 (1974), 4, S. 82-84

Haferkorn, Heinz;
Die Fouriertheorie der optischen Abbildung. - In: Feingerätetechnik, ISSN 0014-9683, Bd. 22 (1973), 12, S. 567-571

Eichler, Wolfgang; Haferkorn, Heinz
Die Berechnung der polychromatischen Übertragungsfunktion für konkrete optische Systeme. - In: Feingerätetechnik, ISSN 0014-9683, Bd. 22 (1973), 10, S. 457-461