Konferenzbeiträge

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Weigel, A.; Grewe, Adrian; Hoffmann, Martin
Design und Fertigung eines optofluidischen Messsystems zur kapnometrischen Überwachung. - In: MEMS, Mikroelemente, Systeme, (2015), S. 218-221

Leopold, Steffen; Pätz, Daniel; Sinzinger, Stefan; Hoffmann, Martin
Das Technische Auge - dreidimensionale Abtastung des Objektraums. - In: MEMS, Mikroelemente, Systeme, (2015), S. 73-76

The photoluminescence intensity of group III nitrides, nanowires, and heterostructures (NWHs) strongly depends on the environmental H2 and O2 concentration. We used this opto-chemical transducer principle for the realization of a gas detector. To make this technology prospectively available to commercial gas-monitoring applications, a large-scale laboratory setup was miniaturized. To this end the gas-sensitive NWHs were integrated with electro-optical components for optical addressing and read out within a com-pact and robust sensor system. This paper covers the entire realization process of the device from its conceptual draft and optical design to its fabrication and assembly. The applied approaches are verified with intermediate results of profilometric characterizations and optical performance measurements of subsystems. Finally the gas-sensing capabilities of the integrated detector are experimentally proven and optimized.



Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin
2D stepping microdrive for hyperspectral imaging. - In: Smart sensors, actuators, and MEMS VII; and cyber physical systems, 2015, 95170K, insges. 10 S.

Bichra, Mohamed; Chandra, Schakher; Khan, Gufran Sayeed; Burada, Daliramu; Sinzinger, Stefan; Pant, Kamal
Investigations on sub-aperture stitching approach for testing freeform optics. - In: Optica, 2015, paper JT5A.12

http://dx.doi.org/10.1364/AOMS.2015.JT5A.12
Sinzinger, Stefan;
Freeform and array elements for tunable optics applications. - In: Freeform optics, ISBN 978-1-943580-00-2, (2015), insges. 1 S.

http://dx.doi.org/10.1364/FREEFORM.2015.FW4B.2
Zürbig, Verena; Pätz, Daniel; Fries, J.; Bichra, Mohamed; Pletschen, Wolfgang; Holc, Katarzyna; Reusch, M.; Nebel, Christoph E.; Sinzinger, Stefan; Ambacher, Oliver; Lebedev, Vadim
Tunable multisegment Si x N y /AlN piezo lenses for wavefront correction. - In: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), ISBN 978-1-4799-8956-0, (2015), S. 2045-2048

A combined layer structure of aluminium nitride (AIN) and silicon niride (SiN) enables the facrication of multisegment piezo-actuated micro lenses with a percise control of the lens surface. It is demonstrated that these micro lenses offer free asheric deformation of the lens surface and can operate at high repetition rates along with reproducible and precise tunability. The AIN / SiN micro lenses are highly advantageous to be used as wave front filter or for fast focus correction.



http://dx.doi.org/10.1109/TRANSDUCERS.2015.7181358
Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin
Two-dimensional stepping drive for hyperspectral systems. - In: MME 2014 - Istanbul, (2014), insges. 4 S.

Schurig, Florian; Bichra, Mohamed; Bichra, Mohamed *1981-*; Sinzinger, Stefan;
Method and apparatus for detecting the surface shape of reflective freeform optics. - In: Frontiers in optics, 2014, FW5A.3

http://dx.doi.org/10.1364/FIO.2014.FW5A.3
Kampmann, Ronald; Sinzinger, Stefan
Analysis of the influence of manufacturing and alignment related errors on an optical tweezer system. - In: International Optical Design Conference 2014, 2014, 92930D, insges. 8. S.

In this work we present the design process as well as experimental results of an optical system for trapping particles in air. For positioning applications of micro-sized objects onto a glass wafer we developed a highly efficient optical tweezer. The focus of this paper is the iterative design process where we combine classical optics design software with a ray optics based force simulation tool. Thus we can find the best compromise which matches the optical systems restrictions with stable trapping conditions. Furthermore we analyze the influence of manufacturing related tolerances and errors in the alignment process of the optical elements on the optical forces. We present the design procedure for the necessary optical elements as well as experimental results for the aligned system.



Cu-Nguyen, Phuong-Ha; Grewe, Adrian; Sinzinger, Stefan; Zappe, Hans; Seifert, Andreas
Imprinted DOE on varifocal membrane lens. - In: 2014 International Conference on Optical MEMS and Nanophotonics (OMN), ISBN 978-1-4799-3737-0, (2014), S. 21-22

We present a highly compact, fully integrated tunable lens for confocal hyperspectral imaging with imprinted diffractive structures on a polydimethylsiloxane (PDMS) membrane. The PDMS membrane was patterned by replication technique with a diffractive optical element (DOE) on quartz glass as master mold. The smallest feature size is 0.8 [my]m the membrane thickness is 100 my]m. The liquid-filled lens is hydraulically driven by integrated magnetic actuation and serves as a tunable filter in the spectral range of 450-900 nm with a linewidth less than 18 nm over the entire tuning range.



http://dx.doi.org/10.1109/OMN.2014.6924519