Investigations on long-range AFM scans using a nanofabrication machine (NFM-100). - In: Proceedings, ISSN 2504-3900, Volume 56 (2020), issue 1, 34, Seite 1-3
The focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used especially for field-emission scanning probe lithography (FESPL). The NFM-100 has a positioning range of Ø 100 mm, which offers, in combination with the tip-based measuring system, the possibility to analyse structures over long ranges. Using different gratings, the accuracy and the reproducibility of the NFM-100 and the AFM-system will be shown.
https://doi.org/10.3390/proceedings2020056034
Phase-modulated standing wave interferometer. - In: Proceedings, ISSN 2504-3900, Volume 56 (2020), issue 1, 12, Seite 1-3
Standing wave interferometers (SWIs) show enormous potential for miniaturization because of their simple linear optical set-up, consisting only of a laser source, a measuring mirror and two standing wave sensors for obtaining quadrature signals. To reduce optical influences on the standing wave and avoid the need for an exact and long-term stable sensor-to-sensor distance, a single-sensor set-up was developed with a phase modulation by forced oscillation of the measuring mirror. When the correct modulation stroke is applied, the harmonics in the sensor signal can be used for obtaining quadrature signals for phase demodulation and direction discrimination.
https://doi.org/10.3390/proceedings2020056012
Modulation-based long-range interferometry as basis for an optical two-color temperature sensor. - In: Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, (2020), S. 299-300
Corner loading and its influence on the tilt sensitivity of precision weighing cells. - In: Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, (2020), S. 95-98
Towards a table-top Kibble balance for E1 mass standards in a range from 1 mg to 1 kg - Planck-Balance 1 (PB1). - In: 2020 Conference on Precision Electromagnetic Measurements (CPEM), (2020), insges. 2 S.
https://doi.org/10.1109/CPEM49742.2020.9191883
Operational measurement uncertainty and Bayesian probability distribution. - In: SMSI 2020, (2020), S. 275-276
Richtiger Name des 3. Verfassers: Klaus-Dieter Sommer
Fundamentals of dynamic sensor positioning with nanoscale accuracy by an inverse kinematic concept. - In: SMSI 2020, (2020), S. 307-308
A recent challenge in measurement science is the growing demand for machines allowing nanoscale positioning and measuring in large volumes. The moving stage principle typically used for these applications needs to be altered, considering the mass of the moving stage growing with the measuring volume. This paper proposes an inverted kinematic concept and discusses two approaches to the reconstruction of mirror profiles to compensate for deviations in the mirror topographies.
Structural and local electronic properties of clean and Li-intercalated graphene on SiC(0001). - In: DPG-Frühjahrstagung (DPG Spring Meeting) of the Condensed Matter Section (SKM) together with the DPG Division Environmental Physics and the Working Groups Accelerator Physics; Equal Opportunities; Energy; Industry and Business; Physics, Modern IT and Artificial Intelligence, Young DPG, (2020), O 80.3
Excitation frequency dependent deviations during the "Velocity Mode" of BL measurements in the Planck-Balance. - In: Electrical and electronic measurements promote industry 4.0, (2020), S. 198-202
Amplitude estimation using three-parameter sine fitting algorithm in the Planck-Balance. - In: Electrical and electronic measurements promote industry 4.0, (2020), S. 77-80