Nanopositioning and -fabrication using the Nano Fabrication Machine with a positioning range up to Ø 100 mm. - In: Novel Patterning Technologies 2021, (2021), S. 1161016-1-1161016-10
This paper focuses on a new Nano Fabrication Machine 100 (NFM-100) with a working range up to 100 mm in diameter and its integrated tip-based system, which can be used as an Atomic Force Microscope (AFM) as well as for Field-Emission-Scanning-Probe-Lithography (FESPL). The combination of both systems offers the possibility to fabricate and analyze micro- and nanostructures with high resolution and precision down to a single nanometer over a large area in one single configuration without tool or sensor change. After the description of the basic machine structure of the NFM-100, the demonstration of long range and large area AFM scans in combination with the NFM-100 will be shown. Additionally, the basic functionality of the FESPL manufacturing process is presented.
https://doi.org/10.1117/12.2583703
Conceptual design of a microscale balance based on force compensation. - In: Microactuators, microsensors and micromechanisms, (2021), S. 103-114
Macroscopic electromagnetic force compensation (EMFC) balances are well established but were not yet demonstrated within microsystems. Hence, in this paper, the concept and the design of a micro fabricated force compensation balance is presented. The implemented concentrated compliance mechanism in form of flexure hinges enables motion with high precision, which is combined with a force compensation mechanism. The concept of force compensation promises a high measurement range, which is expected to be up to 0.5 mN, while still enabling a high resolution of less than 8 nN. The developed dynamic model of the miniaturized balance is used for the design of a PID-controller strategy. Here, continuous and time-discrete controller approaches are compared. The time-discrete controller with realistic delay times, leads to an accuracy of the controller, which is better than the expected accuracy of the integrated capacitive position sensor.
https://doi.org/10.1007/978-3-030-61652-6_9
An electrothermally actuated membrane as oscillating pinhole for the high-frequent modulation of light. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 121 (2020), B37, insges. 2 S.
We present theory, processing steps and first results for a thermally actuated Aluminiumnitride-Platinum membrane with a resonant frequency of the first mode at around 100 kHz and resonant displacements at its center of around 30 µm. The radial-symmetric membrane is broadband opaque for wavelengths from visual light and beyond. An exception is a small pinhole of various diameters below 3 µm in its center. Through thermally induced asymmetric stress inside the multilayer, the clamped membrane bends out. The pinhole in its center will be displaced parallel to the optical axis.The intended use for such a membrane is to replace the traditional confocal pinhole in the detection path of a microscope. Applying a stable known resonant modulation on an acquired signal enables a lock-in principle for a differential confocal depth sensing as shown in [1]. The advantage over the employed tunable acoustic gradient lens (TAG lens) there, is the reduced size, the simplicity of the arrangement and constant illumination properties on the sample.
https://nbn-resolving.org/urn:nbn:de:0287-2020-B037-6
Generation of static and dynamic small calibration forces and their measurements by electromagnetic force compensation balance. - In: Acta IMEKO, ISSN 2221-870X, Bd. 9 (2020), 5, S. 113-117
The paper presents some of the results of the static and dynamic force measurements at 100 nN to sub-10 [my]N ranges which are generated due the photon-momentum. The force sensor with resolution about 20 nN and operating in differential measurement mode is developed by two electromagnetic force compensation balances. In order to generate these calibration forces, CW lasers with different operational modes, power levels, and wavelengths are used. Multi-reflection configuration of the laser beam inside the macroscopic cavity with highly reflective mirrors are used to test and variate the total amount of the forces.
https://doi.org/10.21014/acta_imeko.v9i5.951
Error sources in the force mode of the "PB2" Planck-Balance. - In: Acta IMEKO, ISSN 2221-870X, Bd. 9 (2020), 5, S. 53-57
The PB2 Planck-Balance is a table-top Kibble balance, that is designed for the calibration of class E2 weights in a range of 1 mg up to 100 g. This work presents typical systematic errors which have to be considered during the calibration and will show results for measurements with small masses.
https://doi.org/10.21014/acta_imeko.v9i5.938
Influences on amplitude estimation using three-parameter sine fitting algorithm in the velocity mode of the Planck-Balance. - In: Acta IMEKO, ISSN 2221-870X, Bd. 9 (2020), 3, S. 40-46
The Planck-Balance is a table-top version of a Kibble balance. In contrast to many other Kibble balances, the coil is moved sinusoidally and an ac rather than a dc signal is generated in the velocity mode. The three-parameter sine fitting algorithm is applied to estimate the amplitudes of the induced voltage and the coil motion, which are used to determine the force factor Bl of the voice coil of the electromagnetic force compensation balance. However, the three-parameter sine fitting algorithm is not robust against some perturbations, e.g. additive Gaussian white noise, quantization error, harmonic distortion, frequency error and time jitter. These effects have influences on the accuracy of the amplitude estimation. Based on numerical simulations and correlation analyses, the effects of these perturbations are determined. By optimizing measurement and data processing approach, the bias and standard deviation of the estimated amplitude can be effectively reduced, and thus the accuracy of the force factor Bl in the velocity mode can be improved.
https://doi.org/10.21014/acta_imeko.v9i3.781
Investigations on nonlinear deformation phenomena in a force calibration system. - In: Acta IMEKO, ISSN 2221-870X, Bd. 9 (2020), 5, S. 150-155
Previous investigations show, in force calibration and measurement systems that are based on electromagnetic force compensation (EMFC), deformations of the flexure hinges can cause significant contributions to the uncertainty of the system. A Simulink model of the Planck-Balance 2 (PB2) is established in MATLAB according to the CAD model. The results are compared to simplified analytical models and the results obtained from measurement.
https://doi.org/10.21014/acta_imeko.v9i5.958
Planck-Balance 1 (PB1) - a table-top Kibble balance for masses from 1 mg to 1 kg - current status. - In: Acta IMEKO, ISSN 2221-870X, Bd. 9 (2020), 5, S. 47-52
The Planck-Balance 1 (PB1) has been developed in a collaboration between the Physikalisch- Technische Bundesanstalt and the Technische Universität Ilmenau. It is a small-size Kibble balance aimed to calibrate E1 mass standards for a mass range from 1 mg to 1 kg. This paper presents its principle and some preliminary investigations.
https://doi.org/10.21014/acta_imeko.v9i5.937
Alternative tip- and laser- based nanofabrication up to 100 mm on flat and non-flat surfaces with subnanometre precision. - In: IWAPS 2020, (2020), insges. 4 S.
https://doi.org/10.1109/IWAPS51164.2020.9286793
Holistic calibration of screw threads based on a three-dimensional approach :
Ganzheitliche Kalibrierung von Gewinden auf Basis eines dreidimensionalen Ansatzes. - In: Technisches Messen, ISSN 2196-7113, Bd. 87 (2020), S. S16-S21
Gewinde sind Maschinenelemente mit vielseitiger Funktionalität. Sie werden zum Befestigen, Verbinden, Abdichten oder Zentrieren verwendet und in großen Stückzahlen hergestellt. Dabei steigen die Anforderungen an die Fertigung und Qualitätssicherung stetig an. Nach aktuellen Normen und Richtlinien erfolgt die Prüfung der Bestimmungsgrößen an Gewinden stichprobenartig in wenigen festgelegten Axialschnitten und Prüfebenen. Die komplex geformten und stark gekrümmten Werkstückoberflächen von Gewindeflanken werden deshalb hinsichtlich ihrer Funktionalität unzureichend bewertet. Das neuartige Messverfahren basiert auf einem dreidimensionalen mathematischen Modell zur Beschreibung der Gewindegeometrie. Die Aufnahme der Messpunkte als Ist-Punktewolke erfolgt durch eine flächenhafte Messstrategie auf konventionellen Koordinatenmessgeräten. Der anschließende ganzheitliche Auswertealgorithmus ermöglicht erstmals die Bestimmung aller relevanten Bestimmungsgrößen am Gewinde auf Basis eines einzigen Datensatzes. Des Weiteren liefert der neue Auswertealgorithmus erstmals ein Ergebnis für die lokalen Bestimmungsgrößen, welche zur Berechnung des Paarungsflankendurchmessers benötigt werden.
https://doi.org/10.1515/teme-2020-0035