Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers. - In: Journal of sensors and sensor systems, ISSN 2194-878X, Bd. 9 (2020), 1, S. 71-78
https://doi.org/10.5194/jsss-9-71-2020
Mix-and-match lithography and cryogenic etching for NIL template fabrication. - In: Microelectronic engineering, Bd. 224 (2020), 111234
https://doi.org/10.1016/j.mee.2020.111234
Development of software and hardware for the method of rehabilitation of patients with obliteration of atherosclerosis of the limb vessels :
Rozroblennja programno-aparatnogo zabezpečennja dlja metodu reabilitaciji chvorich obliterujučym aterosklerozom cudyn kincivok. - In: Measuring Equipment and Metrology, ISSN 2617-846X, Bd. 80 (2019), 1, S. 24-26
The theme of the project proposal relates to scientific research in the field of health care and medical technologies on the basis of the further development and implementation of hardware software, smart sensors, the technique of processing, normalizing and applying of information signals for the creation of means for adjusting the physiological state of the human body by the electro stimulation, agreed in real-time mode with cardiac rhythm. Interest in this topic is due to the manifestation of increasing the duration of the active period in the lives of a number of dangerous diseases, which, in the first place, include diseases of the cardiovascular system. Often, the cause of such diseases is age-related changes, as well as non-future behavior and human habits: smoking, lack of physical activity, unhealthy eating and excessive alcohol. Changing behavior, a person can also reduce the risk of cardiovascular disease.
https://doi.org/10.23939/istcmtm2019.01.024
Thermoelectric materials science and nanotechnology : practice and theory
Termoelektryčne materialoznavstvo i nanotechnologiji : praktyka ta teorija. - In: Measuring Equipment and Metrology, ISSN 2617-846X, Bd. 80 (2019), 2, S. 30-40
Progress in the field of thermoelectricity requires the further development of material science deep into the substance through the use of the achievements of applied and theoretical advances in nanotechnologies, including nanothermodynamics. This enables to expand the range of current thermodynamic forces, taking into account the forces inherent in nanostructured substances, and to increase the efficiency of attracting the concept of eddy thermoelectric currents in order to increase the accuracy of temperature measurement by thermoelectric sensors. The researches of materials of thermoelectric sensors have not only included not only the study of the stability of thermoelectric sensors, but their study by their methods of non-destructive acoustic control. This makes it possible to assess and develop the role of specific mechanisms for the formation of eddy thermoelectric currents in the drift of thermoelectric power.
https://doi.org/10.23939/istcmtm2019.02.030
Challenges of temperature measurement during the friction stir welding process :
Herausforderungen der Temperaturmessung während des Rührreibschweißprozesses. - In: Technisches Messen, ISSN 2196-7113, Bd. 86 (2019), 12, S. 765-772
https://doi.org/10.1515/teme-2019-0108
Nanopositioning and nanomeasuring machines. - In: Metrology, (2019), S. 1-23
Living reference work entry, first online: 04 January 2019
https://doi.org/10.1007/978-981-10-4912-5_2-1
Photon momentum induced precision small forces: a static and dynamic check. - In: Measurement science and technology, ISSN 1361-6501, Volume 30 (2019), number 10, 105004, Seite 1-11
Practical means of generation and calibration of the small precision forces in static and dynamic regimes around 1 Hz by the usage of radiation pressure effect from 1 W continuous wave visible (diode) laser light is presented. The additive effect of the transfer of photon momentum, caused by non-overlapping multiply reflecting laser beam locked within a quasi-passive and/or active macroscopic cavity system, is employed. The effective laser power (partially trapped experimentally) is amplified, such that the optically generated forces are increased from hundreds of pN to sub-N level. The results presented in this paper should be seen as a means for extending the edge of practically verifiable lower limits of SI-traceable force metrology.
https://doi.org/10.1088/1361-6501/ab257e
Temperature dependence of dynamic parameters of contact thermometers. - In: Sensors, ISSN 1424-8220, Bd. 19 (2019), 10, 2299, insges. 9 S.
https://doi.org/10.3390/s19102299
Tip-based nano-manufacturing and -metrology. - In: Journal of vacuum science & technology, ISSN 2166-2754, Bd. 37 (2019), 3, S. 030803, insges. 9 S.
Sub-5 nm lithography and metrology are the key technologies for more CMOS and beyond CMOS nanoelectronics. To keep up with scaling down of nanoelectronic components, novel instrumentation for nanometer precise placement, overlay alignment, and measurement are essential to enable fabrication of next generation nanoelectronic systems. In particular, scanning probe microscopy (SPM) based methods for surface modification and measurement are the emerging techniques for producing and testing of sub-5 nm features. In this article, the authors demonstrate nanoscale lithography and coordinate metrology technologies, both being based on SPM methodology. Scanning probes with a piezoresistive deflection read-out and an integrated deflection actuator, later on referred to as the active piezoresistive cantilevers, were used for lithography employing field emission patterning. They were also integrated with the so-called nanomeasuring machine (NPM) andused for surface imaging, which made it possible to measure the structure dimensions in the 25 × 25 × 5 mm^3 space with 0.1 nm resolution and great accuracy. The basic NPM concept relies on a unique arrangement, enabling the so-called Abbe error-free measurements in all axes over the total scan range. The combination of the active piezoresistive cantilevers and NPM technologies makes it possible to store the exact location on the investigated surface, which can be found again with an accuracy of less than 2.5 nm. This system is also predestinated for the critical dimension, quality, and overlay control.
https://doi.org/10.1116/1.5083044
Torsion balance-based system for high-precision force measurement in horizontal plane: part II. Static and dynamic improvement. - In: Measurement science and technology, ISSN 1361-6501, Volume 30 (2019), 5, 055104, Seite 1-9
https://doi.org/10.1088/1361-6501/ab05aa