Effect of poly-crystallinity on the magnetoelectric behavior of TiN/AlN/Ni MEMS cantilevers investigated by finite element methods. - In: Physica status solidi, ISSN 1862-6319, Bd. 220 (2023), 16, 2200839, S. 1-6
Herein, magnetoelectric microelectromechanical system (MEMS) cantilevers are investigated on basis of a TiN/AlN/Ni laminate derived from experimental sensors using finite-element simulations. With the anisotropic ΔE effect as an implication of the magnetocrystalline anisotropy, the lateral sensitivity of the sensor is studied for different nickel layer thicknesses and boundary conditions. It is found that above 60% of the cantilever length, the nickel is effectively not contributing to the sensor sensitivity anymore which is supported by the investigation of sensors with partial nickel coverage. The boundary condition of the magnetostrictive layer is found to affect the sensitivity of thick layers while it is negligible for thinning layers. Further investigations on basis of polycrystalline untextured nickel with slightly preferred orientations reveal a stronger effect on thin layers than on thicker ones. It is found to arise from relatively large crystals in the high-sensitivity region near the clamping of the sensor. For thicker polycrystalline layers, the ΔE effect reproduces a characteristic based mainly on the (110) and (111) orientations while the (100) orientation appears to be underrepresented.
https://doi.org/10.1002/pssa.202200839
The angle dependent ΔE effect in TiN/AlN/Ni micro cantilevers. - In: Sensors and actuators, ISSN 1873-3069, Bd. 345 (2022), 113784, S. 1-12
In this work, magnetoelectric MEMS sensors based on a TiN/AlN/Ni laminate are investigated for the first time in regards of the anisotropic elastic properties when using hard magnetic Nickel as magnetostrictive layer. The implications of crystalline, uniaxial and shape anisotropy are analysed arising from the anisotropic ΔE effect in differently oriented cantilevers with 25 µm length and 15˚ spacing. The ΔE effect is derived analytically to consider the angular dependency of the different anisotropies within the sensors. In the measured frequency spectra complex profiles are observable consisting of contributions from neighbouring structures which are connected by a common electrode. The crosstalk effect is strongly depending on the cantilever orientation and reflects the anisotropic mechanical properties of the material stack. The intensity of the crosstalk effect is increasing for shortened cantilevers and narrowing distance between structures. The ΔE effect is investigated based on cantilevers of different angular spacing and of a single cantilever that is rotated in the magnetic field. The derived peak sensitivities are reaching values of 1.15 and 1.31T-1. The angular dependency of the sensitivity is found to be approximately constant for differently oriented cantilevers. In contrast, for a singly rotated cantilever an angular dependency of the 4th order is observed.
https://doi.org/10.1016/j.sna.2022.113784
Anisotropy of the ΔE effect in Ni-based magnetoelectric cantilevers: a finite element method analysis. - In: Sensors, ISSN 1424-8220, Bd. 22 (2022), 13, 4958, S. 1-16
In recent investigations of magnetoelectric sensors based on microelectromechanical cantilevers made of TiN/AlN/Ni, a complex eigenfrequency behavior arising from the anisotropic ΔE effect was demonstrated. Within this work, a FEM simulation model based on this material system is presented to allow an investigation of the vibrational properties of cantilever-based sensors derived from magnetocrystalline anisotropy while avoiding other anisotropic contributions. Using the magnetocrystalline ΔE effect, a magnetic hardening of Nickel is demonstrated for the (110) as well as the (111) orientation. The sensitivity is extracted from the field-dependent eigenfrequency curves. It is found, that the transitions of the individual magnetic domain states in the magnetization process are the dominant influencing factor on the sensitivity for all crystal orientations. It is shown, that Nickel layers in the sensor aligned along the medium or hard axis yield a higher sensitivity than layers along the easy axis. The peak sensitivity was determined to 41.3 T−1 for (110) in-plane-oriented Nickel at a magnetic bias flux of 1.78 mT. The results achieved by FEM simulations are compared to the results calculated by the Euler-Bernoulli theory.
https://doi.org/10.3390/s22134958
Structural analysis of sputtered Sc(x)Al(1-x)N layers for sensor applications. - In: Materials science and smart materials, (2020), S. 13-18
Structure and dielectric function tensor of (Al,Sc)N thin films. - In: DPG-Frühjahrstagung (DPG Spring Meeting) of the Condensed Matter Section (SKM) together with the DPG Division Environmental Physics and the Working Groups Accelerator Physics; Equal Opportunities; Energy; Industry and Business; Physics, Modern IT and Artificial Intelligence, Young DPG, (2020), HL 30.29
Automated parameter extraction of ScAlN MEMS devices using an extended Euler-Bernoulli beam theory. - In: Sensors, ISSN 1424-8220, Bd. 20 (2020), 4, 1001, insges. 19 S.
https://doi.org/10.3390/s20041001
Investigation of ScAlN for piezoelectric and ferroelectric applications. - In: 2019 22nd European Microelectronics and Packaging Conference & Exhibition (EMPC), (2019), insges. 5 S.
https://doi.org/10.23919/EMPC44848.2019.8951824
Untersuchung von ScAlN für piezoelektrische und ferroelektrische Anwendungen. - In: MikroSystemTechnik Kongress 2019, (2019), S. 412-416
Spectroscopic characterization of sputtered ScAlN thinfilms. - In: DPG-Frühjahrstagung 2019 (DPG Spring Meeting 2019) of the Condensed Matter Section (SKM) together with the Division Radiation and Medical Physics and the Working Groups Equal Opportunities, Industry and Business, Young DPG; Symposia, exhibition of scientific instruments and literature, (2019), HL 35.6
Digitalisierung in der Studieneingangsphase: Visualisierung von physikalischen Experimenten mit Applets. - In: Digitalisierung in der Techniklehre, (2017), S. 277-282