Konferenzbeiträge 2021
- Ortlepp, I.; Fern, F.; Schienbein, R.; Supreeti, S.; Füßl, R.; Theska, R.; Sinzinger, S.; Manske, E.:
Traceable 5D-nanofabrication with nano positioning and nano measuring machines
In Proceedings of the 21st International Conference of the European Society for Precision Engineering and Nanotechnology / European Society for Precision Engineering and Nanotechnology International Conference & Exhibition 21. June 2021 Online. - Bedford, UK : euspen, 2021. - Mohr-Weidenfeller, L.; Gropp, S.; Azizy, R.; Müller, B.; Bucklitsch, P.; Müller, J.; Strehle, St.:
Evaluation of a low-temperature fabrication technology for silicon-ceramic-composite-substrates
In MikroSystemTechnik Kongress 2021, S. 392-395 - Schulz, A.; Bartsch, H. Gutzeit, N.; Matthes, S.; Glaser, M.; Ruh, A.; Müller, J.; Schaaf, P.; Bergmann, J.-P.; Wiese, St.: Characterization of reactive multilayer systems deposited on LTCC featuring different surface morphologies
In MikroSystemTechnik Kongress 2021, S. 506-510 - Sauni Camposano, Y.-H.; Riegler, S.; Jaekel, K.; Schmauch, J.; Pauly, Chr.; Schäfer, Chr.; Bartsch, H., Mücklich, F.; Gallino, I.; Schaaf, P.:
Phase transformation and characterization of 3D reactive microstructures in nanoscale Al/Ni multilayers
In Applied Sciences - Basel : MDPI, 2011- , ISSN: 2076-3417 , ZDB-ID: 2704225-X, Bd. 11 (2021), 19, Artikel 9304 = 13 S.
https://doi.org/10.3390/app11199304 - Kleinholz, C.; Fischer, M.; Cyriax, A.; Hintz, M.; Müller, J.; Ortlepp, T.:
Implementation of SiCer technology for pressure sensor applications
Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2021), April 26-29, 2021, Global Virtual Event/online - Schulz, A.; Blau, K.; Müller, J.:
LTCC patch antenna array with embedded air cavities for 5G mobile applications
Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2021), April 26-29, 2021, Global Virtual Event/online
Abstract
