Laboratory for Materials & Micro/Nanofabrication - Interactive curriculae of TU Ilmenau

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module properties module number 101731 - common information
module number	101731
department	Department of Electrical Engineering and Information Technology
ID of group	2142 (Nanotechnology)
module leader	Prof. Dr. Heiko Jacobs
language
term	unbekannt
previous knowledge and experience
learning outcome	This module is a combined laboratory course offered by Prof. Jacobs and Prof. Schaaf to gain hands-on practical experience on the technologies used for the production and characterization of modern materials, semiconductor devices, and sensors. Students acquire basic knowledge on materials commonly used in micro/nanotechnology and modern sensors. They gain knowledge in basic properties, applications, and production of such materials. The students also gain knowledge of basics production methods including lithography, patterning, etching, and the production of thin films commonly used for the fabrication of semiconductor devices, integrated circuits, microsystems, and sensors. Appropriate materials and production methods will be realized directly in the lab by addressing specific tasks.
content
media of instruction and technical requirements for education and examination in case of online participation
literature / references
evaluation of teaching

Details reference subject
module name	Laboratory for Materials & Micro/Nanofabrication
examination number	90700
credit points	5
SWS	0
on-campus program (h)	0
self-study (h)	150
obligation	obligatory module
exam	multiple performances
details of the certificate	lab attestations and lab reports
link to Moodle course
teacher
signup details for alternative examinations
maximum number of participants