Micro and nano sensor technology - Interactive curriculae of TU Ilmenau

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module properties module number 1455 - common information
module number	1455
department	Department of Electrical Engineering and Information Technology
ID of group	2143 (Micro- and Nanoelectronic Systems)
module leader	Prof. Dr. Martin Ziegler
language	englisch
term	Sommersemester
previous knowledge and experience	Mathematics, Physics, Electrical Engineering, Electronics
learning outcome	Learn and understand basic processes for acquiring non-electrical quantities, the construction and function of key sensors and their technology
content	Introduction to sensor technology: transducer principles, sensor materials, manufacturing process; Inertial sensors: acceleration sensors, gyroscopes; Mechanical Sensors: Strain Gages, Piezoresistive Sensors; Magnetic sensors: Hall effect sensors, anisotropic magnetoresistive sensors, giant magnetoresistive based sensors; Temperature sensors: thermistors, thermocouples; Infrared sensors: photon detectors, thermal sensors and arrays; Atomic force microscopy sensors
media of instruction and technical requirements for education and examination in case of online participation	Overhead projector, beamer, blackboard
literature / references	Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka: Handbook of Silicon Based MEMS Materials and Technologies; William Andrew (2010) Julien W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim: Microsensors MEMS and Smart Devices; Wiley (2001) Kempe,Volker: Inertial MEMS: principles and practice; Cambridge University Press (2011) Antonio Rogalski: Infrared Detectors; Taylor & Francis (2010) Ricardo García: Amplitude Modulation Atomic Force Microscopy; Wiley-VCH (2010) Ulrich Hilleringmann: Silizium-Halbleitertechnologie: Grundlagen mikroelektronischer Integrationstechnik; Springer (2019). Springer 1998
evaluation of teaching

Details reference subject
module name	Micro and nano sensor technology
examination number	2100566
credit points	5
SWS	4
on-campus program (h)	45
self-study (h)	105
obligation	obligatory module
exam	written examination performance, 90 minutes
details of the certificate
link to Moodle course
teacher
signup details for alternative examinations
maximum number of participants

Details in degree program Master Wirtschaftsingenieurwesen 2013 (ET), Master Wirtschaftsingenieurwesen 2014 (ET), Master Wirtschaftsingenieurwesen 2015 (ET), Master Wirtschaftsingenieurwesen 2018 (ET)
module name	Micro- and nanosensor technology
examination number	2100050
credit points	5
on-campus program (h)	45
self-study (h)	105
obligation	elective module
exam	written examination performance, 90 minutes
details of the certificate
link to Moodle course
signup details for alternative examinations
maximum number of participants

Details in degree program Master Wirtschaftsingenieurwesen 2009, Master Wirtschaftsingenieurwesen 2010 (ET), Master Wirtschaftsingenieurwesen 2010, Master Wirtschaftsingenieurwesen 2011 (ET)
module name	Micro- and nanosensor technology
examination number	2100050
credit points	4
on-campus program (h)	34
self-study (h)	86
obligation	elective module
exam	written examination performance, 90 minutes
details of the certificate
link to Moodle course
signup details for alternative examinations
maximum number of participants