Micro- and semiconductor technology 2 - Interactive curriculae of TU Ilmenau
The interactive curriculae provide information on the degree programmes offered by the TU Ilmenau.
Please refer to the respective study and examination rules and regulations for the legally binding curricula (Annex Curriculum).
You can find all details on planned lectures and classes in the course catalogue.
Please note that this page is no longer updated. All modules and study plans from PO version 2021 onwards (Bachelor and Master study programs) are now available on the Campus Portal.
| module properties module number 100714 - common information | |
|---|---|
| module number | 100714 |
| department | Department of Electrical Engineering and Information Technology |
| ID of group | 2142 (Nanotechnology) |
| module leader | Prof. Dr. Heiko Jacobs |
| language | |
| term | unbekannt |
| previous knowledge and experience | |
| learning outcome | Vermittlung der Anwendung der Einzelprozesse in der Mikro- und Halbleitertechnolgie auf ihre Integration für die Herstellung von Herstellung von Halbleiterbauelementen, integrierten Schaltkreisen, Sensor- und Mikrosystemen. Auf der Grundlage des Verständnisses der physikalisch, chemischen und materialwissenschaftlichen Grundlagen der technologischen Einzelprozesse wird die Befähigungen vermittelt, diese auf komplexe halbleitertechnologische Prozesse anzuwenden, sie zu analysieren, und neue Verfahrensabläufe zu synthetisieren. |
| content | |
| media of instruction and technical requirements for education and examination in case of online participation | |
| literature / references | |
| evaluation of teaching | |
| Details reference subject | |
|---|---|
| module name | Micro- and semiconductor technology 2 |
| examination number | 90200 |
| credit points | 5 |
| SWS | 0 |
| on-campus program (h) | 0 |
| self-study (h) | 150 |
| obligation | obligatory module |
| exam | multiple performances |
| details of the certificate | aPL (alternative Prüfungsleistung) |
| link to Moodle course | |
| teacher | |
| signup details for alternative examinations | |
| maximum number of participants | |