Micro and nano sensor technology - Interaktive Studienpläne der TU Ilmenau

Mathematics, Physics, Electrical Engineering, Electronics

Learn and understand basic processes for acquiring non-electrical quantities, the construction and function of key sensors and their technology

• Introduction to sensor technology: transducer principles, sensor materials, manufacturing process;
• Inertial sensors: acceleration sensors, gyroscopes;
• Mechanical Sensors: Strain Gages, Piezoresistive Sensors;
• Magnetic sensors: Hall effect sensors, anisotropic magnetoresistive sensors, giant magnetoresistive based sensors;
• Temperature sensors: thermistors, thermocouples;
• Infrared sensors: photon detectors, thermal sensors and arrays;
• Atomic force microscopy sensors

Overhead projector, beamer, blackboard

Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka: Handbook of Silicon Based MEMS Materials and Technologies; William Andrew (2010)

Julien W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim: Microsensors MEMS and Smart Devices; Wiley (2001)

Kempe,Volker: Inertial MEMS: principles and practice; Cambridge University Press (2011)

Antonio Rogalski: Infrared Detectors; Taylor & Francis (2010)

Ricardo García: Amplitude Modulation Atomic Force Microscopy; Wiley-VCH (2010)

Ulrich Hilleringmann: Silizium-Halbleitertechnologie: Grundlagen mikroelektronischer Integrationstechnik; Springer (2019). Springer 1998