Micro- and nanosystems technology - Interaktive Studienpläne der TU Ilmenau

Participation in the course "Micro and nano sensor technology"

Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They aquire knowledge to understand original literature, to design and use micro devices.

• Requirements of micro- and nanotechnology;
• material properties and choice of materials;
• physical and engineering backgrounds of microsystem technology;
• fabrication and functionality of miniature sensors or actuators based on selected examples

Overhead projector, beamer, blackboard

B. Heimann, W. Gerth, K. Popp: Mechatronik; Hanser Verlag München, 1998

S. E. Lyschevski: Nano- and micromechanical systems, CRC Press, 2005

Gerald Gerlach, Wolfram Dötzel, Einführung in die Mikrosystemtechnik, Hanser, München-Wien 2006

G. Gerlach, W. Dötzel, Introduction to Microsystem Technology, Wiley & Sons, 2008

W. Menz, J. Mohr, O. Paul, Mikrosystemtechnik für Ingenieure, Weinheim, Wiley-VCH, 3. Auflage (2005)

U. Mescheder, Mikrosystemtechnik, Wiesbaden, Teubner, 2. Auflage (2004)

M. Glück, MEMS in der Mikrosystemtechnik, Wiesbaden, Teubner (2005)

Friedemann Völklein, Praxiswissen Mikrosystemtechnik : Grundlagen, Technologien, Anwendungen. Wiesbaden, Vieweg (2006)

Friedemann Völklein, Einführung in die Mikrosystemtechnik : Grundlagen und Praxisbeispiele. Braunschweig, Vieweg (2000)

Werner Karl Schomburg, Introduction to Microsystem Design, Springer, Berlin-Heidelberg 2015

Nam-Trung Nguyen, Mikrofluidik, Teubner, Wiesbaden 2004

Nguyen/Wereley, Fundamentals and Applications of Microfluidics, Artech House, Boston-London 2002