Technology lab course - Modultafeln of TU Ilmenau
have a pure informational character. The legally binding information
can be found in the corresponding Studienplan and Modulhandbuch, which are served on the
pages of the course offers.
Please also pay attention to this
legal advice (german only).
Information on the room and time of planned courses can be found in the e-calendar of events. Courses and examinations that are not listed in the e-calendar of events are planned "by appointment". A list of the events concerned can be found here: courses, examinations.
|subject properties Technology lab course in major Bachelor Elektrotechnik und Informationstechnik 2013|
|department||Department of Electrical Engineering and Information Technology|
|ID of group||2142 (Nanotechnology Group)|
|subject leader||Prof. Dr. Heiko Jacobs|
|on-campus program (h)||45|
|details of the certificate|
|Signup details for alternative examinations|
|maximum number of participants|
|previous knowledge and experience|
Experimentalphysik, Grundlagen der Elektronik. Nanotechnolgie
Ziel dieses Praktikums ist das Kennenlernen wesentlicher technologischer Schritte zur Herstellung elektronischer und sensorischer Bauelemente auf der Basis von Silizium und organischen Materialien. Der Student erwirbt die Fähigkeit, praktische Arbeiten an technologischen Maschinen teils selbstständig und teils unter Anleitung durchzuführen.
The participant obtains hands-on experience in the fabrication of micro and nanotechnological devices.
The majority of the experiments will be carried out within am educational laboratory setting which houses the required equipment.
The student get familiar with the equipment and the process flow commonly used in the fabrication of micro and nanotechnological devices.
You acquire basic skills on the technological steps used in the manufacturing of modern micro/nanofabricated devices which integrate electronic and sensing elements in a small form factor integrated system.
You get to know the equipment, measuring techniques, and principles of operation.
The lab-course mimics the main steps of semiconductor processing as it is used in the industry today and provide an important link to the theory which was provided in the lectures.
The lab-course provides an entry to the fabrication and processing of modern semiconductor devices which include the fields of MEMS, NEMS, Sensors, Electronics, Photovoltaics, Bioelectronics, Nanoelectronics to name the most relevant today.
You will apply the technology to fabricate a micro mechanical pressure sensor based on a Si membrane integrated on a Si - chip.
You will study the influence of technological processing parameters on device properties.
The processing you will carry out includes: Wafer cleaning, Thermal Oxidation, Sputtering and Evaporation, Dry Etching, Spin Coating, and Electrical contact formation
Characterisation methods include: Optical Microscopy, Ellipsometric measurements, and Electrical characterisation/probe station.
You will also get a brief introduction to the operation of vacuum pumps and vacuum measurement equipment commonly used in the industry.
|media of instruction|
|literature / references|
Praktikumsanleitungen und Sekundärliteratur
|evaluation of teaching|