Technische Universität Ilmenau

Micro- and nanosystems technology 1 - Modultafeln of TU Ilmenau

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module properties Micro- and nanosystems technology 1 in degree program Bachelor Elektrotechnik und Informationstechnik 2013
module number1456
examination number2100057
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and Nanoelectronic Systems)
module leaderProf. Dr. Martin Ziegler
term winter term only
credit points5
on-campus program (h)45
self-study (h)105
obligationobligatory module
examoral examination performance, 30 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
previous knowledge and experience

Participation in the course "Micro and nano sensor technology"

learning outcome

Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They acquire knowledge to understand original literature, to design and use micro devices.

  • Requirements of micro- and nanotechnology;
  • material properties and choice of materials;
  • physical and engineering backgrounds of microsystem technology;
  • fabrication and functionality of miniature sensors or actuators based on selected examples
media of instruction and technical requirements for education and examination in case of online participation

Overhead projector, beamer, blackboard

literature / references

B. Heimann, W. Gerth, K. Popp: Mechatronik; Hanser Verlag München, 1998;

S. E. Lyschevski: Nano- and micromechanical systems, CRC Press, 2005;

Gerald Gerlach, Wolfram Dötzel, Einführung in die Mikrosystemtechnik, Hanser, München-Wien 2006

G. Gerlach, W. Dötzel, Introduction to Microsystem Technology, Wiley & Sons, 2008

W. Menz, J. Mohr, O. Paul, Mikrosystemtechnik für Ingenieure, Weinheim, Wiley-VCH, 3. Auflage (2005)

U. Mescheder, Mikrosystemtechnik, Wiesbaden, Teubner, 2. Auflage (2004)

M. Glück, MEMS in der Mikrosystemtechnik, Wiesbaden, Teubner (2005)

Friedemann Völklein, Praxiswissen Mikrosystemtechnik : Grundlagen, Technologien, Anwendungen. Wiesbaden, Vieweg (2006)

Friedemann Völklein, Einführung in die Mikrosystemtechnik : Grundlagen und Praxisbeispiele. Braunschweig, Vieweg (2000)

Werner Karl Schomburg, Introduction to Microsystem Design, Springer, Berlin-Heidelberg 2015

Nam-Trung Nguyen, Mikrofluidik, Teubner, Wiesbaden 2004

Nguyen/Wereley, Fundamentals and Applications of Microfluidics, Artech House, Boston-London 2002

evaluation of teaching


SS 2012 (Fach)

Freiwillige Evaluation: