Micro- and nanosystems technology 1 - Interactive curriculae of TU Ilmenau
The interactive curriculae provide information on the degree programmes offered by the TU Ilmenau.
Please refer to the respective study and examination rules and regulations for the legally binding curricula (Annex Curriculum).
You can find all details on planned lectures and classes in the course catalogue.
Please note that this page is no longer updated. All modules and study plans from PO version 2021 onwards (Bachelor and Master study programs) are now available on the Campus Portal.
| module properties Micro- and nanosystems technology 1 in degree program Bachelor Elektrotechnik und Informationstechnik 2013 | |
|---|---|
| module number | 1456 |
| examination number | 2100057 |
| department | Department of Electrical Engineering and Information Technology |
| ID of group | 2143 (Micro- and Nanoelectronic Systems) |
| module leader | Prof. Dr. Martin Ziegler |
| term | winter term only |
| language | englisch |
| credit points | 5 |
| on-campus program (h) | 45 |
| self-study (h) | 105 |
| obligation | obligatory module |
| exam | oral examination performance, 30 minutes |
| details of the certificate | |
| link to Moodle course | |
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| signup details for alternative examinations | |
| maximum number of participants | |
| previous knowledge and experience | Participation in the course "Micro and nano sensor technology" |
| learning outcome | Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They acquire knowledge to understand original literature, to design and use micro devices. |
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| media of instruction and technical requirements for education and examination in case of online participation | Overhead projector, beamer, blackboard |
| literature / references | B. Heimann, W. Gerth, K. Popp: Mechatronik; Hanser Verlag München, 1998; S. E. Lyschevski: Nano- and micromechanical systems, CRC Press, 2005; Gerald Gerlach, Wolfram Dötzel, Einführung in die Mikrosystemtechnik, Hanser, München-Wien 2006 G. Gerlach, W. Dötzel, Introduction to Microsystem Technology, Wiley & Sons, 2008 W. Menz, J. Mohr, O. Paul, Mikrosystemtechnik für Ingenieure, Weinheim, Wiley-VCH, 3. Auflage (2005) U. Mescheder, Mikrosystemtechnik, Wiesbaden, Teubner, 2. Auflage (2004) M. Glück, MEMS in der Mikrosystemtechnik, Wiesbaden, Teubner (2005) Friedemann Völklein, Praxiswissen Mikrosystemtechnik : Grundlagen, Technologien, Anwendungen. Wiesbaden, Vieweg (2006) Friedemann Völklein, Einführung in die Mikrosystemtechnik : Grundlagen und Praxisbeispiele. Braunschweig, Vieweg (2000) Werner Karl Schomburg, Introduction to Microsystem Design, Springer, Berlin-Heidelberg 2015 Nam-Trung Nguyen, Mikrofluidik, Teubner, Wiesbaden 2004 Nguyen/Wereley, Fundamentals and Applications of Microfluidics, Artech House, Boston-London 2002 |
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