Micro- and nanosystems technology 1 - Modultafeln of TU Ilmenau
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|module properties Micro- and nanosystems technology 1 in degree program Bachelor Elektrotechnik und Informationstechnik 2013|
|module name||Micro- and nanosystems technology 1|
|department||Department of Electrical Engineering and Information Technology|
|ID of group||2143 (Micro- and Nanoelectronic Systems)|
|module leader||Prof. Dr. Martin Ziegler|
Participation in the course "Micro and nano sensor technology"
|certificate of the module||Individual achievements or exams|
|details of the certificate|
|alternative examination performance due to COVID-19 regulations incl. technical requirements|
|signup details for alternative examinations|
Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They acquire knowledge to understand original literature, to design and use micro devices.
|The module contains the following subjects:|
|Micro- and nanosystems technology 1|
|certificate of the module||oral examination performance, 30 minutes|