Micro- and nanosystems technology 1 - Interactive curriculae of TU Ilmenau
The interactive curriculae provide information on the degree programmes offered by the TU Ilmenau.
Please refer to the respective study and examination rules and regulations for the legally binding curricula (Annex Curriculum).
You can find all details on planned lectures and classes in the course catalogue.
Please note that this page is no longer updated. All modules and study plans from PO version 2021 onwards (Bachelor and Master study programs) are now available on the Campus Portal.
| module properties Micro- and nanosystems technology 1 in degree program Bachelor Elektrotechnik und Informationstechnik 2013 | ||
|---|---|---|
| module name | Micro- and nanosystems technology 1 | |
| module number | 1456 | |
| department | Department of Electrical Engineering and Information Technology | |
| ID of group | 2143 (Micro- and Nanoelectronic Systems) | |
| module leader | Prof. Dr. Martin Ziegler | |
| credit points | 5 | |
| obligation | obligatory module | |
| requirements | Participation in the course "Micro and nano sensor technology" | |
| certificate of the module | Individual achievements or exams | |
| details of the certificate | ||
| link to Moodle course | ||
| teacher | ||
| signup details for alternative examinations | ||
| learning outcome | Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They acquire knowledge to understand original literature, to design and use micro devices. | |
| The module contains the following subjects: | ||
| Micro- and nanosystems technology 1 | ||
| credit points | 5 | |
| obligation | obligatory module | |
| certificate of the module | oral examination performance, 30 minutes | |
| term | Wintersemester | |

