Technische Universit├Ąt Ilmenau

Micro- and nanosystems technology 1 - Modultafeln of TU Ilmenau

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module properties Micro- and nanosystems technology 1 in degree program Bachelor Elektrotechnik und Informationstechnik 2013
module nameMicro- and nanosystems technology 1
module number1456
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and Nanoelectronic Systems)
module leaderProf. Dr. Martin Ziegler
credit points5
obligationobligatory module

Participation in the course "Micro and nano sensor technology"

certificate of the module Individual achievements or exams
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
learning outcome

Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They acquire knowledge to understand original literature, to design and use micro devices.

The module contains the following subjects:
Micro- and nanosystems technology 1
credit points5
obligationobligatory module
certificate of the moduleoral examination performance, 30 minutes
term Wintersemester