Technische Universit├Ąt Ilmenau

Micro- and nanosystems technology 1 - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only).
Information on the room and time of planned courses can be found in the e-calendar of events. Courses and examinations that are not listed in the e-calendar of events are planned "by appointment". A list of the events concerned can be found here: courses, examinations.

module properties Micro- and nanosystems technology 1 in major Bachelor Elektrotechnik und Informationstechnik 2013
module nameMicro- and nanosystems technology 1
module number1456
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and nanoelectronic Systems Group)
module leaderProf. Dr. Martin Ziegler
credit points5

Participation in the course "Micro and nano sensor technology"

certificate of the module Individual achievements or exams
details of the certificate
Signup details for alternative examinations
learning outcome

Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They acquire knowledge to understand original literature, to design and use micro devices.

The module contains the following subjects:
Micro- and nanosystems technology 1
credit points5
certificate of the subjectoral examination performance, 30 minutes
term Wintersemester