Technische Universität Ilmenau

Micro- and nanosystems technology - Modultafeln of TU Ilmenau

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module properties Micro- and nanosystems technology in major Diplom Elektrotechnik und Informationstechnik 2017
module number5627
examination number2100565
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and nanoelectronic Systems Group)
module leaderProf. Dr. Martin Ziegler
term winter term only
credit points5
on-campus program (h)45
self-study (h)105
Obligationelective module
examoral examination performance, 30 minutes
details of the certificate
Signup details for alternative examinations
maximum number of participants
previous knowledge and experience

Participation in the course "Micro and nano sensor technology"

learning outcome

Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They aquire knowledge to understand original literature, to design and use micro devices.

  • Requirements of micro- and nanotechnology;
  • material properties and choice of materials;
  • physical and engineering backgrounds of microsystem technology;
  • fabrication and functionality of miniature sensors or actuators based on selected examples
media of instruction

Overhead projector, beamer, blackboard

literature / references

B. Heimann, W. Gerth, K. Popp: Mechatronik; Hanser Verlag München, 1998

S. E. Lyschevski: Nano- and micromechanical systems, CRC Press, 2005

Gerald Gerlach, Wolfram Dötzel, Einführung in die Mikrosystemtechnik, Hanser, München-Wien 2006

G. Gerlach, W. Dötzel, Introduction to Microsystem Technology, Wiley & Sons, 2008

W. Menz, J. Mohr, O. Paul, Mikrosystemtechnik für Ingenieure, Weinheim, Wiley-VCH, 3. Auflage (2005)

U. Mescheder, Mikrosystemtechnik, Wiesbaden, Teubner, 2. Auflage (2004)

M. Glück, MEMS in der Mikrosystemtechnik, Wiesbaden, Teubner (2005)

Friedemann Völklein, Praxiswissen Mikrosystemtechnik : Grundlagen, Technologien, Anwendungen. Wiesbaden, Vieweg (2006)

Friedemann Völklein, Einführung in die Mikrosystemtechnik : Grundlagen und Praxisbeispiele. Braunschweig, Vieweg (2000)

Werner Karl Schomburg, Introduction to Microsystem Design, Springer, Berlin-Heidelberg 2015

Nam-Trung Nguyen, Mikrofluidik, Teubner, Wiesbaden 2004

Nguyen/Wereley, Fundamentals and Applications of Microfluidics, Artech House, Boston-London 2002

evaluation of teaching


Freiwillige Evaluation: