Materials of Micro- and Nanotechnologies - Modultafeln der TU Ilmenau

Kurse für Physik und Mathematik, Grundkenntnisse in der Theorie elektromagnetischer Wellen, Halbleiterphysik, Optik und der Funktionsweise von elektronischen Bauelementen.

The talk in the seminar is a prerequisite for admission to the written examination.

Students know the various materials in micro- and nanotechnology and in sensorics. They gain knowledge about the basic materials properties, their application and the fabrication of such materials.
The students know the basics of fabrication of highly integrated circuits, the preparation of microsystems and sensors and how the materials have to be selected.
Various methods and steps, materials and their control and analysis are treated for selected applications.
In the seminar, the students gain deeper knowledge for selected examples, and the learn how to search information and how to present this in a talk and to discuss the problems.