Technische Universität Ilmenau

Materials of Micro- and Nanotechnologies - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only).
Information on the room and time of planned courses can be found in the e-calendar of events. Courses and examinations that are not listed in the e-calendar of events are planned "by appointment". A list of the events concerned can be found here: courses, examinations.

module properties Materials of Micro- and Nanotechnologies in major Master Micro- and Nanotechnologies 2016
module nameMaterials of Micro- and Nanotechnologies
module number6956
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2172 (Group of Materials for Electrical Engineering and Electronics)
module leaderProf. Dr. Peter Schaaf
credit points5

Kurse für Physik und Mathematik, Grundkenntnisse in der Theorie elektromagnetischer Wellen, Halbleiterphysik, Optik und der Funktionsweise von elektronischen Bauelementen.


certificate of the module Individual achievements or exams
details of the certificate

The talk in the seminar is a prerequisite for admission to the written examination.

Signup details for alternative examinations
learning outcome

Students know the various materials in micro- and nanotechnology and in sensorics. They gain knowledge about the basic materials properties, their application and the fabrication of such materials.
The students know the basics of fabrication of highly integrated circuits, the preparation of microsystems and sensors and how the materials have to be selected.
Various methods and steps, materials and their control and analysis are treated for selected applications.
In the seminar, the students gain deeper knowledge for selected examples, and the learn how to search information and how to present this in a talk and to discuss the problems.

The module contains the following subjects:
Materials for Micro- and Nanotechnology
credit points5
certificate of the subjectwritten examination performance, 90 minutes
term Wintersemester