Materials of Micro- and Nanotechnologies - Interactive curriculae of TU Ilmenau

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module properties Materials of Micro- and Nanotechnologies in degree program Master Micro- and Nanotechnologies 2016
module name	Materials of Micro- and Nanotechnologies
module number	6956
department	Department of Electrical Engineering and Information Technology
ID of group	2172 (Materials for Electrical Engineering and Electronics)
module leader	Prof. Dr. Peter Schaaf
credit points	5
obligation	obligatory module
requirements	Kurse für Physik und Mathematik, Grundkenntnisse in der Theorie elektromagnetischer Wellen, Halbleiterphysik, Optik und der Funktionsweise von elektronischen Bauelementen.
certificate of the module	Individual achievements or exams
details of the certificate	The talk in the seminar is a prerequisite for admission to the written examination.
link to Moodle course
teacher
signup details for alternative examinations
learning outcome	Students know the various materials in micro- and nanotechnology and in sensorics. They gain knowledge about the basic materials properties, their application and the fabrication of such materials. The students know the basics of fabrication of highly integrated circuits, the preparation of microsystems and sensors and how the materials have to be selected. Various methods and steps, materials and their control and analysis are treated for selected applications. In the seminar, the students gain deeper knowledge for selected examples, and the learn how to search information and how to present this in a talk and to discuss the problems.
The module contains the following subjects:
Materials for Micro- and Nanotechnology
credit points	5
obligation	obligatory module
certificate of the module	alternative examination performance
term	Wintersemester