Micro- and Nano System Technology - Interactive curriculae of TU Ilmenau

The interactive curriculae provide information on the degree programmes offered by the TU Ilmenau.

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You can find all details on planned lectures and classes in the course catalogue.

Please note that this page is no longer updated. All modules and study plans from PO version 2021 onwards (Bachelor and Master study programs) are now available on the Campus Portal.

module properties Micro- and Nano System Technology in degree program Master Micro- and Nanotechnologies 2021
module number	200521
examination number	2100858
department	Department of Electrical Engineering and Information Technology
ID of group	2143 (Micro- and Nanoelectronic Systems)
module leader	Dr. Frank Schwierz
term	winter term only
language	Englisch
credit points	5
on-campus program (h)	45
self-study (h)	105
obligation	elective module
exam	written examination performance, 90 minutes
details of the certificate
link to Moodle course
teacher	Dr. Volland, Burkhard
signup details for alternative examinations
maximum number of participants
previous knowledge and experience	Participation in the course "Micro and nano sensor technology"
learning outcome	After the lectures and exercises, the students have an overview on basics and background knowledge of micro- and nanosystem technology, devices and fabrication technology. They are able to understand original literature, to design and use micro devices.
content	Requirements of micro- and nanotechnology; material properties and choice of materials; physical and engineering backgrounds of microsystem technology; fabrication and functionality of miniature sensors or actuators based on selected examples
media of instruction and technical requirements for education and examination in case of online participation	Overhead projector, beamer, blackboardl
literature / references	B. Heimann, W. Gerth, K. Popp: Mechatronik; Hanser Verlag München, 1998; S. E. Lyschevski: Nano- and micromechanical systems, CRC Press, 2005; Gerald Gerlach, Wolfram Dötzel, Einführung in die Mikrosystemtechnik, Hanser, München-Wien 2006 G. Gerlach, W. Dötzel, Introduction to Microsystem Technology, Wiley & Sons, 2008 W. Menz, J. Mohr, O. Paul, Mikrosystemtechnik für Ingenieure, Weinheim, Wiley-VCH, 3. Auflage (2005) U. Mescheder, Mikrosystemtechnik, Wiesbaden, Teubner, 2. Auflage (2004) M. Glück, MEMS in der Mikrosystemtechnik, Wiesbaden, Teubner (2005) Friedemann Völklein, Praxiswissen Mikrosystemtechnik : Grundlagen, Technologien, Anwendungen. Wiesbaden, Vieweg (2006) Friedemann Völklein, Einführung in die Mikrosystemtechnik : Grundlagen und Praxisbeispiele. Braunschweig, Vieweg (2000) Werner Karl Schomburg, Introduction to Microsystem Design, Springer, Berlin-Heidelberg 2015 Nam-Trung Nguyen, Mikrofluidik, Teubner, Wiesbaden 2004 Nguyen/Wereley, Fundamentals and Applications of Microfluidics, Artech House, Boston-London 2002
evaluation of teaching