Micro and Nano Sensor Technology - Interactive curriculae of TU Ilmenau
The interactive curriculae provide information on the degree programmes offered by the TU Ilmenau.
Please refer to the respective study and examination rules and regulations for the legally binding curricula (Annex Curriculum).
You can find all details on planned lectures and classes in the course catalogue.
Please note that this page is no longer updated. All modules and study plans from PO version 2021 onwards (Bachelor and Master study programs) are now available on the Campus Portal.
| module properties Micro and Nano Sensor Technology in degree program Master Micro- and Nanotechnologies 2021 | |
|---|---|
| module number | 200523 |
| examination number | 2100861 |
| department | Department of Electrical Engineering and Information Technology |
| ID of group | 2143 (Micro- and Nanoelectronic Systems) |
| module leader | Dr. Frank Schwierz |
| term | summer term only |
| language | Englisch |
| credit points | 5 |
| on-campus program (h) | 45 |
| self-study (h) | 105 |
| obligation | elective module |
| exam | written examination performance, 90 minutes |
| details of the certificate | |
| link to Moodle course | |
| teacher | Dr. Ivanov, Tzvetan |
| signup details for alternative examinations | |
| maximum number of participants | |
| previous knowledge and experience | Mathematics, Physics,Electrical Engineering, Electronics |
| learning outcome | After the lectures and the exercises, the students have learned and understand basic processes for acquiring
non-electrical quantities, the construction and function of key sensors and
their technology. |
| content | Introduction to sensor technology: transducer principles, sensor materials, manufacturing process; Inertial sensors: acceleration sensors, gyroscopes; Mechanical Sensors: Strain Gages, Piezoresistive Sensors; Magnetic sensors: Hall effect sensors, anisotropic magnetoresistive sensors, giant magnetoresistive based sensors; Temperature sensors: thermistors, thermocouples; Infrared sensors: photon detectors, thermal sensors and arrays; Atomic force microscopy sensors |
| media of instruction and technical requirements for education and examination in case of online participation | Overhead projector, beamer, blackboard |
| literature / references | Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka: Handbook of Silicon Based MEMS Materials and Technologies; William Andrew (2010) Julien W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim: Microsensors MEMS and Smart Devices; Wiley (2001) Kempe,Volker: Inertial MEMS: principles and practice; Cambridge University Press (2011) Antonio Rogalski: Infrared Detectors; Taylor & Francis (2010) Ricardo García: Amplitude Modulation Atomic Force Microscopy; Wiley-VCH (2010) J.Niebuhr, G.Lindner: Physikalische Messtechnik mit Sensoren; Vulkan-Verlag GmbH (2011) H.-R.Tränkler, E.Obermeier: Sensortechnik Handbuch für Praxis und Wissenschaft; Springer (1998) Ulrich Hilleringmann: Silizium-Halbleitertechnologie: Grundlagen mikroelektronischer Integrationstechnik; Springer (2019) |
| evaluation of teaching | |