Technische Universit├Ąt Ilmenau

Micro- and nanosensor technology - Modultafeln of TU Ilmenau

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module properties Micro- and nanosensor technology in degree program Master Wirtschaftsingenieurwesen 2010
module number1455
examination number2100050
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and Nanoelectronic Systems)
module leaderProf. Dr. Martin Ziegler
term summer term only
credit points4
on-campus program (h)34
self-study (h)86
obligationelective module
examwritten examination performance, 90 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
previous knowledge and experience

Prerequisites Mathematics, Physics, Electrical Engineering, Electronics

learning outcome

Knowledge and understanding of basic methods for detecting non-electrical quantities, the structure and function of important sensors and their technology.


- Introduction to sensors

- Transformer prinicples

- Sensor materials

- Manufactoring processes

- Teaching on temperature, pressure, acceleration sensors, piezoelectric sensors, magnetic sensors, optical sensors, infrared sensors, ultrasonic sensors, gas sensors, chemical sensors and biosensors

media of instruction and technical requirements for education and examination in case of online participation

Overheadprojektor, Beamer, Tafel

literature / references

H. Schaumburg: Sensoren. Teubner, 1992

P. Hartmann: Sensoren - Prinzipien und Anwendungen. Hanser, 1991

H. Eigler: Mikrosensorik und Mikroelektronik. Expert, 2000

K.-W. Bonfis: Sensoren und Sensorsysteme. Expert, 1991

H.-R. Trünkler, E. Obermeier: Sensortechnik - Handbuch. Springer 1998 

evaluation of teaching


Freiwillige Evaluation: