Technische Universität Ilmenau

Materials of Micro and Nanotechnology - Modultafeln der TU Ilmenau

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Modulinformationen zu Materials of Micro and Nanotechnology im Studiengang Master Wirtschaftsingenieurwesen 2021 (ET)
Modulnummer200601
Prüfungsnummer210502
FakultätFakultät für Elektrotechnik und Informationstechnik
Fachgebietsnummer 2172 (Werkstoffe der Elektrotechnik)
Modulverantwortliche(r)Prof. Dr. Peter Schaaf
TurnusWintersemester
SpracheEnglisch
Leistungspunkte5
Präsenzstudium (h)45
Selbststudium (h)105
VerpflichtungWahlmodul
AbschlussPrüfungsleistung mit mehreren Teilleistungen
Details zum AbschlussDas Modul Materials of Micro and Nanotechnology mit der Prüfungsnummer 210502 schließt mit folgenden Leistungen ab:
  • schriftliche Prüfungsleistung über 90 Minuten mit einer Wichtung von 75% (Prüfungsnummer: 2100950)
  • alternativ semesterbegleitende Prüfungsleistung mit einer Wichtung von 25% (Prüfungsnummer: 2100951)

Details zum Abschluss Teilleistung 1:

written examination


Details zum Abschluss Teilleistung 2:

seminar talk to a given topic with scientific discussion 

Anmeldemodalitäten für alternative PL oder SL
max. Teilnehmerzahl
Vorkenntnisse

Basic knowledge in materials science and engineering, physics, and chemistry on bachelor level.


Lernergebnisse und erworbene Kompetenzen

Students are able to explain the mechanical and functional properties of materials in micro- and nanotechnology starting from the microscopic and submicroscopic structure. The can analyze changes in the properties and judge them for their applicability in new applications and can develop strategies for their implementation. Students know the various materials in micro- and nanotechnology and in sensorics. They have gained knowledge about the basic materials properties, their application and the fabrication of such materials. The students know the basics of fabrication of highly integrated circuits, the preparation of microsystems and sensors and how the materials have to be selected. For selected applications the students have knowledge about various methods and steps, materials and their control and analysis. After the seminar, the students have gain a deeper knowledge for selected examples, and they have learned how to search information and how to present this in a talk and to discuss the problems. After intensive discussions and group work during the exercises, the students can correctly assess and appreciate the achievements of their fellow students. They take criticism, heed remarks and accept suggestions.

After the scientific talk (presentation and discussion), students can present a scientific topic, interpret the research results and have to maintain a scientific discussion. So they have the ability to analyze, summarize, interpret and to discuss a scientific research topic. This shows the metacognitive knowledge of the students. Beside these aims and knowledge tests the students have proofed the factual, conceptual, and procedural knowledge of the micro and nanomaterials in the written examination.  They have all basics available and the can apply this knowledge and transfer it to given problems.  

Inhalt

Materials for Micro- and Nanotechnology

Factual knowledge

Materials for micro and nanofabriations, Top-down und Bottom-up principles, structuring, materials principles of etching, self-organisation methods, properties of nanomaterials, scaling laws.

Introduction

Thin films, deposition, transport mechanisms in thin films

  1. basic processes during deposition
  2. Epitaxy / Superlattices
  3. Diffusion
  4. Electromigration
  5. functional properties of thin films
  1. Definition
  2. Quantum interference
  3. Applications
  4. liquid crystals
  5. carbon materials
  6. Gradient materials
  1. Lithography
  2. Anisotropic etching
  3. coating
  4. LIGA-method  

materials for sensorics

materials for plasmonics

materials for energy conversion and storage

Methodological Competences

Students can analyse a digital representation of materials and draw conclusions. They are able to convert measurements of properties to a digital representation of materials.

Self-reflecting competences

Students know how to deal with digital representations and can judge about deficiencies and limitations. They know how to extend the problem and find a solution.

Social Competences

After the seminar, the students have gain ed deeper knowledge for selected examples, and they have learned how to search information and how to present this in a talk and to discuss the problems. After intensive discussions and group work during the exercises, the students can correctly assess and appreciate the achievements of their fellow students. They take criticism, heed remarks and accept suggestions.

Medienformen

Scriptum, powerpoint, computer demos, animations, specialized literature, seminar, talks (presentation and discussion)

Literatur

Specialized literature will be given in the course and in moodle.

  1. Introduction to nanoscience and nanomaterials. Agrawal. World Scientific.
  2. Materials for microelectronics. Elsevier.
  3. Ashby, M. F.; Ferreira, P. J.; Schodek, D. L., Nanomaterials, nanotechnologies and design, Butterworth-Heinemann, 2009.
  4.  Poole Jr., C. P.; Owens, F. J., Introduction to Nanotechnology, John Wiley & Sons, 2003.
  5. Callister Jr., W. D., Fundamentals of Materials Science and Engineering, John Wiley & Sons, 2000.
  6.  Ratke, L.; Voorhees, P.  W., Growth and Coarsening: Ostwald Ripening in Material Processing, Springer, 2002.
  7. Bhattacharya, Fornari, Kamimura, Comprehensive Semiconductor Science and Technology, 6 volumes, Elsevier Science, 2011.
  8. Werkstoffwissenschaft / W. Schatt; H. Worch / Wiley- VCH Verlag, 2003
  9. Menz, W.; Mohr, J.; Paul, O.: Mikrosystemtechnik für Ingenieure. - Wiley-VCH, 2005
  10. Grundlagen der Mikrosystemtechnik: Lehr- und Fachbuch / G. Gerlach; W. Dötzel / Hanser, 1997
  11. Sensorik: Handbuch für Praxis und Wissenschaft / H.- R. Tränkler; E. Obermeier / Springer, 1998
  12. Mikrosytemtechnik / W.-J. Fischer / Würzburg: Vogel, 2000
  13. Schaumburg, H.: Sensoren / H. Schaumburg / Teubner, 1992
  14. Frühauf, J.: Werkstoffe der Mikrotechnik; Hanser Verlag 2005
  15. Mescheder, U.: Mikrosystemtechnik; Teubner-Verlag, 2004
Lehrevaluation