Microsensors and Microactuators - Interactive curriculae of TU Ilmenau

Knowledge of materials and technologies of microsystems engineering, technical mechanics, experimental physics, basics of electronics

Based on their previous knowledge of technical mechanics, microsystems engineering, electronics and materials physics, students are able to describe the function, modeling and characteristics of selected microsensors and microactuators. In addition, students are familiar with the sensor materials used in microtechnology, with anisotropic material properties and microtechnological manufacturing processes, so that, building on this, various sensory and actuator principles can be discussed in a differentiated manner in contrast to "macroscopic" systems. Students will be able to derive the advantages and disadvantages of various microsensors and actuators, describe and calculate signal noise in different domains, and understand and discuss practical and unfamiliar examples from different domains. Students will also have mastered the basic methodology for microsystem design and the selection of miniaturized components in critical reflection with the sensory or actuator application. Students will also be able to understand and assess the advantages and disadvantages of selected principles and, building on this, generate their own designs for microsensors and microactuators in different domains.

• Introduction: terms transducer, sensor, actuator, active/passive, scaling, special features of microactuators/microsensors, primary and secondary transducer principles
• Noise in micro- and nanosystems
• Force, pressure and acceleration sensors/actuators: mechanical transducers, piezoresistive effect, electrostatic effects, longitudinal and transverse effect, tensors and Voigtsche notation
• Magnetic field sensors/actuators: Hall effect, excursus epitaxy and doping, magnetoresistive sensors
• Thermal radiation sensors: radiation laws, Seebeck effect, bolometers, photodetectors, technical realization
• Chemical microsensors: metal oxide gas sensors, pellistors, ISFETs
• Electromagnetic drives: magnetostriction, applications

E-learning (videos, and other media)

Moodle course

• Ville Kaajakari: Practical Mems, SMALL GEAR PUB; New Edition (17. März 2009)
• Stephen D. Senturia, Microsystem Design, Springer; Corr. 2nd printing 2004
• Gregory T. Kovacs: Micromachined Transducers Sourcebook, McGraw-Hill Science/Engineering/Math; 1. Ed. 1998

Prof. Strehle & Mitarbeiter