Microsystems Technology - Interactive curriculae of TU Ilmenau

Knowledge about basic microsystems and microsystems technology.

After the lectures and exercises the students are familiar with several fundamental microsystems and microtechnologies and can build on this knowledge. The students are able to name modern methods of micro- and nanopatterning and to discuss their importance for the fabrication of selected microsystems partly based on mathematical models. The students are familiar with the working principles of selected modern microsystems and are familiar with current research aspects. In addition, students are capable to develop own complex technological processes for the fabrication of advanced microsystems as well as selected microsystems. They can critically analyze aspects of microsystem design, material selection, technological workflow, a perspective industrial realization as well as aspects of sustanability, partly based mathematical models. Besides conventionally used microtechnologies and materials, students are capable to name novel attempts in the field and to evaluate their respective potential towards future applications.

1. Introduction in Microsystems Technology: overview of microsystems, scaling, materials, basic microfabrication
2. Advanced microfabrication: nanoimprint lithography, thermal probe lithography, DUV/EUV-Lithography, plasma etching of complex materials, bottom-up material synthesis and patterning strategies
3. Bonding Techniques and Packaging
4. MEMS design & technology
5. Microsystems: Bio-MEMS, gas sensors, Passive sensor systems, optical MEMS, low-cost microsystems and Green MEMS

Notes (blackboard/electronic), slides, videos, ...

Moodle course

Literature recommendations are given during the course of the lecture