Laboratory for Materials & Micro/Nanofabrication - Interaktive Studienpläne der TU Ilmenau

lab attestations and lab reports

This module is a combined laboratory course offered by Prof. Jacobs and Prof. Schaaf to gain hands-on practical experience on the technologies used for the production and characterization of modern materials, semiconductor devices, and sensors.
Students acquire basic knowledge on materials commonly used in micro/nanotechnology and modern sensors. They gain knowledge in basic properties, applications, and production of such materials.
The students also gain knowledge of basics production methods including lithography, patterning, etching, and the production of thin films commonly used for the fabrication of semiconductor devices, integrated circuits, microsystems, and sensors.
Appropriate materials and production methods will be realized directly in the lab by addressing specific tasks.