Optical precision measurement methods are used in research, development and industry. They are used in investigations, research, further development, calibrations and also for high-precision control and regulation of industrial systems (e.g. lithographic production systems). The majority of these applications involve measurements under atmospheric conditions with measurement times ranging from several hours to days under environmental conditions that are difficult to control.
In this project, approaches for stabilizing the air refractive index or the density of the air are investigated, which should reduce environmental measurement uncertainties and can contribute to an increase in the possible measurement dynamics. The research results should directly enable improvements in optical precision measurements and optical systems. However, research in this area should also open up new fields of application that currently do not use interferometers or other optical precision measurement systems due to environmental influences or for which precise gravimetric measurements under vacuum conditions are not economical.
Literature:
Verfahren und Vorrichtung zur aktiven Stabilisierung der Gasbrechzahl, respektive der Gasdichte, in einer abgeschlossenen Messkammer, Patent DE102022112470, EP4280017A1
Funding provider:
Thüringer Ministerium für Wirtschaft, Wissenschaft und digitale Gesellschaft, mit finanzieller Unterstützung durch die Europäische Union
Running time: 01.01.2024 - 31.12.2026
Funding code: 2023VFE0004