Session 1.2 | Nanofabrication

Chair
TU Ilmenau/Foto Richter

Prof. Steffen Strehle
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+49 3677 69-2487

TU Ilmenau/ T. Fröhlich

Prof. Thomas Kissinger
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+49 3677 69-5055

Session points

  • MEMS

  • Metrology of nano fabrication

  • Tools and parallelization

  • Kinematics and control

 

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