Session 1.1 | Precision measurement technology

TU Ilmenau/Michael Reichel

Prof. Eberhard Manske
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+49 3677 69-1250 | 69-5050

TU Ilmenau/ T. Fröhlich

Prof. Thomas Kissinger
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+49 3677 69-5055

Session points
  • Nanopositioning technology and precision motion control
  • Opical metrology for free-form and aspheric surfaces
  • New interferometric and confocal sensor methods
  • Laser frequency stabilisation and frequency comb techniques
  • Optical fiber and waveguide sensors
  • Treatment of extremely large measurement data sets
  • Compensation of environmental influences and vivrations
  • Metrological atomic force microscopy
  • Dimensional metrology, uncertainty and traceability