Session 1.1 | Precision measurement technology
Chair
TU Ilmenau/Michael ReichelProf. Eberhard Manske
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+49 3677 69-1250 | 69-5050
TU Ilmenau/ T. FröhlichProf. Thomas Kissinger
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+49 3677 69-5055
Session points
- Nanopositioning technology and precision motion control
- Opical metrology for free-form and aspheric surfaces
- New interferometric and confocal sensor methods
- Laser frequency stabilisation and frequency comb techniques
- Optical fiber and waveguide sensors
- Treatment of extremely large measurement data sets
- Compensation of environmental influences and vivrations
- Metrological atomic force microscopy
- Dimensional metrology, uncertainty and traceability
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