Am 16. April 2024 hielt Frau Dr. Virpi Korpelainen von dem National Metrology Institute VTT MIKES, Espoo (Finnland) einen Gastvortrag zum Thema "Development of traceable methods for high speed and large range SPM".
Today, complex nanostructures and nanodevices are used in photonics, quantum technology and nanoelectronics, and increasingly in healthcare and in novel materials research. These structures need to be inspected to identifying faulty nanoproducts across multistage production processes and can vary in size, up to 200mm diameter. Scanning probe microscopy SPM are typically used to inspect them. But conventional SPM is too slow to cover large sample areas. High-Speed Scanning Probe Microscopy (HS-SPM) has great potential for use but as SPM, they lack positioning accuracy. This project is developing essential scanning probe microscope components and ultimately a validated and traceable prototype HS-SPM measurement system suitable for use in industrial measurements. Industry, universities, and research institutes perform many high-resolution measurements; however, high resolution or high precision does not necessarily mean high accuracy. Without proper calibration and a good understanding of probe sample interactions, dimensional measurement errors may be as large as 30 %. To turn high-speed SPMs from qualitative imaging instruments to high accuracy measurement instruments suitable for industrial quality control applications, requires the development of scanning microscope stages with far greater stability, improved probing systems and advanced measurement strategies that combine high-speed scanning with the possibility to collect local electrical or mechanical properties. The overall objective of this project is to design and develop technologies for transforming HS-SPM (~10 mm/s) metrology instruments for use in industrial high-speed quantitative multi-sensing metrology with a target traceable position measurement uncertainty of 1 nm.
