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Prof. Dr.-Ing. Steffen Strehle
Fachgebietsleiter
Fachgebiet Mikrosystemtechnik
Am Helmholtzring 12 (Werner-Bischoff-Bau Raum 3110)
98693 Ilmenau
Telefon: +49 3677 69-2485
Telefax: +49 3677 69-1801
Guido Straube will talk about:
"Dynamic and highly accurate sensor positioning in large measurement volumes using an inverse measurement concept"
Abstract:
As standard concepts for precision positioning within a machine reach their limits with increasing measurement volumes, inverse concepts are a promising approach for addressing this problem. The inverse principle entails other limitations, as for high-precision positioning of a sensor head within a large measurement volume, three four-beam interferometers are required in order to measure all necessary translations and rotations of the sensor head and reconstruct the topography of the reference system consisting of fixed mirrors in the x-, y-, and z-directions. Within the presentation the inverse concept and the new 4-beam heterodyne interferometer are explained.