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At a glance

Master of Science
none | aptitude test neccessary
4 semesters
October 1
Bachelor's degree in a similar field


"There is plenty of room at the bottom" was the title of a lecture given by American physicist and Nobel Prize winner Richard P. Feynman in 1959, laying the foundation for modern nanotechnology. A key characteristic of nanomaterials and nanostructures is that they exhibit altered properties on a larger scale compared to conventional materials. This means that an otherwise identical material can behave completely differently on the nanoscale. These altered properties are of interest for a variety of applications in microelectronics, energy conversion, communications technology and biotechnology. For us humans, nanostructures and nanomaterials are intangible. In order to be able to use them, we need a bridge between our macroscopic world and the nanocosmos. This role is played by microtechnologies, which themselves also have an important function in the miniaturization of components and devices. The most prominent examples are microelectronics as a key technology for almost all areas of life and microsystems technology, which enables us, for example, to have several small microphones and loudspeakers in a smartphone that also automatically recognizes its position. The Micro- and Nanotechnologies degree course teaches which technologies and processes are required for this in combination with materials.

Application with German certificates

Application with foreign certificates

Why Ilmenau?

In Ilmenau, this English-language degree course is characterized by an international environment, small practice groups and courses with lots of practical content: All this makes it possible to gain experience in dealing with processes and technologies. The two clean rooms at the Center for Micro- and Nanotechnologies provide a modern technological infrastructure that is unique in Germany and allows students to conduct research into new materials during their studies. The spectrum for the application of this research is just as broad and ranges from nanostructures for the production of hydrogen by splitting water using sunlight to complex electronic assemblies for satellite communication. The professors have diverse research collaborations with research institutions worldwide and with companies such as Bosch, Airbus, Infineon and X-Fab, to name just a few large companies. With a Master's degree in micro and nanotechnologies from Ilmenau, the world is literally open to you!

Jonas is studying Micro- and Nanotechnologies at the TU Ilmenau

Through Ilmenau with Janine and Marcel

Janine and Marcel take you on an exciting tour of the campus of the Ilmenau University of Technology and through Ilmenau itself. They describe how they live and study in Ilmenau, give numerous leisure tips and insights into the place of study of the Ilmenau University of Technology and take you to hidden places in the city.

(This video was created as part of a campaign by Campus Thüringen, the official portal for choosing a course of study in Thuringia. For more insights into Thuringia's study locations, click here. © Pixelpakete GbR)

Content of Study

Obligatory Courses (e.g. Electronics Technology, Semiconductor devices, Materials of Micro- and Nanotechnologies, Nanodiagnostics, Nanotechnology, Micro Technologies, Laboratory for Materials & Micro/Nanofabrication)

30 %

Advanced Courses (Optional Courses) (e.g. MEMS, Micro and nano sensor technology, 3D material analysis, Functional materials, Thin films and surfaces)

28 %

Introduction to Project work, Soft skills

8 %

Project with seminar

8 %

Technical elective subjects (Choice of technical subject(s) from the master curricula)

4 %

Master thesis

25 %
Detaillierte Modulübersicht: Curriculum of the Master Program Micro- and Nanotechnologies (Module list)

Fields of work

  • Microelectronics
  • Microsystems Technology and Nanotechnology
  • Sensor Technology
  • Measurement Technology
  • Industrial Electronics
  • Power Engineering
  • Information Electronics
  • Medical Technology


Student advisory service

Study organisation

Cornelia Scheibe

+49 3677 69-2610