- Academic and examination regulations (German language)
- Academic and examination regulations (English translation)
- Previous versions of study and examination regulations are provided on the Intranet.
Application with German certificates
Application with foreign certificates
The master program Micro- and Nanotechnologies is designed non-consecutive. It is operated as a cooperation by the Department of Electrical Engineering and Information Technology, the Department of Mechanical Engineering and the Department of Mathematics and Natural Sciences. Students can acquire a Master's degree in Micro- and Nanotechnologies. The program is based on courses both in fundamental and engineering sciences and aims to deepens skills and competencies acquired from undergraduate studies or practical work experience in the field of micro- and nanotechnologies. The program is directed to students with a bachelor degree or to those who want to change over from a diploma program (needs to be individually checked) from the following courses: Electrical Engineering and Information Technology, Electronics, Mechanical Engineering, Mechatronics, Technical Physics or Materials Sciences and Engineering. All Bachelor's programs must have a high proportion of electrical engineering/electronics, semiconductor technology and solid-state physics.
For a self-assessment of the performance level we offer a test with this link.
The program is directed to bachelor graduates who have equally technical and scientific interest and who want to step up to the plate to deepen their understanding, the production and the instrumental mastery of micro structural elements, microsystems and various nano-objects in research, as well as to bring micro- and nanostructures and functional nanosystems to an industrial application.
The development of materials, structural elements and systems with key components with dimensions under about 0.1 μm has created a significant need for experts that can work at the interface between well-controlled lithographic microtechnology and molecular techniques.
The aim is to enable students within the concentration to advance future developments on micro- and nanotechnologies as well as nanotechnical systems.
Teaching language is English!
Obligatory Courses (e.g. Electronics Technology, Semiconductor devices, Materials of Micro- and Nanotechnologies, Nanodiagnostics, Nanotechnology, Micro Technologies, Laboratory for Materials & Micro/Nanofabrication)
Advanced Courses (Optional Courses) (e.g. MEMS, Micro and nano sensor technology, 3D material analysis, Functional materials, Thin films and surfaces)
Introduction to Project work, Soft skills
Project with seminar
Technical elective subjects (Choice of technical subject(s) from the master curricula)
Univ.- Prof. Dr.-Ing. Jens Müller
+49 3677 69-2606
+49 3677 69-2610