Short Profile

Master of Science
Restrictions on admission-Icon
Restrictions on admission
none | aptitude test neccessary
Standard period of study-Icon
Standard period of study
4 semester
Start of studies-Icon
Start of studies
October 1
Requirement for admission-Icon
Requirement for admission
Bachelor's degree in a similar field
Credit points-Icon
Credit points
Teaching language-Icon
Teaching language

Application with German certificates

Application with foreign certificates


The master program Micro- and Nanotechnologies is designed non-consecutive. It is operated as a cooperation by the Department of Electrical Engineering and Information Technology, the Department of Mechanical Engineering and the Department of Mathematics and Natural Sciences. Students can acquire a Master's degree in Micro- and Nanotechnologies. The program is based on courses both in fundamental and engineering sciences and aims to deepens skills and competencies acquired from undergraduate studies or practical work experience in the field of micro- and nanotechnologies. The program is directed to students with a bachelor degree or to those who want to change over from a diploma program (needs to be individually checked) from the following courses: Electrical Engineering and Information Technology, Electronics, Mechanical Engineering, Mechatronics, Technical Physics or Materials Sciences and Engineering. All Bachelor's programs must have a high proportion of electrical engineering/electronics, semiconductor technology and solid-state physics.

For a self-assessment of the performance level we offer a test with this link.

The program is directed to bachelor graduates who have equally technical and scientific interest and who want to step up to the plate to deepen their understanding, the production and the instrumental mastery of micro structural elements, microsystems and various nano-objects in research, as well as to bring micro- and nanostructures and functional nanosystems to an industrial application.

The development of materials, structural elements and systems with key components with dimensions under about 0.1 μm has created a significant need for experts that can work at the interface between well-controlled lithographic microtechnology and molecular techniques.

The aim is to enable students within the concentration to advance future developments on micro- and nanotechnologies as well as nanotechnical systems.

Teaching language is English!

Content of Study

Obligatory Courses (e.g. Electronics Technology, Semiconductor devices, Materials of Micro- and Nanotechnologies, Nanodiagnostics, Nanotechnology, Micro Technologies, Laboratory for Materials & Micro/Nanofabrication)

30 %

Advanced Courses (Optional Courses) (e.g. MEMS, Micro and nano sensor technology, 3D material analysis, Functional materials, Thin films and surfaces)

28 %

Introduction to Project work, Soft skills

8 %

Project with seminar

8 %

Technical elective subjects (Choice of technical subject(s) from the master curricula)

4 %

Master thesis

25 %
Detailed subject overview: Modultafel Micro- and Nanotechnologies (Master)

Fields of work

  • Microelectronics
  • Microsystems Technology and Nanotechnology
  • Sensor Technology
  • Measurement Technology
  • Industrial Electronics
  • Power Engineering
  • Information Electronics
  • Medical Technology

Jonas is studying Micro- and Nanotechnologies at the TU Ilmenau


Programme coordinator

Study organisation

Cornelia Scheibe

+49 3677 69-2610