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Phi, Hai Binh; Bohm, Sebastian; Runge, Erich; Strehle, Steffen; Dittrich, Lars;
Wafer-level fabrication of an EWOD-driven micropump. - In: MikroSystemTechnik Kongress 2021, (2021), S. 574-577

Schulz, Alexander; Bartsch, Heike; Gutzeit, Nam; Matthes, Sebastian; Glaser, Marcus; Ruh, Andreas; Müller, Jens; Schaaf, Peter; Bergmann, Jean Pierre; Wiese, Steffen;
Characterization of reactive multilayer systems deposited on LTCC featuring different surface morphologies. - In: MikroSystemTechnik Kongress 2021, (2021), S. 506-510

Salimitari, Parastoo; Reuter, Christoph; Krötschl, Anja; Strehle, Steffen;
Assembly of single-nanowires by combining soft transfer and surface controlled contact printing. - In: MikroSystemTechnik Kongress 2021, (2021), S. 442-445

Weigel, Christoph; Phi, Hai Binh; Akkad, Mohamad; Strehle, Steffen;
Effiziente Plasmastrukturierung komplexer Gläser mit polymeren Resistmasken durch statistische Versuchsplanung. - In: MikroSystemTechnik Kongress 2021, (2021), S. 422-425

Weigel, Christoph; Brokmann, Ulrike; Rädlein, Edda; Strehle, Steffen;
Maskless pattern transfer into photostructurable glasses by deep plasma etching. - In: MikroSystemTechnik Kongress 2021, (2021), S. 419-421

Mohr-Weidenfeller, Laura; Gropp, Sebastian; Azizy, Raschid; Müller, Björn; Bucklitsch, Paul; Müller, Jens; Strehle, Steffen;
Evaluation of a low-temperature fabrication technology for silicon-ceramic-composite-substrates. - In: MikroSystemTechnik Kongress 2021, (2021), S. 392-395

We evaluate a low-temperature fabrication process of silicon-ceramic-composite substrates that is dry film photoresist based interlayer film set between the silicon and the ceramic substrate. Adequate adhesion to silicon as well as to low-temperature cofired ceramics (LTCC) together with the existing long-term experience render polymeric photoresists as intriguing interlayer bond film. Due to their superior film thickness homogeneity and the fact that pre-defined surface features can be effectively balanced, we utilized in our study the commercial dry film photoresists Ordyl FP 415 and Ordyl SY 330. We fabricated in this regard successfully silicon-ceramic composite substrate that fully enabled UV-laser photolithography as well as plasma dry etching of silicon structures. We discuss furthermore, aspects of the utilized thermal treatment procedure comprising parameters like the interface bond strength as well as the wafer bow, the possibilities and limitations of an interface patterning and the overall long-term stability in wet and dry environment.

Kadic, Samir; Du, Tianxing; Roth, Astrid; Dörr, Aaron; Knapp, Michael; Hoffmann, Jochen; Serout, Anne; Strehle, Steffen; Lärmer, Franz;
Hoch-sensitive und vollautomatisierte Quantifizierung von zirkulierenden epithelialen Tumorzellen aus Vollblut. - In: MikroSystemTechnik Kongress 2021, (2021), S. 226-229

Mehner, Hannes; Schmitt, Philip; Hoffmann, Martin;
Mikrosysteme zur Messung von Haftreib- und Gleitreibfaktoren an DRIE geätzten Seitenwänden bei hohen Normalkräften im mN-Bereich. - In: MikroSystemTechnik Kongress 2021, (2021), S. 110-113

Weigel, Christoph; Phi, Hai Binh; Hoffmann, Martin; Sinzinger, Stefan; Strehle, Steffen;
Vergleich zur Plasmastrukturierbarkeit von Materialien mit sehr geringer thermischer Ausdehnung. - In: MikroSystemTechnik Kongress 2021, (2021), S. 51-54

Najeeb, Mussab; Schwalbe, Ulf; Bund, Andreas;
Development of a dynamic model of lithium ion battery pack for battery system monitoring algorithms in electric vehicles. - In: IEEE Xplore digital library, ISSN 2473-2001, (2021), S. P.1-P.10

The main objective of this paper is to develop an accurate and a self-corrective model for lithium ion battery pack, based on the analysis of properties and performance of equivalent circuit models of pack's cells and the use of artificial neural networks. This model is expected to meet the requirements for improving the accuracy of battery state estimation required for the monitoring algorithms of the battery system in electric vehicles.The use of the neural network will make it possible to adjust and correct modelling deviations and errors in equivalent circuit model parameters by comparing the modelled cells voltage and the measured voltage and generating modified model parameters based on this comparison.The validation experimental results show that the parameters of the modified model contributed to reducing the error rate in the cell voltage by approximately 70-80% of the error rate in the equivalent circuit model voltage.