Conference contributions

Anzahl der Treffer: 1994
Erstellt: Tue, 17 May 2022 23:07:36 +0200 in 0.0663 sec

Häcker, Annika-Verena; Mohr-Weidenfeller, Laura; Stolzenberg, Clara F. L.; Reinhardt, Carsten; Manske, Eberhard;
Modifications to a high-precision direct laser writing setup to improve its laser microfabrication. - In: SPIE digital library, Bd. 11989 (2022), S. 119890U-1-119890U-7

Two-photon-absorption (2PA) techniques enables the possibility to create extremely fine structures in photosensitive materials. For direct laser writing as micro- or nanofabrication a laser system can be combined with highly precise positioning systems. These are mostly limited by a few hundreds micrometer positioning range with applications based on piezoelectric stages or even just relatively few tens micrometer positioning range with applications based on galvanometer scanners. Although these techniques are precise, but stitching methods are required for larger fabrication areas. Therefore, a setup consisting of a femtosecond laser for 2PA and a nanopositioning and nanomeasuring machine (NMM-1) was developed for high precision laser writing on lager surfaces. Further developments of the system should enable a significant improvement in high-precision and stitching free direct laser writing. In order to combine the the femtosecond laser and the NMM-1 into a functional unit, to write complex structures with highest accuracy and homogeneity, further improvements like a beam expansion for a better use of the numerical aperture of the objective and a new femtosecond laser with a integrated power measurement are realized. This showed improvements in line width for nano strucuring. Advantages and disadvantages as well as further developments of the NMM-1 system will be discussed related to current developments in the laser beam and nanopositioning system optimization.
Thiele, Sebastian; Eliseyev, Ilya A.; Smirnov, Alexander N.; Jacobs, Heiko O.; Davydov, Valery Y.; Schwierz, Frank; Pezoldt, Jörg;
Electric bias-induced edge degradation of few-layer MoS2 devices. - In: Materials today, ISSN 2214-7853, Bd. 53 (2022), 2, S. 281-284

In this work, we experimentally investigate the effects of electric bias on the degradation of few-layer MoS2 back-gated field-effect transistors in ambient air. The devices were fabricated using mechanically exfoliated MoS2 flakes, which were transferred to a Si/SiO2 substrate by a PDMS-based transfer. We report an accelerated electric bias-induced degradation of the devices under investigation and used optical and scanning electron microscopy (SEM) to monitor changes of the morphology of the MoS2 channel. In particular, we found a linear dependency of the degradation on the electric field between the Ti/Au source and drain contacts. In addition, we identify four regions in which morphological changes occur, of which the edges of the MoS2 channel are most affected.
Mathew, Sobin; Lebedev, Sergey P.; Lebedev, Alexander A.; Hähnlein, Bernd; Stauffenberg, Jaqueline; Udas, Kashyap; Jacobs, Heiko O.; Manske, Eberhard; Pezoldt, Jörg;
Nanoscale surface morphology modulation of graphene - i-SiC heterostructures. - In: Materials today, ISSN 2214-7853, Bd. 53 (2022), 2, S. 289-292

A multitude gratings design consists of gratings with different pitches ranging from the micrometre down to sub 40 nm scale combined with sub 10 nm step heights modulating the surface morphology for length scale measurements is proposed. The surface morphology modulation was performed using electron beam lithography incorporating a standard semiconductor processing technology. The critical dimension, edge roughness, step heights and line morphology in dependence on the grating pitch is studied.
Dyck, Tobias; Bund, Andreas;
Investigation of the contact resistance as a function of the temperature for connectors and wire terminals. - In: 30th International Conference on Electrical Contacts, (2021), S. 202-209

The hardness of coating materials such as tin or gold is temperature-dependent, so the contact area and thus the contact resistance change depending on the temperature. Contact resistance measurements are carried out on hard gold- and tin-coated connector contacts at elevated temperatures. It is shown that the contact resistance decreases significantly with increasing temperature. Tests are also being carried out with solid and stranded copper wires. In addition to the hardness, foreign layers on the copper conductors have a further influence on the contact resistance.
Bohm, Sebastian; Grunert, Malte; Honig, Hauke; Wang, Dong; Schaaf, Peter; Runge, Erich; Zhong, Jinhui; Lienau, Christoph;
Optical properties of nanoporous gold sponges using model structures obtained from three-dimensional phase-field Simulation. - In: IEEE Xplore digital library, ISSN 2473-2001, (2021), S. 517-523

Nanoporous sponge structures show fascinating optical properties related to a strong spatial localization of field modes and a resulting strong field enhancement. In this work, a novel efficient method for the generation of three-dimensional nanoporous sponge structures using time-resolved phase-field simulations is presented. The algorithm for creating the geometries and the underlying equations are discussed. Different sponge geometries are generated and compared with sponges that have been experimentally measured using FIB tomography. Meaningful parameters are defined for the comparison of the geometric properties of the random sponge structures. In addition, the optical properties of the simulated sponges are compared with the experimentally measured sponges. It is shown that a description using effective media does not provide a good agreement to the actual spectra. This shows that the optical properties are largely determined by the local structures. In contrast, the numerically obtained spectra of the phase-field sponge models accounting for the real-space structure show excellent agreement with the spectra of the experimentally measured sponges.
Phi, Hai Binh; Bohm, Sebastian; Runge, Erich; Strehle, Steffen; Dittrich, Lars;
Wafer-level fabrication of an EWOD-driven micropump. - In: MikroSystemTechnik Kongress 2021, (2021), S. 574-577

Schulz, Alexander; Bartsch, Heike; Gutzeit, Nam; Matthes, Sebastian; Glaser, Marcus; Ruh, Andreas; Müller, Jens; Schaaf, Peter; Bergmann, Jean Pierre; Wiese, Steffen;
Characterization of reactive multilayer systems deposited on LTCC featuring different surface morphologies. - In: MikroSystemTechnik Kongress 2021, (2021), S. 506-510

Salimitari, Parastoo; Reuter, Christoph; Krötschl, Anja; Strehle, Steffen;
Assembly of single-nanowires by combining soft transfer and surface controlled contact printing. - In: MikroSystemTechnik Kongress 2021, (2021), S. 442-445

Weigel, Christoph; Phi, Hai Binh; Akkad, Mohamad; Strehle, Steffen;
Effiziente Plasmastrukturierung komplexer Gläser mit polymeren Resistmasken durch statistische Versuchsplanung. - In: MikroSystemTechnik Kongress 2021, (2021), S. 422-425

Weigel, Christoph; Brokmann, Ulrike; Rädlein, Edda; Strehle, Steffen;
Maskless pattern transfer into photostructurable glasses by deep plasma etching. - In: MikroSystemTechnik Kongress 2021, (2021), S. 419-421