Scanning probe techniques such as atomic force microscopy are highly relevant tools within the field of nanotechnology. In this project, field-emission scanning probes shall be explored for precise electron induced modifications of sensitive resists and 2D materials. The interaction of the field-emission tip with these materials and with the environment should be explored to enable new strategies for 3D nanopatterning with single-digit nanometer precision. In combination with a nanopositioning and nanomeasuring device and further techniques in a so-called “mix-and-match” approach, quantum electronic nanoscale devices should be assembled at large-scale and characterized with respect to the material and the electronic properties.
semiconductor and materials science
atomic force microscopy / scanning probe techniques
Compliant mechanisms are indispensable and functionally important parts of systems in nanofabrication technology. Synthesis of compliant mechanisms is often done using the rigid-body mechanisms as a model. Although these methods are always converging, the question of independently designing compliant mechanisms arises to use the vast variety of shapes that compliant mechanisms can have. Initial attempts have already been made to use neural networks. This is expected to enable advanced and novel solutions for nanopositioning and nanofabrication. The aim of this project is therefore to develop methods that bypass rigid-body mechanisms and directly generate new compliant mechanisms according to criteria from the field of nanopositioning, nanometrology and nanofabrication.