Scanning probe techniques such as atomic force microscopy are highly relevant tools within the field of nanotechnology. In this project, field-emission scanning probes shall be explored for precise electron induced modifications of sensitive resists and 2D materials. The interaction of the field-emission tip with these materials and with the environment should be explored to enable new strategies for 3D nanopatterning with single-digit nanometer precision. In combination with a nanopositioning and nanomeasuring device and further techniques in a so-called “mix-and-match” approach, quantum electronic nanoscale devices should be assembled at large-scale and characterized with respect to the material and the electronic properties. Key categories: - semiconductor and materials science
- electronic devices
- microtechnology
- atomic force microscopy / scanning probe techniques
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