Publikationen

The special issue about "Tip- and laser-based 3D nanofabrication in extended macroscopic working areas" in the journal Nanomanufacturing and Metrology is now online!

https://link.springer.com/journal/41871/volumes-and-issues/4-3

Publikationen der Grako-Mitglieder und assoziierter Teilnehmer

Hemeling C, Cherkasoca V, Fröhlich T, Kissinger T (2025). "Self-sensing multicore fiber probe for interferometric measurement of lateral displacement and force" Measurement 257 (2026) 118814, https://doi.org/10.1016/j.measurement.2025.118814
Reuter C, Strehle S (2025). "Sub-10 nm oxidation and etching of graphite using field emission scanning Probe lithography" Carbon Volume 245, October 2025, 120779, https://doi.org/10.1016/j.carbon.2025.120779
Belkner J, Stauffenberg J, Fan C, Koppka C, Kissinger T, Fröhlich T (2025). “Direct laser writing on 3d-substrates via differential confocal feedback,” in Optical and EUV Nanolithography XXXVIII, M. Burkhardt and C. van Lare, Eds., SPIE, Apr. 2025, p. 73., https://doi.org/10.1117/12.3051714
Belkner J, Leineweber J, Hein G, Stauffenberg J, Barth A, Kissinger T, Manske E, Fröhlich T (2025). “An integrated exposure and measurement tool for 5-DOF direct laser writing based on chromatic differential confocal sensing,” Journal of the European Optical Society-Rapid Publications, vol. 21, no. 1, L. De Stefano and R. Velotta, Eds., p. 27, 2025, issn: 1990-2573, https://doi.org/10.1051/jeos/2025017
Stauffenberg J, Manske E (2025). " "Nanometrologie und Nanofabrikation auf Basis spitzenbasierter Technologien in erweiterbaren makroskopischen Arbeitsbereichen" tm - Technisches Messen, vol. 92, no. s1, 2025, pp. 81-86. https://doi.org/10.1515/teme-2025-0061
Kaufmann T, Reger J (2025). "Indirect Adaptive Control using a Static Update Law", IFAC Symposium on Nonlinear Control Systems, Reykjavik Island, 23.07.2025
Stauffenberg J, Belkner J, Eisele S, Shmagun V, Straube G, Fischer-Calderon J.S., Blumröder U, Schwesinger F, Kissinger T (2025). "Range-resolved interferometry for metrological measurements using retroreflective microspheres", SPIE Optical Metrolog, München, 22.06. - 26.06.2025
Belkner J, Stauffenberg J, Eisele S, Fan C, Manske E, Kissinger T, Fröhlich T (2025). "Phase-modulated differential confocal microscopy with compensating algorithm against specimen-induced aberration", SPIE Optical Metrolog, München, 22.06. - 26.06.2025
Hoffmann M (2025). "Active control of refractive index of air", SPIE Optical Metrolog, München, 22.06. - 26.06.2025
Wolf M, Torres Melgarejo M A, Wittke M, Theska R (2025). "Reduction of the bending-torsion-stiffness ratio of flexure hinges based on stress-strain state transition", euspen’s 25th International Conference & Exhibition, Zaragoza, June 2025
Torres Melgarejo M A, Theska R (2025). "Novel in-situ fine adjustment system based on contactless energy transfer", euspen’s 25th International Conference & Exhibition, Zaragoza, June 2025
Wittke M, Torres Melgarejo MA, Wolf M, Fröhlich T, Theska R (2025). "High-precision force sensor for directly SI-traceable and orientation-independent measurements", euspen’s 25th International Conference & Exhibition, Zaragoza, June 2025
Shmagun V, Fröhlich T, Kissinger T (2025). "Compact fiber-coupled interferometric displacement sensors with strong suppression of parasitic reflections", euspen’s 25th International Conference & Exhibition, Zaragoza, June 2025
Wittke M (2025). "Novel Sensor Principle for High-Precision SI-Traceable Force Measurements" SMSI 2025 Conference - Sensor and Measurement Science International
Fan C, Leineweber J, Ortlepp I, Fröhlich T (2025). "Neu konzipiertes Messprogramm für eine Nanopositioniermaschine mit fünf Dimensionen", 126. DGaO Jahrestagung Stuttgart, 10.06. - 14.06.2025
Abhari P, Sinzinger S (2025). "Investigating Diffractive Optical Elements for Plasmonic Lithography Applications", 126. DGaO Jahrestagung Stuttgart, 10.06. - 14.06.2025
Zou X, Mastylo R, Kissinger T (2025) "Pre-Development Metrology Based on Focus Sensor and Nanopositioning Machine", 126. DGaO Jahrestagung Stuttgart, 10.06. - 14.06.2025
Wittke M (2025). "High-precision force sensor for directly SI-traceable and orientation-independent measurements", 25th International Conference of the European Society for Precision Engineering and Nanotechnology (2025)
Kaufmann T., Reger J (2025). "Indirect Adaptive Control Using a Static Update Law − Part I,” IFAC Symposium on Nonlinear Control Systems, Reykjavik,Iceland, (accepted), preprint available at: https://arxiv.org/abs/2412.10102
Hemeling C, Merker L, Zentner L, Kissinger T (2025). "Optical fibers used as structural sensing elements in a tensegrity structure for force measurement and localization", Konferenz Optical Fiber Sensors, Portugal, 25.05 - 31.05.2025
Hemeling C, Cherkasova, V, Fröhlich T, Kissinger T (2025). "Measuring tip deflection in multicore fiber optic probes based on fiber segment interferometry", Konferenz Optical Fiber Sensors, Portugal, 25.05 - 31.05.2025
Shmagun V., Fröhlich T., Kissinger T. (2025). Modulation waveform determination in sinusoidal frequency modulated interferometers. Manuscript submitted for publication, Measurement Science and Technology
Fan C, Leineweber J, Ortlepp I, Belkner J, Fröhlich T (2025). " New strategy for precision sphere measuring machine with five dimensions", 5. World Interferometry Day Symposium Ilmenau, 09.04.2025
Tietze N, Kaufmann T, Wulff K, Reger J (2025) "Increasing the estimated region of attraction for nonlinear systems stabilised at the linear approximation applying LgV control,” IFAC Symposium on Nonlinear Control Systems, Reykjavik, Iceland, 2025. (accepted)
Warnken N, Zentner L (2025): Untersuchungen zum Steifigkeitsverhalten von bistabilen Balken bei Einspannungsänderungen. In: 11. IFToMM D-A-CH Konferenz 2025: 20./21. Februar 2025, FH Kärnten, Villach 2025. https://doi.org/10.17185/duepublico/82922
Knechtel R, Seyring M, Wenig M, Hauck L, Rana A (März 2025). "The use of glasses in low-temperature wafer bonding processes", Japanese Journal of Applied Physics 64(4), DOI: 10.35848/1347-4065/adc00d
Warnken N, Zentner L (2025): Compliant Constant Force Guiding Mechanism. In: Duc-Nam Nguyen, Ngoc Dang Khoa Tran, Van Tuan Huynh, Takahito Ono, Van Hieu Nguyen und Ashok Kumar Pandey (Hg.): Microactuators, Microsensors and Micromechanisms, Bd. 177. Cham: Springer Nature Switzerland (Mechanisms and Machine Science), S. 12–21.
Kaufmann T., Reger J. (2025) "Singular Perturbation Analysis of Direct Adaptive Control Using a Proportional Integral Update Law,” IEEE Conference on Decision and Control, Rio de Janeiro, Brazil (under review)
Belkner J, Stauffenberg J, Fan C, Koppka C, Kissinger T, Fröhlich T. (22 April 2025). "Direct laser writing on 3D-substrates via differential confocal feedback", Proc. SPIE 13424, Optical and EUV Nanolithography XXXVIII, 134241E ; https://doi.org/10.1117/12.3051714
You J, Kim C-S, Joo K-N, Tan AS, Dietrich F, Pietscher H-G, Woszczyna M, Stauffenberg J, Fröhlich T, Manske E, Kissinger T, Rangelow IW (25 April 2025). "Ultra-fast correlative chemical-mechanical-polishing (CMP) metrology: Integrating Phase Shifting Interferometry with Active-Probe Scanning Probe Microscopy", Proc. SPIE 13427, Novel Patterning Technologies 2025, 134270K ; https://doi.org/10.1117/12.3050140
Kaufmann T., Reger J (2025). "Indirect Adaptive Control Using a Static Update Law − Part II,” IFAC Symposium on Nonlinear Control Systems, Reykjavik, Iceland, (accepted), preprint available at: https://arxiv.org/abs/2412.10102.
Stauffenberg J. (25 April 2025). "High-precision tip-based nanofabrication and nanometrology in extended macroscopic working areas", Proc. SPIE 13427, Novel Patterning Technologies 2025, 1342702 ; https://doi.org/10.1117/12.3050479
Cherkasova V, Hemeling C, Kissinger T, Fröhlich T (2025). "Measurement of optical fiber bending stiffness", Measurement: Sensors, https://doi.org/10.1016/j.measen.2024.101672
Brasil DA, Hesse S, Herzog L, Fröhlich T, Kissinger T (2025). "A virtual metrology frame test setup using fiber interferometric sensors" 22nd International Metrology Congress CI, Lyon, Frankreich, 11.03.2025 -14.03.2025

Brasil D A, Hesse S, Katzschmann M, Herzog L, Fröhlich T, Kissinger T (2024). "Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor", 20th International Conference on Precise Engineering, Sendai
Nüßlein J, Salimitari P, Strehle S (2024).” Soft plasmonic masks for optical sub wavelength UV-Lithography”; International conference on micro and nano Engineering: MNE 2024; poster presentation
Hauck L (2024). „Integration von additiven 3D-Multimaterialfertigungstechnologien in Realisierungsabläufe“ Tag der Ingenieurwissenschaften
Straube G, Hemeling C, Schwesinger F, Shmagun V, Barth A, Fischer Calderón J S, Kissinger T (2024). OpenRRI: Theory and application of open-source interferometry. In P. J. de Groot, F. Guzman, & P. Picart (Eds.), Optics and Photonics for Advanced Dimensional Metrology III (Vol. 12997, Paper 129971L). SPIE.
Wolf M, Wittke M, Torres Melgarejo M A, Theska R (2024). "Orientation-dependent behavior of miniaturized compliant mechanism for high-precision force sensors", euspen’s 24th International Conference & Exhibition, Dublin, June 2024
Vasilyan S, Shmagun V, Rogge N, Kissinger T, Fröhlich T (2024). Measurement methodology in photon momentum based laser power/small force measurements. In Proceedings of the 2024 Conference on Precision Electromagnetic Measurements (CPEM) (pp. 1–2). IEEE.
Stauffenberg J, Fischer Calderón J S, Belkner J, Manske E, Kissinger T (2024). "High Precision Large Area Atomic Force Microscopy using a planar
Nanopositioning Machine (NFM-100)" IWXM in Berlin
Ruprecht J, Su M, Hoffmann M, Ortlepp I (2024): "Spatial detection and localisation of multiple laserbeams in optical measuring systems", tm–Technisches Messen 2024,https://doi.org/10.1515/teme-2024-0103
Holz M, Hofmann M, Allen F, Weigel C, Strehle S (2024). "Tip-Induced 3D Printing on the Nanoscale with Field Emission Scanning Probes", Onlinelibrary wiley, https://doi.org/10.1002/smll.202409035
Wittke M, Wolf M, Torres Melgarejo M A, Theska R (2024). "Entwicklung kompakter Systeme für hochpräzise rückführbare Kraftmessungen", Deutsche Gesellschaft für Feinwerktechnik e.V., 17. Jahrestagung „Feinwerktechnische Konstruktion“ 26. & 27.09.2024 – SLUB Dresden
Weise C, Kaufmann T, Reger J (2024). "Model Reference Adaptive Control with Proportional Integral Adaptation Law", 2024 European Control Conference (ECC), Stockholm, Schweden, 25 - 28 June 2024, doi 10.23919/ECC64448.2024.10590935
Fan C, Leineweber J, Ortlepp I, Fröhlich T (2024). "Neu konzipiertes Messprogramm für eine Nanopositioniermaschine mit fünf Dimensionen", 125. DgaO Jahrestagung Aachen, 21.05. - 25.05.2024
Wittke M (2024). "Impact of higher-order surface imperfections on the stiffness of flexure hinges", Riemer, Oltmann. Proceedings of the 24th International Conference of the European Society for Precision Engineering and Nanotechnology, S.253-256
Azizy R, Reuter C, Dreßler L, Günther-Müller S, Strehle (2024). "Actuation platform for microtechnologically manufactured on-chip substrates for digital microfluidics", 12th Workshop of Chemical and Biological Micro Laboratory Technology Ilmenau, March, 20th- 22nd
Wittke M (2024). "Enhanced stiffness characterization of load cells by relative change of the natural frequency forced by a defined mass shift", Technisches Messen 91(10): S.524-532
Schamburek T, Feßer P, Sinzinger S (2024). "Free space coupling into whispering gallery mode (WGM) resonators – theory and experimental implementation", 125. DgaO Jahrestagung Aachen, 21.05. - 25.05.2024
Stauffenberg J, Belkner J, Dontsov D, Herzog L, Hesse S, Rangelow IW, Ortlepp I, Kissinger T, Manske E (2024). "Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)",Meas. Sci. Technol. 35 085011, https://doi.org/10.1088/1361-6501/ad4668
Günther-Müller S, Azizy R, Strehle S (2024). "Droplet Motion Driven by Liquid Dielectrophoresis in the Low-Frequency Range", Micromachines 2024, 15, 151, doi.org/10.3390/mi1501015
Schmidt L, Azizy R, Schricker K, Diegel C, Chen Y, Rack A, Bergmann J P (2024). "Describing the effect of local gas flow on keyhole and melt flow dynamics utilizing high-speed synchrotron X-ray imaging and numerical simulation", Procedia CIRP, Volume 124, 2024, Pages 553-558, doi.org/10.1016/j.procir.2024.08.173

Reuter C, Ecke G, Strehle S (2023). "Exploring the Surface Oxidation and Environmental Instability of 2H-/1T’-MoTe₂ Using Field Emission-Based Scanning Probe Lithography", Advanced Materials, https://doi.org/10.1002/adma.202310887
Shmagun V, Fröhlich T, Kissinger T (2023). "Periodic nonlinearities of the fiber interferometric sensor in comparison to commercial homodyne interferometer", NanoScale 2023, Helsinki Finnland, 09.10.-13.10.2023
Stauffenberg J, Belkner J, Ruprecht J, Ortlepp I, Manske E (2023). "Tip-based nanofabrication and nanometrology in combination with a planar nanopositioning machine (NFM-100)", 60^th Ilmenau Scientific Colloquium (ISC) 04.09. - 08.09.2023
Shmagun V, Gerhardt U, Manske E, Fröhlich T, Kissinger T (2023). "Resolution enhancement in Fabry-Perot interferometers through evaluation of multiple reflection using range-resolved interferometry", 60^th Ilmenau Scientific Colloquium (ISC) 04.09. - 08.09.2023
Wittke M, Torres Melgarejo MA, Darnieder M,Theska R (2023). "Investigation of a novel stiffness-compensated mechanism for high-precision load cells", 60^th Ilmenau Scientific Colloquium (ISC) 04.09. - 08.09.2023
Hebenstreit R, Theska R (2023). "Calibration of positioning microsystems with subatomic accuracy", 60^th Ilmenau Scientific Colloquium (ISC) 04.09. - 08.09.2023
Wolf M, Wittke M, Torres Melgarejo MA, Theska R (2023). "Scaling of a compliant mechanism for high-precision force measurement applications", 60^th Ilmenau Scientific Colloquium (ISC) 04.09. - 08.09.2023
Hahm C, Erbe T, Theska R (2023). "Cement-bound mineral casted parts in precision engineering", 60^th Ilmenau Scientific Colloquium (ISC) 04.09. - 08.09.2023
Belkner J, Stauffenberg J, Döll J, Koppka C, Breiter M, Ortlepp I, Gerhardt U, Manske E (2023). "High frequent, low noise and robust differential confocal microscopy on a Nano Positioning Machine", 60^th Ilmenau Scientific Colloquium (ISC) 04.09. - 08.09.2023
Huaman A, Reger J (2023). "Robust Adaptive Tracking Control of a 3D Vertical Motion Systems for Nanometer Precesion Applications", IFAC2023 Yokohama, Japan 08.07.2023 - 16.07.2023
Stauffenberg J, Reibe M, Krötschl A, Reuter C, Ortlepp I, Dontsov D, Hesse S, Rangelow I W, Strehle S, Manske E (2023). "Tip-based nanofabrication below 40 nm combined with a nanopositioning machine with a movement range of ⌀100 mm", Micro and Nano Engineering, Vol. 19, June 2023. DOI: 10.1016/j.mne.2023.100201
Wittke M, Torres Melgarejo MA, Darnieder M,Theska R (2023). "Modeling of very thin flexure hinges considering surface topography", EUSPEN: 23rd International Conference & Exihibition, Kopenhagen, 08.06.-16.06.2023
Hebenstreit R, Oertel E, Thier D, Manske E, Theska R (2023). "Investigating the kinematic performance of a positioning device with subatomic resolution" EUSPEN: 23rd International Conference & Exihibition, Kopenhagen, 08.06.-16.06.2023
Weigert F (2023). "Highly reproducible force application for a tool-changing system in nanofabrication machines", EUSPEN: 23rd International Conference & Exihibition, Kopenhagen, 08.06.-16.06.2023
Belkner J, Stauffenberg J, Görner Tenorio C, Ortlepp I, Eberhard M (2023). "Double pass modulated differential confocal microscopy for
closed loop axial control of direct laser writing", SPIE Optical Metrology, München 26.06.-28.06.23
Schamburek T, Behrens A, Dötzer F, Sinzinger S (2023). "Deformed 2.5D whispering gallery mode microresonators – numerical investigation of free space coupling", 124. DgaO Jahrestagung Berlin, 27.05.-03.06.2023
Lukin N, Waleed M, Ahmad S, Sinzinger S (2023). "Herstellung und Design holographisch-optischer Bauelemente für optisches Rechnen",124. DgaO Jahrestagung Berlin, 27.05.-03.06.2023
Wittke M, Darnieder M, Torres Melgarejo MA, Theska R (2023). "Novel Method for Determining the Mechanical Stiffness of Weighing Cells", SMSI Konferenz Nürnberg, 08.05. -11.05.2023
Ortlepp I (2023). "Current Advances in 3D Tip and Laser based
Nanofabrication in Extended Working Areas", SMSI Konferenz Nürnberg, 08.05. -11.05.2023
Shmagun V, Kissinger T, Fröhlich T (2023). "Fiber interferometric sensor for velocity measurement in the Planck-Balance", SMSI Konferenz Nürnberg, 08.05. -11.05.2023

Weigert F, Wolf M, Theska R (2022). „Model-based determination of the reproducibility of kinematic couplings”, Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology / European Society for Precision Engineering and Nanotechnology International Conference & Exhibition 22. 2022 Genf. - Bedford, UK : euspen, 2022, S. 87-90
Mathew S, Lebedev S, Lebedev AA, Hähnlein B , Stauffenberg J, Manske E, Jörg P (2022). „Silicon Carbide – Graphene nano gratings on 4H and 6H semi-insulating SiC“ Materials Science Forum. ISSN: 1662-9752, Vol. 1062, pp 170-174. doi:10.4028/p-wn4zya.
Hesse S, Katzschmann M, Huaman A S, Gorges S, Manske E (2022). "Operation and performance evaluation of vertical nanopositioners for 10 mm stroke in a 3D lift and tilt test setup", in Euspen Special Interest Group (SIG) on Precision Motion Systems & Control meeting, Brabanthallen’s-Hertogenbosch, NL, 15.11 - 16.11.22
Huaman A S, Reger J (2022). "Robust tracking control with L1 adaptive augmentation for a long-stroke vertical nanopositioning system: Part I", in 2022 IEEE Conference on Control Technology and Applications (CCTA), pp. 614-620, 2022
Huaman A S, RegerJ (2022). "Robust tracking control with L1 adaptive augmentation for a long-stroke vertical nanopositioning system: Part II", in 2022 IEEE Conference on Control Technology and Applications (CCTA), pp. 621-627, 2022
Mathew S, Narasimha S, Reiprich J, Scheler T, Hähnlein B, Thiele S, Stauffenberg J, Kurtash V, Abedin S, Manske E, Jacobs H O, Pezoldt J (2022). “Formation and Characterization of Three-Dimensional Tetrahedral MoS₂ Thin Films by Chemical Vapor Deposition”,Crystal Growth & Design, https://doi.org/10.1021/acs.cgd.2c00333
StauffenbergJ, Ortlepp I, Belkner J, Dontsov D, Langlotz E, Hesse S, Rangelow I W, Manske E (2022). „Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm”, Appl. Sci. 2022, 12, 7843, https://doi.org/10.3390/app12157843
Reuter C, Strehle S (2022). „Resistless Nanopatterning of 2D Materials by Field Electron Emission Scanning Probe Lithography“ Graphene 2022, Aachen, 04.07.-08.07.2022
Leineweber J, Meyer C, Füßl R, Theska R, Manske E (2022). “Ein neuartiges Konzept für 5D Nanopositionier-, Nanomess-,und Nanofabrikationsmaschinen”, tm – Technisches Messen 2022
Huaman A S, Gorges S, Katzschmann M, Hesse S, Fröhlich T, Manske E (2022). "Investigations on the tracking control and performance of a long stroke vertical nanopositioning drive", 22nd euspen International Conference, Geneva, CH, 30.05.-03.06.2022
Hebenstreit R, Wedrich K, Strehle S, Manske E, Theska R (2022). “First prototype of a positioning device with subatomic resolution”, euspen 22nd international conference and exhibition, Geneva, 30.05.-03.06.22, S.97-100. ISBN: 978-1-9989991-1-8
Wittke M, Wolf M, Darnieder M, Weigert F, Gerlach E, Zimmermann K, Theska R (2022).” Investigations on a torque-compensating adjustment drive for mechanically sensitive devices.”. Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), May 30th – June 3rd 2022. Genf, Schweiz, ISBN: 978-1-9989991-1-8
Wittke M, Torres Melgarejo M, Theska R (2022). „Concept of a monolithic stiffness-compensated mechanism for high-resolution force sensors”, 21. IGT/GMA Fachtagung Sensoren und Messsysteme, Nürnberg, 10.05.-11.05.22, S.461-464. ISBN: 978-3-8007-5835-7
Ortlepp I, Stauffenberg J, Krötschl A, Dontsov D, Zöllner J-P, Hesse S, Reuter C, Strehle S, Fröhlich T, Rangelow I W, Manske E (2022). "Nanofabrication and -metrology by using the nanofabrication machine (NFM-100)", Proc. SPIE 12054, Novel Patterning Technologies 2022, 120540A (25 May 2022); https://doi.org/10.1117/12.2615118
Belkner J, Stauffenberg J, Häcker A-V, Ortlepp I, Manske E (2022). „Amplituden- und Phasenmodulation in der Lock-In gefilterten differentiellen konfokalen Profilometrie“, ITG-Fb. 303: Sensoren und Messsysteme / VDE Verlag. - Neuerscheinung. - Berlin : VDE VERLAG, S. 235-244
Seminario R, Schmitt C, Weise C, Reger J (2022). "Control of an Overactuated Nanopositioning System with Hysteresis by Means of Control Allocation," 2022 IEEE 17th International Conference on Advanced Motion Control (AMC), 2022, pp. 280-287, doi: 10.1109/AMC51637.2022.9729294
Poroskun I, Rothleitner C, Heißelmann D (2022). „Structure of digital metrological twins as software for uncertainty estimation”, J. Sens. Sens. Syst., 11, 75–82, doi.org/10.5194/jsss-11-75-2022

Stauffenberg J, Ortlepp I, Manske E (2021). „Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control”, Sensors 2021, 21, 5862, https://doi.org/10.3390/s21175862
Stauffenberg J, Reibe M, Ortlepp I, Holz M, Dontsov D, Hesse S, Rangelow I W, Manske E (2021). “Combining nanometrology and nanomanufacturing using a Nanofabrication Machine (NFM-100)”, EuFN and Fit4Nano Joint Workshop/Meeting, 27th-29th September 2021 in Vienna
Behrens A, Bosch M, Fesser P, Hentschel M, Sinzinger S (2021) „Diffractive optical coupling elements for microresonators“, OSA Advanced Photonics Congress, 26.07.- 30.07.2021, virtual
Behrens A, Fesser P, Bosch M, Hentschel M, Sinzinger S (2021). “Whispering Gallery Resonators with diffractive coupling elements”, MikroSystemTechnik Kongress 2021 / VDE Verlag. - Berlin: VDE Verlag, 2021, S. 230-233
Belkner J, Manske E (2021). "Verfahren und Vorrichtung zur Kompensation von instationären Aberrationen bei der konfokalen Vermessung einer Probenoberfläche", priority: 2020-03-26, published: 2021-07-15, DE102020108333B3, assignee: Technische Universität Ilmenau, 98693 Ilmenau
Belkner J, Ortlepp I, Gerhardt U, Manske E (2021). "Compensating aberration induced error in differential confocal microscopy", Proc. SPIE 11782, Optical Measurement Systems for Industrial Inspection XII, 117820P (20 June 2021); https://doi.org/10.1117/12.2592392
Stauffenberg J, Ortlepp I, Blumröder U, Dontsov D, Schäffel C, Holz M, Rangelow I W, Manske E:Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100) / Untersuchungen zur Positioniergenauigkeit der NanoFabrikationsmaschine (NFM-100), Technisches Messen, 2021, https://doi.org/10.1515/teme-2021-0079
Florian Fern, Roland Füßl, Eberhard Manske, Ralf Schienbein, René Theska, Ingo Ortlepp und Johannes Leineweber: Messunsicherheitsbetrachtungen an einem fünfachsigen Nano-Koordinatenmessgerät NMM-5D nach einem vektoriellen Ansatz. In tm - Technisches Messen, Band 88 Heft 2, De Gruyter Oldenbourg | 2021, https://doi.org/10.1515/teme-2020-0092
Jaqueline Stauffenberg, Christoph Reuter, Ingo Ortlepp, Mathias Holz, Denis Dontsov, Christoph Schäffel, Jens-Peter Zöllner, Ivo W. Rangelow, Steffen Strehle and Eberhard Manske: Nanopositioning and -fabrication using the Nano Fabrication Machine with a positioning range up to Ø 100 mm. In: SPIE Advanced Lithography Proceedings, 11610-35 (2021), https://doi.org/10.1117/12.2583703
Cherkasova, V, Dannberg O, Fröhlich T (2021): A Control Concept of a Compensation Load Cell in Terms of Calibration a Cantilever, SMSI Konferenz 03.05.-06.05.2021, Online Forum, Nürnberg
Huaman A S, Katzschmann M, Hesse S, Schäffel C, Weise C, Dontsov D, Manske E, Reger J (2021): Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control, IEEE ICM 2021, International Conference on Mechatronics, Kashiwa, Japan, 7-9 March 2021
Weigert F (2021). „Investigations on low-friction kinematic couplings based on compliant mechanisms “, Euspen 21st International Conference & Exhibition: Virtual 07.-10.06.2021

Belkner J, Hofmann M, Kirchner J, Manske E, 2020, "Demonstration of aberration-robust high-frequency modulated differential confocal microscopy with an oscillating pinhole", Proc. SPIE 11352, Optics and Photonics for Advanced Dimensional Metrology, 113520N (2020),
https://doi.org/10.1117/12.2555558
Stauffenberg J, Durstewitz S, Hofmann M, Ivanov T, Holz M, Ehrhardt W, Riegel W-U, Zöllner J-P, Manske E, Rangelow I W (2020). “Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers”, Journal of sensors and sensor systems. -Göttingen: Copernicus Publ., ISSN: 2194-878X, ZDB-ID: 2733700-5, Bd. 9.2020, 1, Seite 71-78, https://doi.org/10.5194/jsss-9-71-2020
Reuter C, Holz M, Reum A, Fahrbach M, Peiner E, Brand U, Hofmann M, Rangelow I W (2020). „Applications of tactile microprobes for surface metrology”, SMSI 2020, Nürnberg Wunstorf: AMA Service GmbH, S. 87-88, https://doi.org/10.5162/SMSI2020/A6.2
Hebenstreit R, Theska R, Wedrich K, Strehle S (2020). „Conceptional design of a positioning device with subatomic resolution and reproducibility”, Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology. 2020, S. 305-306
Germanow P, Mehring P, Neumann H, Augustin S, Fröhlich F, Krapf G (2020). „Vergleich verschiedener Methoden zur experimentellen Bestimmung der Inhomogenität von Thermoelementen“, GMA/ITG-Fachtagung Sensoren und Messsysteme; 20 (Nürnberg) : 2019.06.25-26, Technisches Messen, Bd. 87.2020, 3, Seite 146-152
Behrens A, Bosch M, Fesser P, Hentschel M, Sinzinger S (2020). „ Fabrication and characterization of deformed microdisk cavities in silicon dioxide with high Q-factor”, Applied optics / Optical Society of America. - Washington, DC, Bd. 59.2020, 26, Seite 7893-7899, https://doi.org/10.1364/AO.398108
Behzadirad M, Rishinaramangalam A K, Feezell D, Busani T, Reuter C, Reum A, Holz M, Gotszalk T, Mechold S, Hofmann M, Ahmad A, Ivanov T, Rangelow I W (2020). “Field emission scanning probe lithography with GaN nanowires on active cantilevers”, Journal of vacuum science and technology. Nanotechnology & microelectronics, ISSN: 2166-2746 , ZDB-ID: 797726-8, Bd. 38.2020, 3, Seite 032806-1-032806-6
Weidenfeller, L., Hofmann, M., Supreeti, S., Mechold, S., Holz, M., Reuter, C., Manske, E. & Rangelow, I. W. (2020). "Cryogenic etching for pattern transfer into silicon of Mix-and-Match structured resist layers", Microelectronic Engineering, 111325. https://doi.org/10.1016/j.mee.2020.111325
Dannberg O, Kühnel M, Fröhlich F, 2020, "Entwicklung einer Cantileverkalibriereinrichtung", tm-Technisches Messen, aop, https://doi.org/10.1515/teme-2020-0064
Fern F, Füßl R, Eichfelder G, Manske E, Kuehnel M, 2020, "Coordinate transformation and its un-certainty under consideration of a non orthogonal coordinate base", Accepted Manuscript online 8 July 2020, Published by IOP Publishing Ltd in Measurement Science and Technology https://doi.org/10.1088/1361-6501/aba3f5
Ortlepp I, Kühnel M, Hofmann M, Weidenfeller L, Kirchner J, Supreeti S, Mastylo R, Holz M, Michels T, Füßl R, Rangelow I.W, Fröhlich T, Dontsov D, Schäffel C, Manske E, 2020, "Tip- and laser-based nanofabrication up to 100 mm with sub-nanometre precision", Proc. SPIE 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS, 113240A (23 March 2020), https://doi.org/10.1117/12.2551044
Hofmann M, Weidenfeller L, Supreeti S, Mechold S, Holz M, Reuter C, Sinzinger S, Manske E, Rangelow I.W.; “Mix-and-match lithography and cryogenic etching for NIL template fabrication”, Microelectronic Engineering, Volume 224, 111234 (2020) https://doi.org/10.1016/j.mee.2020.111234
Ortlepp I, Kühnel M, Hofmann, M, Weidenfeller, L, Kirchner, J, Supreeti, S, Mastylo, R, Holz, M, Michels T, Füßl, R, Rangelow,I, Fröhlich, T, Donstov, D, Schäffel C, Manske, E, “Tip- and Laser based nanofabrication up to 100 mm with sub-nanometer precision” in SPIE Advanced Lithography 2020, San Jose, USA (24th-27th February 2020) https://doi.org/10.1117/12.2551044
Fern F; Füßl R; Eichfelder G; Manske E; Kühnel M: "Coordinate transformation and its uncertainty under consideration of a non orthogonal coordinate base" In: Measurement Science and Technology, 2020 https://doi.org/10.1088/1361-6501/aba3f5
Nilsen M, Dannberg O, Fröhlich T, Strehle S: "Direct polymer microcantilever fabrication from free-standing dry film photoresists" In: J. Micromech. Microeng.30 (2020) 095012 https://doi.org/10.1088/1361-6439/ab9e4c
Fischer D, Sinzinger S: "Evaluation of quadratic phase hologram calculation algorithms in the Fourier regime" Appl. Opt. 59, pp. 1501–1506 (2020). https://doi.org/10.1364/AO.381547
Kapp D, Weise C, Ruderman M, and Reger J: "Fractional-Order System Identification of Viscoelastic Behavior: A Frequency Domain Based Experimental Study", In Advanced Motion Control, 2020, DOI: 10.1109/AMC44022.2020.9244449
Weise C, Tavares R, Wulff K, Ruderman M, and Reger J: "A Fractional-Order Control Approach to Ramp Tracking with Memory-Efficient Implementation", In Advanced Motion Control, 2020, DOI:10.1109/AMC44022.2020.9244309
Weise C, Wulff K, and Reger J: "Extended Fractional-Order Memory Reset Control for Integer-Order LTI Systems and Experimental Demonstration", In IFAC World Congress, Berlin, 2020.

J. Kirchner, R. Mastylo, U. Gerhardt, T. Sasiuk, L. Weidenfeller, M. Hofmann, M. Kühnel, S. Sinzinger, E. Manske: Fasergekoppelter konfokaler Sensor zur exakten Abstandsregelung für maskenlose Lithografieanwendungen, 20. GMA/ITG-Fachtagung Sensoren und Messsysteme, 2019
Johannes Kirchner, Laura Weidenfeller, Uwe Gerhardt, Rostyslav Mastylo, Michael Kühnel, Stefan Sinzinger, Eberhard Manske, "A combined laser scanning and DLW tool for measuring and fabrication tasks with NPMM," Proc. SPIE 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, 1093017, 2019
Ralf Schienbein, Florian Fern, René Theska, Roland Füßl: On the development and qualification of multiaxial designs of nanofabrication machines with ultra precision tool rotations, euspen’s 19 th International Conference & Exhibition, Bilbao, ES, June 2019
Shraddha Supreeti, Johannes Kirchner, Martin Hofmann, Rostyslav Mastylo, Ivo W. Rangelow, Eberhard Manske, Martin Hoffmann, Stefan Sinzinger, "Integrated soft UV-nanoimprint lithography in a Nanopositioning and Nanomeasuring Machine for accurate positioning of stamp to substrate", Proc. SPIE 10958, Novel patterning technologies for semiconductors, MEMS/NEMS, and MOEMS, 2019
Laura Weidenfeller, Johannes Kirchner, Martin Hofmann, Michael Kühnel, Carsten Reinhardt, Ivo Rangelow, Eberhard Manske, "Laser-microfabrication with accurate positioning and metrological traceability," Proc. SPIE 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, 2019
Weidenfeller L, Manske E, et al, 2019, Micro- and nanofabrication technologies using the nanopo-sitioning and nanomeasuring machines, Proc. SPIE 11056, Optical Measurement Systems for In-dustrial Inspection XI, 1105637 (21 June 2019), doi: 10.1117/12.2528136
X. Cao and S. Sinzinger, "Opto-Mechatronic System for Control and Characterization of the Coherence Properties of Light Sources," 2019 IEEE International Conference on Mechatronics (ICM), Ilmenau, Germany, 2019, pp. 141-145.
Weidenfeller, L., Hofmann, M., Kirchner, J., Supreeti, S., Rangelow, I. W., Sinzinger, S., & Manske, E. (2019). Micro-and nanofabrication technologies using the nanopositioning and nanomeasuring machines. In Optical Measurement Systems for Industrial Inspection XI (Vol. 11056, p. 1105637). International Society for Optics and Photonics.
Fern F, Schienbein R, Füßl R, 2019, Neues Konzept für eine fünfachsige Nanomessmaschine, Messunsicherheit - Prüfprozesse 2019, Düsseldorf, VDI Verlag GmbH, S. 131-138
Fern F, Schienbein R, Füßl R, et al, 2019, In situ error measurement of serial rotational devices for the application in nano coordinate measuring machines, Technisches Messen 86, Supplement 1, pp. 77-81
Sasiuk T, Fröhlich T, Theska R, Darnieder M, 2019, Generation of a static torque in the range of 1 mNm to 1 Nm according to the Jokey-weight principle, Messunsicherheit - Prüfprozesse 2019, Düsseldorf, VDI Verlag GmbH, S. 111-120
Hofmann M, Mecholdt S, Mohr M, Holz M, Dallorto S, Manske E, Fecht H-J, and Rangelow I.W; "Nanoscale lift-off process using field emission scanning probe lithography”, JVSTB 37, 061803 (2019) https://doi.org/10.1116/1.5122272

Florian Fern, Roland Füßl, Ralf Schienbein and René Theska: Influence of additional rotational movements on the measurement uncertainty of nanomeasuring, nanopositioning and nanofabrication machines, Sensoren und Messsysteme, 26. – 27. Juni, Nürnberg, 2018
David Fischer, Stefan Sinzinger: Maskenlose Lithographie für die dreidimensionale Mikrostrukturierung, DGaO-Proceedings, 2018
S. Gorges, S. Hesse: Design and Modeling Approach for a Lifting and Actuating Unit for the Applica-tion in Nano-Precision Machines. American Society for Preci-sion Engineering – Annual Meeting, 2018, Las Vegas – USA
Martin Hofmann, Claudia Lenk, Tzvetan Ivanov, Ivo W. Rangelow, Alexander Reum, Ahmad Ahmad, Mathias Holz and Eberhard Manske: Field Emission from Diamond Nanotips for Scanning Probe Lithography, Journal of Vacuum Science & Technology B 36, 06JL02, 2018
Martin Hofmann, Cemal Aydogan, Claudia Lenk, Yana Krivoshapkina, Steve Lenk, Burkhard Volland, Marcus Kaestner, Burhanettin Erdem Alaca, Eberhard Manske, Ivo Rangelow, Selective Pattern Transfer of Nano-Scale Features Generated by FE-SPL in 10 nm Thick Resist Layers, American Journal of Nano Research and Applications. Vol. 6, No. 1, 2018
Ralf Schienbein, Florian Weigert, Florian Fern, René Theska, Roland Füßl: The implementation of ultra precision rotations to multiaxial nanofabrication machines: challenges and solution concepts, euspen’s 18 th International Conference &Exhibition, Venice, IT, June 2018
Laura Weidenfeller, Ralf Schienbein, Johannes Kirchner, Carsten Reinhardt, Eberhard Manske, "Development of laser positioning system of high accuracy in the nanometer range," Proc. SPIE 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, 2018
X. Cao, P. Feßer, D. Fischer, M. Hofmann, Y. Bourgin, S. Sinzinger: Der Lau-Effekt in der lithographischen Mikro-Nanostrukturierung, DGaO-Proceedings 2018
H. Speck, X. Cao, T. Meinecke, S. Sinzinger: Phase Retrieval mit Hilfe verstimmbarer Optiken für die Fourier Ptychographie, DGaO-Proceedings 2018

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