To achieve further improvements in the performance of the NanoFab nanopositioning devices, new approaches for dynamic deformation and vibration measurement are required. In this project, highly dynamic position and angle measurement by means of fibre-optic interferometry shall be developed to measure dynamic changes in tool alignment and positioning
in a highly dynamic manner to determine position and angle changes between tool and workpiece for enabling a readjustment. An important sub-task is the metrological qualification of the fibre measurement system, especially with regard to its long- term stability.
- fibre optics
- control engineering