Sub-project B

A well-established approach for the design of microstructured diffractive beam shaping elements is based on the iterative Fourier transform algorithm. The highly nonlinear challenge of the design of microoptical elements is addressed in an iterative approach where the final designs are often closely related to “distorted” microlens arrays. For the fabrication this opens a way for the separation of the microlens distribution (fabricated efficiently and precisely with established technologies) and the distortions (fabricated by nanolithography on these microlenses) resulting in a new mix and match fabrication procedure for optimized beam shaping performance. The goal of the project is to investigate the potential of this approach and to further generalize and adapt it to the fabrication potential in mix-and-match lithography.

Key categories:

• Fourier optics /  beam shaping optical elements
• micro- and nanofabrication technologies
• experimental analysis of optical systems

This project targets the parallelization and fast position control of beams in an optical lithography process by means of optical beam shaping and beam steering elements with freely selectable 3D beam distribution. This shall allow to write different structures simultaneously at different positions and depths of the sample and a fast local dose control. To meet metrological requirements, the positions of the writing beams must be actively controlled. In addition, efficient writing strategies have to be developed to fully exploit the potential of the new approach. The achieved performance should be demonstrated in suitable example applications within the scope of NanoFab.

Key categories:

• optics / optical lithography
• nanometrology
• control engineering
• resist technology