Adaptive control methods can reduce the influence of structured disturbances on the positioning accuracy of nanopositioning devices. In this project, various approaches are to be investigated to improve the control accuracy. In addition, novel concepts of reset controllers for a robust nominal controller are to be investigated. There, friction effects have to be taken into account, causing hysteresis in the input/output representation. A key aspect is the stability investigation of an adaptive reset system, which results from the hybrid nominal controller and the adaptive disturbance compensation. The nominal reset controller is to be designed and tested simulatively with regard to the characterised disturbances. Finally, the elaborated concept is to be tested experimentally during positioning and can be adapted to further control tasks in the context of nanofabrication (e.g. control of laser power).
- control theory
- friction models
- nanopositioning, nanometrology