Publikationen

Line Edge Roughness Metrology Software
Sertac Guneri, Yazgi, Tzvetan Ivanov, Mathias Holz, Ivo W. Rangelow, B. Erdem Alaca
Journal of Vacuum Science & Technology B 38 (1) (2020)
DOI: 10.1116/1.5122675

Mix-and-match lithography and cryogenic etching for NIL template fabrication
Martin Hofmann et al.
Microelectronic Engineering (26 Jan 2020)
doi: 10.1016/j.mee.2020.111234

High-throughput process chain for single electron transistor devices based on fieldemission scanning probe lithography and Smart Nanoimprint lithography technology
Claudia Lenk, Yana Krivoshapkina, Martin Hofmann, Steve Lenk, Tzvetan Ivanov, Ivo W. Rangelow, Ahmad Ahmad, Alexander Reum, Mathias Holz, Thomas Glinsner, Martin Eibelhuber, Dominik Treiblmayr, Barbara Schamberger, Mustapha Chouiki, Boon Teik Chan, Ziad el Otell, and Jean-François de Marneffe
Journal of Vacuum Science & Technology B 37, 021603 (2019);
doi: 10.1116/1.5067269

Laser-microfabrication with accurate positioning and metrological traceability
Laura Weidenfeller, Johannes Kirchner, Martin Hofmann, Michael Kühnel, Carsten Reinhardt, Ivo Rangelow, and Eberhard Manske
Proc. SPIE 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, 109300L (4 March 2019)

Probe-induced resistive switching memory based on organic-inorganic lead halide perovskite materials
Abbas Shaban, Mojtaba Joodaki, Saeed Mehregan, Ivo W. Rangelow
Organic Electronics 69 106–113, (11 March 2019)
doi: 10.1016/2019.03.019

Integrated soft UV-nanoimprint lithography in a nanopositioning and nanomeasuring machine for accurate positioning of stamp to substrate
Shraddha Supreeti, Johannes Kirchner, Martin Hofmann, Rostyslav Mastylo, Ivo W. Rangelow, et al.
Proc. SPIE 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS, 2019, 1095819 (26 March 2019)
doi: 10.1117/12.2514832

Tip-based nano-manufacturing and -metrology editors-pick
Teodor Gotszalk, Grzegorz Jóźwiak, Jacek Radojewski, Thomas Fröhlich, Roland Füssl, Eberhard Manske, Mathias Holz, Tzvetan Ivanov, Ahmad Ahmad, and Ivo W. Rangelow
Journal of Vacuum Science & Technology B 37, 030803 (2019)
doi: 10.1116/1.5083044

High throughput AFM inspection system with parallel active cantilevers
M. Holz, C. Reuter, A. Reum, A. Ahmad, M. Hofmann, T. Ivanov, I. W. Rangelow, J. Stauffenberg, E. Manske, C. Du, X. Q. Zhou, N. Okamoto, A. N. Takashima, H. S. Lee
Proc. SPIE 11148, Photomask Technology 2019, 111481E (26 Sept 2019)
doi: 10.1117/12.2537009

Atomic force microscope integrated into a scanning electron microscope for fabrication and metrology at the nanometer scale
Mathias Holz, Christoph Reuter, Alexander Reum, Ahmad Ahmad, Martin Hofmann, et al.
Proc. SPIE 11148, Photomask Technology 2019, 111481F (26 Sept 2019)
doi: 10.1117/12.2537018

Atomic layer etching of SiO2 with Ar and CHF 3 plasmas: A self‐limiting process for aspect ratio independent etching
Stefano Dallorto, Andy Goodyear, Mike Cooke, Julia E. Szornel, Craig Ward, Christoph Kastl, Adam Schwartzberg, Ivo W. Rangelow, Stefano Cabrini
Plasma Processes And Polymers, Volume16, Issue9, Special Issue: Plasmas for Microfabrication (September 2019)
doi: 10.1002/ppap.201900051

Nanoscale lift-off process using field emission scanning probe lithography
Martin Hofmann, Stephan Mecholdt, Markus Mohr, Mathias Holz, Stefano Dallorto, Eberhard Manske, Hans-Jörg, Fecht, and Ivo W. Rangelow
Journal of Vacuum Science & Technology B 37, 061803 (04 Oct 2019)
doi: 10.1116/1.5122272

Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing
Piotr Kunicki, Tihomir Angelov , Tzvetan Ivanov , Teodor Gotszalk, and Ivo W. Rangelow
Sensors 19, 4429 (12 Oct 2019)
www.mdpi.com/journal/sensors
doi:10.3390/s19204429

Correlative Microscopy and Nanofabrication with AFM Integrated with SEM
Mathias Holz, Christoph Reuter, Ahmad Ahmad, Alexander Reum, Martin Hofmann, Tzvetan Ivanov, and Ivo W. Rangelow
Microscopy Today November 2019 (31 Oct 2019)
www.microscopy-today.com
doi: 10.1017/S1551929519001068

Tip-based electron beam induced deposition using active cantilevers
Mathias Holz, Frances I. Allen, Christoph Reuter, Ahmad Ahmad, Martin Hofmann, Alexander Reum, Tzvetan Ivanov, and Ivo W. Rangelow
Journal of Vacuum Science & Technology B 37, 061812 (21 Nov 2019)
doi: 10.1116/1.5123287

Temperature and oxygen concentration effects on anisotropy in chromium hard mask etching for nanoscale fabrication
Daniel Staaks, Zhaoning Yu, Scott D. Dhuey, Simone Sassolini, Kim Y. Lee, Ivo W. Rangelow, Deirdre L. Olynick
Journal of Vacuum Science & Technology A 37, 061306 (21 Nov 2019)
doi: 10.1116/1.5123397

Profile simulation model for sub-50nm cryogenic etching of silicon using S F 6 / O 2 inductively coupled plasma
V. Ishchuk, D.L. Olynick, Z. Liu and I.W. Rangelow
Citation: Journal of Applied Physics 118, 053302 (2015); doi: 10.1063/1.4927731
View online: dx.doi.org/10.1063/1.4927731

Determination of AFM-Cantilever spring constants using the TU Ilmenau force displacement measurement device
Ch. Diethold, M. Kühnel, Tzv. Ivanov, I.W. Rangelow and Th. Fröhlich
XXI IMEKO World Congress "Measurement in Research and Industry" August 30 - September 4, 2015, Prague, Czech Republic

Optical probe for nondestructive wafer- scale characterization of photonicelements
T. Michels, I.W. Rangelow and V. Aksyuk
Journal of Latex Class Files, Vol.14, No. 8 (2015)

Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patternin
D.L. Olynick, P. Perera, A. Schwartzberg, P. Kulshreshta, D.G. De Oteyza, N. Jarnagin, C. Henderson, Z. Sun, I. Gunkel, T. Russell, M. Budden and I.W. Rangelow
Journal of Photopolymer Science and Technology, Volume 28, Number 5, pp. 663-668 (2015)

Estimator Based Multi-Eigenmode Control of Cantilevers in Multifrequency Atomic Force Microscopy
A. Schuh, I. S. Bozchalooi, I.W. Rangelow and K. Youcef-Toumi
2015 American Control Conference, Palmer House Hilton, July 1-3, Chicago, IL, USA
978-1-4799-8684-2/$31.00,2015 AACC

Tip Motion-Sensor Signal Relation for a Composite SPM/SPL Cantilever
D. Roeser, S. Gutschmidt, T. Sattel and I.W. Rangelow
Volume: PP, Issue: 99, Pages: 1 - 3, 2015
DOI: 10.1109/JMEMS.2015.2482389

Ultrathin transparent photodetector for use in Standing-Wave-Interferometer
I. Ortlepp, H.-J. Büchner, Tzv. Ivanov, M. Hofer, J.-P. Zöllner, I.W. Rangelow and E. Manske
XXI IMEKO World Congress "Measurement in Research and Industry" August 30 - September 4, 2015, Prague, Czech Republic

Profile simulation model for sub-50nm cryogenic etching of silicon using SF6/O2 inductively coupled plasma
V. Ishchuk, D.L. Olynick, Z. Liu and I.W. Rangelow
Journal of Applied Physics 118, 053302 (2015); doi: 10.1063/1.4927731

Fast atomic force microscopy with self-transduced, self-sensing cantilever
A. Ahmad, Tzv. Ivanov, T. Angelov and I.W. Rangelow
Journal of Micro/Nanolith. MEMS MOEMS 14(3) 031209 (Jul-Sep 2015)

Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning
D.L. Olynick, P. Perera, A. Schwartzberg, P. Kulshrethshta, D.G. De Oteyza, N. Jarnagin, C. Henderson, Z. Sun, I. Gunkel, T. Russell, M. Budden and I.W. Rangelow
Journal of Photopolymer Science and Technology, Volume 28, (5) pp. 663-668, 2015

Multi-eigenmode control for high material contrast in bimodal and higher harmonic atomic force microscopy
A. Schuh, I. Soltani Bozchalooi, Ivo W. Rangelow and K. Youcef-Toumi
Nanotechnology 26 (2015) 235706 (14pp); doi:10.1088/0957-4484/26/23/235706

Advanced electric-field scanning probe lithography on molecular resist using active cantilever
M. Kaestner, C. Aydogan, Tzv. Ivanov, St. Lenk, A. Ahmad, T. Angelov, A. Reum, V. Ishchuk, I. Atanasov, Y. Krivoshapkina, M. Hofer, M. Holz and I.W. Rangelow
Journal of Micro/Nanolith. MEMS and MOEMS Vol. 14(3), 031202 (Jul-Sep 2015)

Self-actuated, self-sensing cantilever for fast CD measurement
A. Ahmad, Tzv. Ivanov, A. Reum, E. Guliyev, T. Angelov, A. Schuh, M. Kaestner, I. Atanasov, M. Hofer, M. Holz and I.W. Rangelow
Proc. SPIE. 9424, Metrology, Inspection and Process Control for Microlithography XXIX, 94240P.
doi: 10.1117/12.2085760 (March 19, 2015)

Tailored molecular glass resists for scanning probe lithography
Chr. Neuber, H.-W. Schmidt, P. Strohriegl, A. Ringk, T. Kolb, A. Schedl, V. Fokkema, Marijin G.A. van Veghel, M. Cooke, C. Rawlings, U. Dürig, A. Knoll, J.-F. de Marneffe, Ziad el Otell, M. Kaestner, Y. Krivoshapkina, M. Budden and I.W. Rangelow
Proc. SPIE. 9425, Advances in Pattering Materials and Processes XXXII, 94250E. (March 20, 2015)
doi: 10.1117/12.2085734, (March 19, 2015)

Active Microcantilevers for High Material Contrast in Harmonic Atomic Force Microscopy
A. Schuh, M. Hofer, Tzv. Ivanov and I.W. Rangelow
IEEE Journal of Microelectromechanical Systems, JMEMS-2015.2428677

Fabrication of self-actuated piezoresistive thermal probes
M. Hofer, Tzv. Ivanov, M. Rudek, D. Kopiec, E. Guliyev, T.P. Gotszalk and I.W. Rangelow
Microelectronic Engineering, Volume 145, 1. September 2015, Pages 32-37 doi:10.1016/j.mee.2015.02.016

Low frequency measurements using piezoresistive cantilever MEMS devices - theproblem of thermal drift
Procedia Engineering 87 (2014) , 1259 - 1262
G. Jozwiak, D Kopiec, T. Gotszalk, P. Grabiec and I.W. Rangelow

Local formation of nitrogen-vacancy centers in diamond by swift heavy ions
JOURNAL OF APPLIED PHYSICS 116, 214107 (2014); doi: 10.1063/1.4903075
J. Schwartz, S. Aloni, D.F. Ogletree, M. Tomut, M. Bender, D. Severin, C. Trautmann, I.W. Rangelow and T. Schenkel

Scanning probes in nanostructure fabrication
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures B 32, 06F101 (2014); doi: 10.1116/1.4897500
M.Kästner, Tzv. Ivanov, A. Schuh, A. Ahmad, T. Angelov, Y. Krivoshapkina, M. Budden, M. Hofer, St. Lenk, J.-P. Zöllner, Ivo W. Rangelow, A. Reum, E. Guliyev, M. Holz and N. Nikolov

Adaptive AFM scan speed control for high aspect ratio fast structure tracking
Review of Scientific Instruments 85, 103706 (2014); doi: 10.1063/1.4897141
A. Ahmad, A. Schuh and I.W. Rangelow

Parallel SPM cantilever arrays for large area surface metrology and lithography
Proc. of SPIE Vol. 9050 90500W-1, 2014
Teodor Gotszalk, Tzvetan Ivanov and Ivo W. Rangelow

Shear force microscopy using piezoresistive cantilevers in surface metrology
SPIE, (9236-10) Advanced Scanning Microscopies 2014
Teodor P. Gotszalk, Daniel Kopiec, Andrzej Sierakowski, Pawel Janus, Piotr B. Grabiec,  Ivo W. Rangelow

Fast SPM Scanning Stage
ACTUATOR 2014, 14th International Conference on New Actuators, Bremen, Germany, 23-25 June 2014, S. 589-592
E. Guliyev, A. Ahmad, M. Kästner, T. Angelov, S. Lenk, I. Atanasov, N. Nikolov, T. Ivanov, K. Szostak, M. Holz, A. Reum, M. Hofer, K. Nieradka, T. Hrasok, H. Lipowicz, B. Volland, V. Ishchuk, J.-P. Zöllner and I.W. Rangelow

Single mask fabrication process for movable MEMS devices
Microsystem Technologies, Micro- and Nanosystems Information Storage and Processing Systems; ISSN 0946-7076, Volume 20, Numbers 4-5
Microsyst Technol (2014) 20:955-961, DOI 10.1007/s00542-014-2098-7
Ali B. Alamin Dow, Adel Gougam, Nazir P. Kherani and I.W. Rangelow

Focused ion beam assisted fabrication and application of high speed scanning thermal microscopy selfacuated piezoresistive probe
THE 58th, INTERNATIONAL CONFERENCE on ELECTRON, ION and PHOTON BEAM TECHNOLOGY & NANOFABRICATION, Washington, DC, May 27 - May 30, 2014
M. Rudek, D. Kopiec and T. Gotszalk, M. Hofer, Tzv. Ivanov, E. Guliyev and I.W. Rangelow, (to be published in JVST, B)

Cavity optical transducer for scanning probe microscopy
THE 58th, INTERNATIONAL CONFERENCE on ELECTRON, ION and PHOTON BEAM TECHNOLOGY & NANOFABRICATION, Washington, DC, May 27 - May 30, 2014
T. Michels, J. Zou, H. Miao, V. Aksyuk, I.W. Rangelow, NIST, (to be published in JVST, B)

Molecular glass resists for scanning probe lithography
Proc. of SPIE Vol. 9049 90491V-1
Ch. Neuber, A. Ringk, T. Kolb, F. Wieberger, P. Strohriegl, H.-W. Schmidt, V. Fokkema, M. Cooke, C. Rawlings, U. Dürig, A. Knoll, J.-F. de Marneffe, P. de Schepper, M. Kästner, Y. Krivoshapkina, M. Budden and I.W. Rangelow

Electric field scanning probe lithography on molecular glass resists using self-actuating, self-sensing cantilever
Proc. of SPIE Vol. 9049 90490C-1
M. Kästner, K. Nieradka, Tzv. Ivanov, St. Lenk, Y. Krivoshapkina, A. Ahmad, T. Angelov, E. Guliyev, A. Reum, M. Budden, T. Hrasok, M. Hofer, Ch. Neuber and I.W. Rangelow

Review of scanning probe micromachining and its applications within nanoscience
Microelectronic Engineering 2014, doi.org/10.1016/j.mee.2014.02 Page 5
T. Michels and Ivo W. Rangelow, (available online 24.02.2014)

Microthermomechanical infrared sensors
Opto-Electronics Review 22 (1), 1-15, 2014, DOI: 10.2478/s11772-014-0176-0
M. Steffanson and I.W. Rangelow

Thermographischer Detektor basierend auf einem neuartigen Mikro-Spiegel Sensor
tm - Technisches Messen 2014, DOI: 10.1515/teme-2014-1017
Ivo W. Rangelow, Stefan Sinzinger, Marek Steffanson, Mathias Holz, Tzvetan Ivanov, Roman Kleindienst and Ranald Kampmann

ViPER: simulation software for high aspect ratio plasma etching of silicon
V. Ishchuk, B. E. Volland and I.W. Rangelow
Microsyst Technol DOI 10.1007/s00542-013-1926-5; 26. September 2013

Mix & Match Electron Beam and Scanning Probe Lithography for sub-5 nm Pattering
M. Kaestner, M. Hofer and I.W. Rangelow
The 57th International Conference on Electron, Ion and Photon beam Technology & Nanofabrication, Gaylord Opryland Resort Nashville, TN May 28 - May 31, 2013

Sub-10nm silicon nano-structures based on block copolymer lithography and high selectivity cryogenic temperature dry etching
D. Olynick, Zuwei Liu, Xiaodan Gu, Th. Russell, U. Mass Amherst, Justin Hwu, V. Ishchuk and I.W. Rangelow
Nanotech 2013

Scanning probe lithography for electronics at the 5nm scale
Z. Durrani, M. Kaestner, M. Hofer, Tzv. Ivanov and I.W. Rangelow
SPIE 2013 Advanced Lithography 24-28 February 2013 SPIE Newsroom (Cache)

Scanning Probe Lithography approach for beyond CMOS devices
Z. Durrani, M. Jones, M. Kaestner, M. Hofer, E. Guliyev, A. Ahmad, Tzv. Ivanov, J.-P. Zoellner and I.W. Rangelow
Advanced Lithography, Proc. SPIE - Int. Soc. Opt. Eng. 2013, Vol. 8680, 868017-4

0.1-nanometer resolution positioning stage for sub-10nm scanning probe lithography
N. Vorbringer-Doroshovets, F. Balzer, E. Manske, M. Kaestner, A. Schuh, J.-P. Zoellner, M. Hofer, E. Guliyev, A. Ahmad, Tzv. Ivanov and I.W. Rangelow
Advanced Lithography, Proc. SPIE - Int. Soc. Opt. Eng. 2013, Vol. 8680, 868016-1

Mix & Match Electron Beam & Scanning Probe Lithography for high troughput sub-10nm Lithography
M. Kaestner, M. Hofer and I.W. Rangelow
Advanced Lithography, Proc. SPIE - Int. Soc. Opt. Eng. 2013, Vol. 8680, 868019-1

Nanolithography by scanning probes on calixarene molecular glass resist using mix-and-match lithography
M. Kaestner, M. Hofer and I.W. Rangelow
J. Micro/Nanolith. MEMS MOEMS  Vol. 12(3), 031111-1 - 031111-13 (Jul-Sep 2013)

Parallelized scanning probe microscopy by an integrated dual-cantilever transducer with independent actuation and shared cavity-optomechanical readout
T. Michels, I.W. Rangelow and V. Aksyuk, Member, IEEE
JOURNAL OF LATEX CLASS FILES, VOL. 11, NO. 4, DECEMBER 2012

Improved single ion implantation with scanning probe alignment
M. Ilg, Chr. D. Weis, J. Schwartz, A. Persaud, Qing Ji, Cheuk Chi Lo, J. Bokor, A. Hegyi, E. Guliyev, I.W. Rangelow and Th. Schenkel
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures B30(6), Nov/Dec 2012

Charging effect simulation model used in simulations of plasma etching of silicon
V. Ishchuk, B.E. Volland, M. Hauguth, M. Cooke and I.W. Rangelow
Journal of Applied Physics (2012), Volume 112, Issue 8

Encased Cantilevers and Alternative Scan Algorithms for Ultra-Gantle High Speed Atomic Force Microscopy
P. Ashby, D. Ziegler, A. Frank-Hauguth, Sindy Frank-Hauguth, A. Chen, T. Meyer, R. Farnham, N. Huynh, I.W. Rangelow, J.-M. Chang and A. Bertozzi
Biophysical Journal, Volume 102, Issue 3, Supplement 1, 31 January 2012, Page 586a

The spring constant calibration of the piezoresistive cantilever based biosensor
G. Jòzwiak, D. Kopiec, P. Zawierucha, T. Gotszalk, P. Janus, P. Grabiec, I.W. Rangelow
Sensors and Actuators B: Chemical, Volume 170, 31 July 2012, pp. 201-206

ARCH-type micro-cantilever FPA for uncooled IR detection
M. Steffanson, K. Gorovoy, V. Ramkiattisak, Tzv. Ivanov, J. Kròl, H. Hartmann and I.W. Rangelow
Microelectronic Engineering Volume 98 (2012) Pages 614-618

Increased imaging speed and force sensitivity for bio-applications with small cantilevers using a conventional AFM setup
M. Leitner, G. E. Fantner, E. J. Fantner, K. Ivanova, Tzv. Ivanov, I. W. Rangelow, A. Ebner, M. Rangl, J. Tang and P. Hinterdorfer
Micron, Volume 43, Issue 12 (December 2012) Pages 1399-1407

Irregular film thickness distribution in C4F8 inductively coupled plasma polymer deposition
B.E. Volland, M. Hauguth, V. Ishchuk, I.W. Rangelow and A.L. Goodyear
Microelectronic Engineering Volume 98 (2012) Pages 524 - 527

High speed quasi-monolithic silicon/piezostack SPM scanning stage
E. Guliyev, Th. Michels, B.E. Volland, Tzv. Ivanov, M. Hofer and I.W. Rangelow
Microelectronic Engineering Volume 98 (2012) Pages 520 - 523

Scanning Probe Nanolithography on Calixarene
M. Kästner and Ivo W. Rangelow
Microelectronic Engineering (2012), Pages 96-99

Multi-step Scanning Probe Lithography (SPL) on calixarene with overlay alignment
M. Kästner and I.W. Rangelow
Proc. SPIE 8323, 83231G (2012)

Micromachined self-actuated piezoresistive cantilever for high speed SPM
Th. Michels, E. Guliyev, M. Klukowski and I.W. Rangelow
Microelectronic Engineering Volume 97 (2012) Pages 265 - 268

Quasi-monolithic integration of silicon-MEMS with piezoelectric actuators for high-speed non-contact atomic force microscopy
E. Guliyev, B.E. Volland, Y. Sarov, Tzv. Ivanov, M. Klukowski, E. Manske and I.W. Rangelow
Meas. Sci. Technol. 23(2012)074012(8pp); Online at stacks.iop.org/MST/23/074012

Nanoscale Engineering and Optical Addressing of Single Spins in Diamond
S. Pezzagna, D. Wildanger, P. Mazarov, A. Wieck, Y. Sarov, I.W. Rangelow, B. Naydenov, F. Jelezko, S.W. Hell ans J. Meijer
Small 6 (2010) 2117-2121

Near-IR micro-fluidic sensing by total internal reflective diffraction
Y. Sarov, V. Sarova, I. Capek and I.W. Rangelow
J. Phys.: Conf. Ser. 253 (2010) 012051 (pg. 1-7)

In situ study of adsorption/desorption of protein on self-actuated piezoresistive SPM-cantilever
J.A. Mielczarski, Y.L. Jeyachandran, E. Mielczarski, T. Gotszalk, I.W. Rangelow, N. Nikolov
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 317-321

Pressure, Relative Humidity and Temperature Measurement using Microcantilevers with Integrated Bimorph Actuator and Piezoresistive Read-out
J. Schwartz, Ch. Bitterlich, V. Sarova, Ph. Michaelides, A. Frank, Y. Sarov, Tzv. Ivanov, J.-P. Zöllner, I.W. Rangelow, M. Höche, W. Hummel, N. Nikolov
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 307-316

Self-actuated Piezoresistive Cantilever based AFM for Single Ion Implantation
A. Schuh, Y. Sarov, Tzv. Ivanov, I.W. Rangelow, C.D. Weis, A. Batra, A. Persaud, T. Schenkel
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 299-306

Integration of Self-actuating Piezoresistive Cantilever based AFM into SEM
U. Wenzel, Tzv. Ivanov, I.W. Rangelow, D.F. Ogletree
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 295-298

Two Chip Integration of Sensor and ASIC using a Modular Through Silicon Via Concept
S. Kolb, A. Niklas, H. Theuss, B. Winkler, U. Fakesch, I.W. Rangelow, O. Blom
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 287-293

Large Area Surface Measurements using PRONANO Array Cantilevers
M. Zielony, P. Zawierucha, M. Woszczyna, G. Jòzwiak, T. Gotszalk, Y. Sarov, Tzv. Ivanov, A. Frank, J.-P. Zöllner, I.W. Rangelow
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 273-278

High Eigenmode Operation of Cantilevers with Integrated Piezoresistive Readout and Bimetal Actuator
M. Woszczyna, P. Zawierucha, P. Paletko, M. Zielony. T. Gotszalk, Y. Sarov, Tzv. Ivanov, A. Frank, J.-P. Zöllner, I.W. Rangelow
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 243-253

Self-Oscillation Technology for Cantilever SPM Array
N. Nikolov, N. Kenarov, P. Popov, T. Gotszalk, M. Woszszyna, P. Zawierucha, I.W. Rangelow, Y. Sarov
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 225-231

FPGA based High-Throughput Data Transfer System for Large SPM Arrays
N. Kenarov, N. Nikolov, P. Popov, I.W. Rangelow, T. Gotszalk
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 217-224

Measurement and Control System for PRONANO 1D Cantilever Arrays
P. Zawierucha, M. Woszczyna, M. Zielony, D. Kopiec, G. Jòzwiak, K. Garczyski, T. Gotszalk, Y. Sarov, Tzv. Ivanov, A. Frank, J.-P. Zöllner, I.W. Rangelow, R. Pedrau, P.E. Latimier, N. Nikolov
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 209-215

Micro-machined Parallel up to 8x64 Cantilever Arrays with Planar and Vertical Interconnections for Large Area Imaging
Y. Sarov, Tzv. Ivanov, A. Frank, V. Sarova, J.-P. Zöllner, I.W. Rangelow
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 179-206

Suppression of Cross-Talk Effects of Self Actuated Piezoresistive SPM-Cantilever Arrays
A. Frank, J.-P. Zöllner, Y. Sarov, Tzv. Ivanov, I.W. Rangelow
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 169-178

Fabrication of Parallel Cantilever Systems with Sharp AFM Tips for Surface Scanning and Analysis
Y. Sarov, T. Ivanov. A. Frank, V. Sarova, U. Wenzel, J.-P. Zöllner, I.W. Rangelow, N. Nikolov, P. Zawierucha, M. Woszczyna, T. Gotszalk
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 163-168

Development of a plasma etching process for vertical interconnections using DoE
W. Schumann, B. Volland, I.W. Rangelow
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 119-128

Basic Principles of Self-actuated Piezoresistive SPM-Cantilevers
I.W. Rangelow, Tzv. Ivanov, Y. Sarov, J.-P. Zöllner, A. Frank, T. Gotszalk
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 89-98

Microcantilever Deflection Measurements
R.J. Dunn, T. Sulzbach, I.W. Rangelow
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 57-85

Mechanics of Microcantilevers
R.J. Dunn, Ch. Bitterlich, I.W. Rangelow, T. Sulzbach
in PRONANO- Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysis ans Synthesis (Ed. Th. Sulzbach, I.W. Rangelow), ISBN 978-386991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 35-56

Thermally driven multi-layer actuator for 2D cantilever arrays
Y. Sarov, Tz. Ivanov, A. Frank, I.W. Rangelow
Applied Physics A, January 2011, Volume 102, Issue 1, pp 61-68, First online: 19 October 2010

Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation
M. Woszczyna, P. Zawierucha, P. Paletko, M. Zielony, T. Gotszalk, Y. Sarov, Tz. Ivanov, A. Frank, J.-P. Zöllner, I.W. Rangelow
Journal of Vacuum Science & Technology B Microelectronics and Nanometer StructuresB, 28 (2010) C6N13 (pg. 1-6)

Nanoprobe maskless lithography
I.W. Rangelow, Tz. Ivanov, Y. Sarov, A. Schuh, A. Frank, H. Hartmann, J.-P. Zöllner, D. Olynick, V. Kalchenko
Proc. SPIE, 7637 (2010) 76370V-1-10, doi:10.1117/12.852265

Crosstalk effects in self-actuated piezoresistive cantilever arrays
A. Frank, J.-P. Zöllner, Y. Sarov, Tz. Ivanov, I.W. Rangelow, N. Nikolov, M. Swiatkowski, T. Gotszalk, I. Chakarov
submitted to IEEE JMEMS 2010

"Realization of cantilever arrays for parallel proximity imaging"
Y. Sarov, Tz. Ivanov, A. Frank, J.-P. Zöllner, N. Nikolov, I.W. Rangelow
J. Phys.: Conf. Ser. 253 (2010) 012050 (pg. 1-7)

"Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation"
M. Woszczyna, P. Zawierucha, P. Paletko, M. Zielony, T. Gotszalk, Y. Sarov, Tz. Ivanov, A. Frank, J.-P. Zöllner, I.W. Rangelow
54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), Anchorage, Alaska, June 1 - 4, 2010

"Nanoprobe maskless lithography", invited lecture atconference- SPIE- "Alternative Lithographic Technologies II"
I.W. Rangelow, Tz. Ivanov, Y. Sarov, A. Schuh, A. Frank, H. Hartmann, J.-P. Zöllner, D. Olynick, V. Kalchenko
23-25 Februar 2010, San Jose California USA

Arch-type microcantilever as uncooled infrared detectors
M. Steffanson, T. Ivanov, F. Shi, H. Hartmann and I.W. Rangelow
Sensoren und Messsysteme 2010, ISBN 978-3-8007-3260-9 VDE Verlag GmbH Berlin Offenbach, pp.339

Prallel Cantilever Systems for Scanning and Analysis
A. Frank, T. Ivanov, Y. Sarov, J.-P. Zöllner, G. Bischoff, P. Zawierucha, M. Zielony, T. Gotszalk, N. Nikolov and I.W. Rangelow
Sensoren und Messsysteme 2010, ISBN 978-3-8007-3260-9, VDE Verlag GmbH, Berlin und Offenbach, pp.334-338

Silicon Nanoresonator
M. Hofer, Th. Stauden, S.A.K. Nomvussi, J. Petzoldt and I.W. Rangelow
Sensoren und Messsysteme 2010, ISBN 978-3-8007-3260-9 VDE Verlag GmbH Berlin Offenbach, pp.330-333

Self-actuated micro-cantilever array with piezoresistive readout for multi-parameter recognition
C. Bitterlich, T. Ivanov, Y. Sarov, V. Sarova, J.-P. Zöllner, U. Wenzel, M. Höche, W. Hummel and I.W. Rangelow
Sensoren und Messsysteme 2010, ISBN 978-38007-3260-9 VDE Verlag GmbH Berlin und Offenbach, pp.306-310

Realization of cantilever arrays for parallel proximity imaging
Y. Sarov, Tzv. Ivanov, A. Frank, J.-P. Zöllner, N. Nikolov and I.W. Rangelow
J. Phys.: Conf. Ser. 253/012050 (2010)

Microgripper for Micro- and Nanoresearch
B.E. Volland, Tzv. Ivanov, M. Steffanson, J. False and I.W. Rangelow
SENSOR MAGAZIN 2/2010, pp. 57 (2010)

Mikrogreifer für die Mikro- und Nanoforschung
B. Volland, T. Ivanov, M. Steffanson, J. False und I.W. Rangelow
SENSOR MAGAZIN 2/2010, S. 23-25

Micromachined array of self-actuated piezoresistive proximal probes for parallel surface imaging
T. Gotszalk, P. Zawierucha, M. Zielony, J.-P. Zöllner, Y. Sarov, A. Frank, Tzv. Ivanov, I.W. Rangelow, N. Nikolov, R. Persaud and P.-E. Latimer.

PRONANO: Schlüsseltechnologie zur Analyse und Manipulation in der Nano-Technologie mittels paralleler Cantilever-Arrays
A. Frank, J.-P. Zöllner, Y. Sarov, Tzv. Ivanov , I.W. Rangelow, M. Woszczyna, P. Zawierucha, M. Zielony und T. Gotszalk.
Veröffentlichung im Tagungsband zum 2. Landshuter Symposium Mikrosystemtechnik, Landshut 24.-25.Feb. 2010, (ed. Prof. H. Gesch, U. Vogl, Th. Weber-Reichart (Cluster Mikrosystemtechnik)), ISBN 978-3-00-030325-8- in Germany

Packaging von selbstaktuierten piezoresistiven Cantilever-Arrays
G. Bischoff, K.-H. Drüe, J. Müller, Y. Sarov, A. Frank, J.-P. Zöllner, Tzv. Ivanov, I.W. Rangelow, M. Woszczyna, P. Zawierucha, M. Zielony und T. Gotszalk.
Veröffentlichung im Tagungsband zum 2. Landshuter Symposium Mikrosystemtechnik, Landshut 2010, ISBN 978-3-00-030325-8

Nanostructuring techniques for 3C-SiC (100) NEMS structures
M. Hofer, Th. Stauden, I.W. Rangelow and J. Pezoldt
Mater Sci. Forum Vols. 645-648 (2010), 841-844