Chris Liebold
The Euspen conference "Precision Motion Systems & Control" took place in Brabanthallen's-Hertogenbosch, Netherlands, on November 15 and 16, 2022.
There, colleagues from our institute presented their latest research results in the field of precision measurement technology.
The keynote speaker Dr. Peter der Groot from Zygo Corporation, US referred in his presentation "State-of-the-Art: The turbulent history of interferometric methods of precision positioning" also to the development of the Nanomeasurement Machine at TU Ilmenau and the World Interferometry Day.
