Characterization of a parallel kinematics actuated in situ reference measurement system for 5D-nano-measurement and nano-fabrication applications :
Charakterisierung eines parallelkinematisch aktuierten In-situ-Referenzmesssystems für 5D-Nanomess- und Fabrikationsanwendungen. - In: Technisches Messen, ISSN 2196-7113, Bd. 91 (2024), 2, S. 102-115
Die stetig voranschreitende Entwicklung im Bereich der Fertigung optischer und elektronischer Elemente auf Basis von Nanotechnologien führt seit Jahren zu einer steigenden Nachfrage nach hochpräzisen Nanomess- und Nanofabrikationsmaschinen (The International Roadmap For Devices And Systems, IEEE, 2020; C. Grant Willson and B. J. Roman, “The future of lithography: SEMATECH litho forum 2008,” ASC Nano , vol. 2, no. 7, pp. 1323-1328, 2008). Als technologisch besonders anspruchsvoll hat sich dabei die Fabrikation auf stark geneigten, gekrümmten, asphärischen und freigeformten Oberflächen herausgestellt (R. Schachtschneider, et al., “Interlaboratory comparison measurements of aspheres,” Meas. Sci. Technol. , vol. 29, no. 13pp, p. 055010, 2018). Aufbauend auf den zukunftsweisenden Entwicklungen der Nanopositionier- und Nanomessmaschine 1 (NMM-1) (G. Jäger, E. Manske, T. Hausotte, and J.-J. Büchner, “Nanomessmaschine zur abbefehlerfreien Koordinatenmessung,” tm - Tech. Mess. , vol. 67, nos. 7-8, pp. 319-323, 2000) und der Nanopositionier- und Nanomessmaschine 200 (NPMM-200) (E. Manske, G. Jäger, T. Hausotte, and F. Balzer, “Nanopositioning and Nanomeasuring Machine NPMM-200 - sub-nanometre resolution and highest accuracy in extended macroscopic working areas,” in Euspen’s 17th International Conference , 2017), wird an der Technischen Universität Ilmenau seit mehreren Jahren an Konzepten für NPMM mit erhöhtem Freiheitsgrad geforscht (F. Fern, “Metrologie in fünfachsigen Nanomess- und Nanopositioniermaschinen,” Ph.D. thesis, Technische Universität Ilmenau, 2020; R. Schienbein, “Grundlegende Untersuchungen zum konstruktiven Aufbau von Fünfachs-Nanopositionier- und Nanomessmaschinen,” Ph.D. thesis, Technische Universität Ilmenau, 2020). So besitzt der seit 2020 entwickelte Demonstrator NMM-5D (J. Leinweber, C. Meyer, R. Füßl, R. Theska, and E. Manske, “Ein neuartiges Konzept für 5D Nanopositionier-, Nanomess-, und Nanofabrikationsmaschinen,” tm - Tech. Mess. , vol. 37, nos. 1-10, 2022) neben dem kartesischen Verfahrbereich von 25mm × 25mm × 5mm zusätzlich ein Rotationsvermögen des Tools von 360˚ sowie ein Neigungsvermögen von 50˚. Imfolgenden Artikel wird davon ausgehend die mechanische und metrologische Charakterisierung der parallelkinematisch aktuierten Rotationserweiterung präsentiert. Hierbei konzentrieren sich durchgeführte Untersuchungen primär auf die kinematisch verursachten Abweichungen des Tool Center Point (TCP) sowie die Detektierung dieser Abweichungen mit einem interferometrischen In-situ -Referenzmesssystem. Darüber kann perspektivisch eine geregelte Kompensation der auftretenden TCP-Abweichungen erfolgen.
https://doi.org/10.1515/teme-2023-0109
Reflective dual field-of-view optical system based on the Alvarez principle. - In: Applied optics, ISSN 2155-3165, Bd. 62 (2023), 31, S. 8390-8401
A novel, to the best of our knowledge, dual-state reflective optical relay system based on the Alvarez system is proposed, which can be used for remote sensing applications. By keeping the image and pupil positions constant, it can be combined with a telescope to achieve two different magnifications. As a compact structure with only two moving parts, freeform optical mirrors and a nearly diffraction limited performance for the infrared wavelength 8 µm make it an attractive subsystem for space applications. Different design tradeoffs and the preferred layout properties are discussed in detail.
https://doi.org/10.1364/AO.502846
Manufacturing and static performance of porous aerostatic bearings. - In: Precision engineering, Bd. 84 (2023), S. 177-190
According to the common body of knowledge, aerostatic bearings invariably need narrow manufacturing tolerances to ensure maximal load capacity and high stiffness. This study experimentally investigates the manufacturing of porous material aerostatic bearings and the effect of manufacturing parameters on the performance properties of the bearings. During the study, samples were manufactured using different methods, and the geometrical and performance properties of each sample were inspected. The bearing performance measurement device developed during the study is introduced. The results present the dependence between manufacturing parameters and bearing properties under varying load and operating pressure conditions. The results clearly suggest that effect of bearing surface roughness on load capacity is small; meanwhile, surface planarity has a major impact on load capacity.
https://doi.org/10.1016/j.precisioneng.2023.06.014
Hybrid additive manufacturing : improved large scale additive manufacturing by means of laser tempering. - In: PhotonicsViews, ISSN 2626-1308, Bd. 19 (2022), 5, S. 47-51
Large-scale additive manufacturing (LSAM) is an additive manufacturing process based on the principles of fused filament fabrication but with significantly higher material deposition rates. The novel hybrid process shown in this paper combines LSAM with a laser beam heat treatment. The structure and mechanical properties of parts are improved due to significantly decreased void sizes. The following article details investigations into the vertical and lateral remelting of strands as well as the utilization of a mirror system, which enables beam guidance according to the machine's printing path.
https://doi.org/10.1002/phvs.202200041
A novel concept for 5D nanopositioning, nanomeasuring and nanofabrication machines :
Ein neuartiges Konzept für 5D Nanopositionier-, Nanomess-, und Nanofabrikationsmaschinen. - In: Technisches Messen, ISSN 2196-7113, Bd. 89 (2022), 9, S. 634-643
In den vergangenen Jahren wurden an der TU-Ilmenau zahlreiche Entwicklungen im Bereich der Nanopositionier- und Nanomesstechnik realisiert. Insbesondere die NMM-1 [Gerd Jäger, Eberhard Manske, Tino Hausotte, Jans-Joachim Büchner, Nanomessmaschine zur abbefehlerfreien Koordinatenmessung, tm - Technisches Messen, 67(7-8), 2000] sowie die NPMM-200 [Eberhard Manske, Gerd Jäger, Tino Hausotte, Felix Balzer, Nanopositioning and Nanomeasuring Machine NPMM-200 - sub-nanometre resolution and highest accuracy in extended macroscopic working areas, euspen’s 17th International Conference, 2017] stellen ein Novum auf dem Gebiet der Koordinatenmesstechnik mit Nanometerpräzision unter Einhaltung des Abbe-Komparatorprinzips [Ernst Abbe, Messaparate für Physiker, Zeitschrift für Instrumentenkunde, 10:446-448, 1890] dar. Ausgehend von diesen Errungenschaften besteht ein nächster Schritt im Messen und Fabrizieren auf stark gekrümmten, asphärischen, oder freigeformten Oberflächen. Vor jenem Hintergrund wird im folgenden Artikel ein Konzept für ein zweiachsiges Rotationsmodul vorgestellt. Dieses dient als Erweiterung für die NMM-1 und ermöglicht über das kartesische Messvolumen von hinaus zusätzlich eine Rotation des Tools über 360 ˚ um die Hochachse sowie 60 ˚ Neigung. Die Umsetzung erfolgt über eine neuartige sphärische Parallelkinematik. Mit Hilfe eines interferometrischen In-Situ-Referenzmesssystems können die während der Rotationsbewegungen auftretenden translatorischen Positionsabweichungen detektiert werden. Erste Untersuchungen an einem Prototypenaufbau erbringen den Funktionsnachweis des Referenzmesssystems über den gesamten adressierbaren Winkelbereich.
https://doi.org/10.1515/teme-2022-0037
Design of an enhanced mechanism for a new Kibble balance directly traceable to the quantum SI. - In: EPJ Techniques and Instrumentation, ISSN 2195-7045, Bd. 9 (2022), 1, 7, S. 1-18
The "Quantum Electro-Mechanical Metrology Suite" (QEMMS) is being designed and built at the National Institute of Standards and Technology. It includes a Kibble balance, a graphene quantum Hall resistance array and a Josephson voltage system, so that it is a new primary standard for the unit of mass, the kilogram, directly traceable to the International System of Units (SI) based on quantum constants. We are targeting a measurement range of 10 g to 200 g and optimize the design for a relative combined uncertainty of for masses of 100 g. QEMMS will be developed as an open hardware and software design. In this article, we focus on the design of an enhanced moving and weighing mechanism for the QEMMS based on flexure pivots.
https://doi.org/10.1140/epjti/s40485-022-00080-3
Aerostatically sealed chamber as a robust aerostatic bearing. - In: Tribology international, ISSN 1879-2464, Bd. 173 (2022), 107614, S. 1-10
Aerostatic bearings are typically used in ultra precision and high speed applications in controlled environments. The present study expands this operating domain. The present study experimentally investigates the performance and feasibility of a novel design for a robust air bearing consisting of an aerostatically sealed pressurized volume. A suitable operating domain for the bearing system was characterized based on measurements of the load capacity, friction moment, chamber flow, and seal flow rate at various opposing surface run-outs and supply pressures. The highest measured load capacity was 18.86 kN at 0.330 mm run-out, and decreased to 12.22 kN load at 3.804 mm run-out. The study provided corroborative evidence on the feasibility of the proposed chamber based bearing design.
https://doi.org/10.1016/j.triboint.2022.107614
Adjustment concept for compensating for stiffness and tilt sensitivity of a novel monolithic electromagnetic force compensation (EMFC) weighing cell. - In: Journal of sensors and sensor systems, ISSN 2194-878X, Bd. 11 (2022), 1, S. 109-116
This paper describes the new adjustment concept of novel planar, monolithic, high-precision electromagnetic force compensation weighing cells. The concept allows the stiffness and the tilt sensitivity of the compliant mechanisms that are dependent on the nominal load on the weighing pan to be adjusted to an optimum. The new mechanism is set up and adjusted according to the developed mechanical model. For evaluation of the concept the system is tested on a high-precision tilt table and under high vacuum conditions in the environment of a commercially available mass comparator.
https://doi.org/10.5194/jsss-11-109-2022
Foreword to the special issue on "Tip- and laser-based 3D nanofabrication in extended macroscopic working areas". - In: Nanomanufacturing and metrology, ISSN 2520-8128, Bd. 4 (2021), 3, S. 131
https://doi.org/10.1007/s41871-021-00113-7
Development and implementation of a rotating nanoimprint lithography tool for orthogonal imprinting on edges of curved surfaces. - In: Nanomanufacturing and metrology, ISSN 2520-8128, Bd. 4 (2021), 3, S. 175-180
Uniform molding and demolding of structures on highly curved surfaces through conformal contact is a crucial yet often-overlooked aspect of nanoimprint lithography (NIL). This study describes the development of a NIL tool and its integration into a nanopositioning and nanomeasuring machine to achieve high-precision orthogonal molding and demolding for soft ultraviolet-assisted NIL (soft UV-NIL). The process was implemented primarily on the edges of highly curved plano-convex substrates to demonstrate structure uniformity on the edges. High-resolution nanostructures of sub-200-nm lateral dimension and microstructures in the range of tens of microns were imprinted. However, the nanostructures on the edges of the large, curved substrates were difficult to characterize precisely. Therefore, microstructures were used to measure the structure fidelity and were characterized using profilometry, white light interferometry, and confocal laser scanning microscopy. Regardless of the restricted imaging capabilities at high inclinations for high-resolution nanostructures, the scanning electron microscope (SEM) imaging of the structures on top of the lens substrate and at an inclination of 45˚ was performed. The micro and nanostructures were successfully imprinted on the edges of the plano-convex lens at angles of 45˚, 60˚,and 90˚ from the center of rotation of the rotating NIL tool. The method enables precise imprinting at high inclinations, thereby presenting a different approach to soft UV-NIL on curved surfaces.
https://doi.org/10.1007/s41871-021-00114-6