TU Ilmenau/ IPMS

DFG Project “3D-NLM Machine”

On May 19, 2026, a technical kick-off meeting for the DFG project “3D-NLM Machine” took place in Ilmenau, featuring a visit from colleagues from Jena led by Prof. Dr. Zeitner. 

As part of the DFG program “New Instruments for Research,” the project partners have set themselves the goal of jointly developing and constructing a 3D nanolithography and nanomeasurement machine (3D-NLM machine) with a processing and measurement range of 1 m x 1 m x 0.2 m and positioning, structuring, and measurement accuracy down to the sub-nanometer range. Through the consistent integration of advanced 3D nanolithography (IAP/FSU Jena, Fraunhofer IGF) with extremely precise nanopositioning and nanomeasurement technology (IPMS/TU Ilmenau), which will enable a previously unseen level of performance at the limits of physics and what is technically feasible.

https://www.tu-ilmenau.de/aktuelles/6-mai-quantum-photonics-fair-erfurt-tu-ilmenau-launches-4-million-euro-project-for-high-precision-fabrication-of-large-area-nanostructures-with-atomic-precision