Based on the findings of Collaborative Research Centre 622, the study examines, on the one hand, the metrological limits for NPM machines with regard to working areas of up to 450 mm x 450 mm x 80 mm, measurement resolution up to 0.01 nm and reproducibility up to < 0.3 nm; and, secondly, optimally tailored metrological solutions are being developed for variable application scenarios involving NPM machines with different sensor and probing systems.

Projects at the Centre of Excellence