Jäger, Gerd; Manske, Eberhard; Hausotte, Tino; Füßl, Roland; Grünwald, Rainer; Büchner, Hans-Joachim; Schott, Walter
Optical fibre coupled miniature interferometers designed for application in micro and nano devices. - In: Proceedings of the nineteenth annual meeting, (2004), S. 145-148
Optical fibre coupled miniature interferometers designed for application in micro and nano devices. - In: Proceedings of the nineteenth annual meeting, (2004), S. 145-148
Jäger, Gerd; Manske, Eberhard; Hausotte, Tino; Füßl, Roland; Grünwald, Rainer; Büchner, Hans-Joachim
Micro and nano devices based on miniature plane mirror interferometers. - In: Proceedings of the 8th International Conference on Mechatronics Technology, (2004), S. 7-11
Micro and nano devices based on miniature plane mirror interferometers. - In: Proceedings of the 8th International Conference on Mechatronics Technology, (2004), S. 7-11
Jäger, Gerd; Füßl, Roland; Manske, Eberhard; Grünwald, Rainer; Büchner, Hans-Joachim; Hausotte, Tino; Wurzbacher, Holger; Dontsov, Denis; Schott, Walter
Nanometer-scale miniature interferometers developed for nano measurements in micro- and nanotechnology. - In: Proceedings of the 4th EUSPEN international conference, (2004), S. 232-233
Nanometer-scale miniature interferometers developed for nano measurements in micro- and nanotechnology. - In: Proceedings of the 4th EUSPEN international conference, (2004), S. 232-233
Mastylo, Rostyslav; Manske, Eberhard; Jäger, Gerd
Development of a focus sensor and its integration into the nanopositioning and nanomeasuring machine. - In: Proceedings, (2004), S. 123-126
Development of a focus sensor and its integration into the nanopositioning and nanomeasuring machine. - In: Proceedings, (2004), S. 123-126
Mandryka, Victor; Büchner, Hans-Joachim; Jäger, Gerd
Design aspects in the development of a standing wave interferometer. - In: Optical metrology in production engineering, (2004), S. 175-183
Design aspects in the development of a standing wave interferometer. - In: Optical metrology in production engineering, (2004), S. 175-183
Welter, Matthias; Manske, Eberhard; Jäger, Gerd
Interferometric sensor and calibration system for high-precision applications. - In: Smart structures and materials 2004 - Smart sensor technology and measurement systems, (2004), S. 26-37
Interferometric sensor and calibration system for high-precision applications. - In: Smart structures and materials 2004 - Smart sensor technology and measurement systems, (2004), S. 26-37
Hofmann, Norbert; Hausotte, Tino; Jäger, Gerd; Manske, Eberhard
Measurement with an atomic force microscope using a long travel nanopositioning and nanomeasuring machine. - In: 2004 4th IEEE Conference on Nanotechnology, (2004), S. 183-185
Measurement with an atomic force microscope using a long travel nanopositioning and nanomeasuring machine. - In: 2004 4th IEEE Conference on Nanotechnology, (2004), S. 183-185
Manske, Eberhard; Mastylo, Rostyslav; Hausotte, Tino; Hofmann, Norbert; Jäger, Gerd
A modular auto focus/AFM-system with subnanometer capability for application in a nanopositioning- and nanomeasuring machine. - In: Proceedings of the 4th EUSPEN international conference, (2004), S. 262-263
A modular auto focus/AFM-system with subnanometer capability for application in a nanopositioning- and nanomeasuring machine. - In: Proceedings of the 4th EUSPEN international conference, (2004), S. 262-263
Hausotte, Tino; Jäger, Gerd; Manske, Eberhard; Sawodny, Oliver
Control system of a nanopositioning and nanomeasuring machine. - In: Actuator 2004, (2004), S. 123-126
Control system of a nanopositioning and nanomeasuring machine. - In: Actuator 2004, (2004), S. 123-126
Töpfer, Susanne; Mastylo, Rostyslav; Linß, Gerhard; Manske, Eberhard; Kühn, Olaf; Nehse, Uwe
Edge detection at height profiles with nano resolution. - In: 2004 4th IEEE Conference on Nanotechnology, (2004), S. 410-412
Edge detection at height profiles with nano resolution. - In: 2004 4th IEEE Conference on Nanotechnology, (2004), S. 410-412