The aim of the overall project is to develop a high-precision measuring instrument that combines the specific advantages of phase shift interferometry (PSI) and atomic force microscopy (AFM). Using innovative microscopy, the aim is to combine the precise but small-area and slow sub-nanometer resolution of AFM with the large-area and fast nm resolution of PSI microscopy. This should make it possible to generate high-precision 3D images of objects with a remarkable height measurement precision of less than 3 nm, regardless of the object size. A key component of the measurement system is an innovative active cantilever system controlled by a specially developed FPGA controller. This technology enables an impressive scanning speed of more than 5mm/s, providing unprecedented efficiency in performing this type of measurement. The strategic value of this project lies in the cooperative collaboration of the EU-Korea team along the technology value chain. This partnership also includes partners from industrial and metrological control, large scale and automated measurement to meet both research and SME control/inspection needs.
The aim of the sub-project at TU Ilmenau is to develop a fast piezoelectric 3D scanner that contains an integrated probe holder for active cantilevers with measuring electronics, enables scanning speeds of up to 4 mm/s and contains integrated piezoresistive position sensors in all 3 axes for high spatial resolution. In particular, the z-displacement of the measuring probe base with cantilever is to be measured very close to the clamping of the cantilever in order to measure the true position of the cantilever. Such a scanner does not yet exist. Its development would significantly increase the importance and competitiveness of atomic force microscopes with active cantilevers.
