System for 3D femtosecond laser-based micromachining

Contact person

Univ.-Prof. Dr.-Ing.Steffen Strehle
Microsystems Technology

Phone: +49 3677 69-2485
e-mail: steffen.strehle@tu-ilmenau.de

Funding information

Funding source: Stifterverband der deutschen Wissenschaft

Project leader: Thüringer Ministerium für Wirtschaft, Wissenschaft und
                          Digitale Gesellschaft

Participatinggroups: Microsystems Technology

Period of funding:10.08.2023 - 31.12.2024

Project information

The precise 3D micromachining of complex glasses and glass ceramics represents an internationally important field of research for microsystems technology, but also for the state of Thuringia in terms of its regional innovation strategy. Applications range from microsensor and actuator technology, optics and precision measurement technology to life sciences, energy generation and quantum technologies. Reproducible and precise glass micromachining is always a major challenge and is carried out using, for example, flour plasma-based processes. However, the creation of 3D structures in glass using these processes is currently only possible to a very limited extent and is disproportionately expensive.
As part of the application, a system for the resource-saving, fluorine-gas-free and efficient 3D micromachining of glasses and glass ceramics is therefore to be purchased. With the help of a focused femtosecond laser, glasses can be modified in a highly localized area. 3D processing is carried out by 3D guidance of the laser focus, with the primary focus being on selective laser (induced) etching (SLE) and the hermetic welding of glasses. Secondarily, local refractive index modifications, selective material ablation (e.g. metal thin films) and two-photon polymerization (2PP) should be mentioned. This allows complex and novel 3D functional structures to be created, which cannot be produced with the processes currently available at the TU Ilmenau, or only with disproportionately high effort. Last but not least, the system also allows new approaches in the design and construction of interdisciplinary microsystems, which need to be researched.