The group maintains and operates several laboratories and facilities for material production, processing and characterisation at the Centre for Micro- and Nanotechnologies (Feynmanbau), Meitnerbau and the Helmholtzbau.


The most important equipment and its applications are listed below.

For more detailed information, please contact either the laboratory managers listed or wet@tu-ilmenau.de.

Feynmanbau - Centre for Micro- and Nanotechnologies

Structural Analysis Laboratory – Rooms 020–028.

Meitnerbau

Laboratories 3.2.305–3.2.312 and in the cleanroom

Helmholtzbau